PI P-73 Series, Руководство пользователя

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10 Technical Data
38 Version: 1.0.0 PZ103E P-73x Nanopositioners
Unit P-733.2CD
P-733.2CL
P-733.3CD
P-733.3CL
P-733.2DD P-733.3DD P-734.2CD
P-734.2CL
P-733.ZCD
P-733.ZCL
Repeat-
ability in Z nm – < 1 – <1 – <2
Pitch in X, Y µrad <5 <5 <5 <5 <3 –
Tilt around X, Y (with
motion in Z) µrad – <5 – <5 – <5
Yaw in X, Y µrad <10 <10 <10 <10 <10 –
Straightness in X, Y nm <20 <20 <5 <5 – –
Crosstalk in X, Y
(with motion in Z) nm – <20 – <20 – <80
Evenness in X, Y nm <15 <15 <5 <5 typ. <5,
max. 10
–
Mechanical
properties
Stiffness in X, Y N/µm 1.5 1.4 20 4 3 –
Stiffness in Z N/µm – 9 – 10 – 2.5
Unloaded resonant
frequency in X, Y Hz 500 460 2230 1200 500 –
Unloaded resonant
frequency in Z Hz – 1400 – 1100 – 700
Loaded resonant
frequency in X, Y Hz 370 (120 g) 340 (120 g) 1800 (50 g) – 350 (200 g) –
Loaded resonant
frequency in Z Hz – 1060
(120 g) – – – 530 (120 g)
Loaded resonant
frequency in X, Y Hz 340 (200 g) 295 (200 g) 1550
(200 g) 530 (200 g) 250 (500 g) –
Loaded resonant
frequency in Z
Hz – 650 (200 g) – 635 (200 g) – 415 (200 g)
Compressive/tensile
stress capacity in
the direction of travel N 300 / 100 300 / 100 300 / 100 300 / 100 300 / 100 50 / 20
Load capacity N 20 20 20 20 20 20
Drive
properties
Piezo ceramics PICMA®
P-885 PICMA®
P-885 PICMA®
P-885 PICMA®
P-885 PICMA®
P-885 PICMA®
P-885
Electrical
capacitance in X , Y
µF 6 6 6.2 6.2 6.2 –
Electrical
capacitance in Z µF – 2.4 – 3.3 – 6
Dynamic operating
current coefficient in
X, Y µA /
(Hz×
µm) 7.5 7.5 25 25 7.8 –
Dynamic operating
current coefficient in
Z µA /
(Hz×
µm) – 30 – 41 – 7.5
Miscellaneous
Operating
temperature range °C –20 to 80 –20 to 80 –20 to 80 –20 to 80 –20 to 80 –20 to 80