PI P-62 Series Скачать руководство пользователя

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Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email [email protected], www.pi.ws

PZ234D

P-62x Positioners

User Manual

Version: 1.2.0

Date: 13.05.2020

This document describes the following products:



P-620, P-621, P-622, P-625, P-628, P-629

PIHera piezo linear stage

P-620.1CD/.1CL/.10L

P-621.1CD/.1CL/.10L/.1U

P-622.1CD/.1CL/.10L/.1U

P-625.1CD/.1CL/.10L

P-628.1CD/.1CL/.10L

P-629.1CD/.1CL/.10L



P-620, P-621, P-622, P-625, P-628, P-629

PIHera piezo XY stage

P-620.2CD/.2CL/.20L

P-621.2CD/.2CL/.20L/.2U

P-622.2CD/.2CL/.20L/.2U

P-625.2CD/.2CL/.20L

P-628.2CD/.2CL/.20L

P-629.2CD/.2CL/.20L



P-620, P-621, P-622

PIHera precision Z stage

P-620.ZCD/.ZCL/.Z0L

P-621.ZCD/.ZCL/.Z0L

P-622.ZCD/.ZCL/.Z0L

.1CD/.2CD/.ZCD

= with D-sub connector 7W2

.1U/.2U

= with D-sub connector 5W1 (f)

.1CL/.2CL/.ZCL/.10L/.20L/.Z0L

= with LEMO connector

Содержание P-62 Series

Страница 1: ...linear stage P 620 1CD 1CL 10L P 621 1CD 1CL 10L 1U P 622 1CD 1CL 10L 1U P 625 1CD 1CL 10L P 628 1CD 1CL 10L P 629 1CD 1CL 10L P 620 P 621 P 622 P 625 P 628 P 629 PIHera piezo XY stage P 620 2CD 2CL...

Страница 2: ...GmbH Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH Co KG retains all the rights The use of any tex...

Страница 3: ...3 3 4 Scope of Delivery 14 3 5 Suitable Electronics 15 3 6 Accessories 15 3 7 Technical Features 16 3 7 1 PICMA Piezo Actuators 16 3 7 2 Flexure Guides 16 3 7 3 Capacitive Sensors 17 3 7 4 ID Chip Mod...

Страница 4: ...ications 41 10 1 1 Data Table 41 10 1 2 Materials Used for Vacuum Compatible Models 45 10 1 3 Maximum Ratings 46 10 1 4 Ambient Conditions and Classifications 47 10 2 Dimensions 48 10 3 Torque for Sta...

Страница 5: ...asic knowledge of control technology drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Ty...

Страница 6: ...e operating voltage for positioners or piezo actuators Piezo amplifier Electronics without sensor evaluation for open loop operating of positioners and piezo actuators Piezo controller Electronics wit...

Страница 7: ...al Multi Channel Piezo Controller E 754 Digital Piezo Controller E754T0001 User Manual PIMikroMove SM148E Software Manual P 5xx P 6xx P 7xx Piezo Positioning Systems PZ240EK Short Instructions 1 6 Dow...

Страница 8: ......

Страница 9: ...ing is only possible under certain conditions The P 62x can only be used as intended in conjunction with suitable electronics p 15 available from PI The electronics are not included in the P 62x s sco...

Страница 10: ...eing pulled out of the electronics If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the P 62x in the case of malfunction or failure of the system...

Страница 11: ...l notes If you give the P 62x to a third party include this user manual as well as other relevant information provided by the manufacturer Do the work only if the user manual is complete Missing infor...

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Страница 13: ...sion linear nanopositioner 100 m direct position measuring capacitive sensor D sub connector P 621 1CL PIHera precision linear nanopositioner 100 m direct position measuring capacitive sensor LEMO con...

Страница 14: ...1U PIHera precision linear nanopositioner 100 m direct position measuring capacitive sensor D sub connector vacuum compatible to 10 9 hPa P 622 1U PIHera precision linear nanopositioner 250 m direct p...

Страница 15: ...m without sensors LEMO connectors P 629 2CD PIHera precision XY nanopositioner 1500 m 1500 m direct position measuring capacitive sensors D sub connector P 629 2CL PIHera precision XY nanopositioner...

Страница 16: ...EMO connectors P 622 ZCD Precise PIHera vertical nanopositioning stage 250 m direct position measuring capacitive sensor D sub connector P 622 ZCL Precise PIHera vertical nanopositioning stage 250 m d...

Страница 17: ...duct number example 123456789 Serial number example individual for each P 62x Meaning of each position from the left 1 internal information 2 and 3 year of manufacture 4 to 9 consecutive number PIHera...

Страница 18: ...4x8 ISO 7045 2 lock washers 2 flat washers All models except P 620 and P 621 2xx 2U 000036451 M2 screw set for protective earth consisting of 4 socket head screws M2x12 ISO 4762 4 lock washers 4 dowel...

Страница 19: ...ntroller D sub 25W3 3 E 727 xF digital multi channel piezo controller D sub 25W3 3 E 712 digital piezo controller modular system D sub 25W3 3 6 In some cases adapter cables p 15 are necessary for conn...

Страница 20: ...ontact our customer service department p 39 3 7 Technical Features 3 7 1 PICMA Piezo Actuators P 62x positioners are driven by PICMA piezo actuators PICMA actuators have all ceramic insulation and the...

Страница 21: ...electronics capacitive sensors achieve the best resolution stability and bandwidth 3 7 4 ID Chip Models with D sub 7W2 Connector Only An ID chip is located in the D sub connector of the P 62x When the...

Страница 22: ......

Страница 23: ...all parts are cleaned before assembly Powder free gloves are worn during assembly and measuring In addition the positioner is wipe cleaned afterwards and then shrink wrapped twice in vacuum compatibl...

Страница 24: ......

Страница 25: ...not open the P 62x Discharge the positioner s piezo actuators before installing Connect the positioner to the switched off PI electronics equipped with an internal discharge resistor Do not pull the...

Страница 26: ...g to the specifications p 41 Hold the load when tightening or loosening the screws NOTICE Protruding screw heads Protruding screw heads can damage the P 62x Ensure that the screw heads do not protrude...

Страница 27: ...orientation The P 62x is intended for mounting in horizontal orientation standing on a surface not suspended Mounting in other orientations can cause tensile stress that reduces the preload and destro...

Страница 28: ...p 21 The P 62x is not connected to the controller Tools and accessories If a screw set for fixing the positioner onto an underlying surface is not included in the scope of delivery p 14 Screws of sui...

Страница 29: ...ovided 5 3 Connecting the P 62x to the Protective Earth Conductor INFORMATION In the case of P 62x positioners with D sub connectors ground loops can occur when the positioner is grounded via its prot...

Страница 30: ...ion 0 75 mm2 Suitable screwdriver All models except P 620 and P 621 2xx 2U M4 protective earth conductor screw set p 14 for connecting the protective earth conductor When mounting a P 620 and a P 621...

Страница 31: ...rew 5 Cable lug 6 Protective earth conductor 1 If necessary attach a suitable cable lug to the protective earth conductor 2 Use the M4 screw together with the flat and lock washers to fix the cable lu...

Страница 32: ...lly conductive surface connected to a suitable protective earth conductor a If the screw set includes lock washers place a lock washer onto each screw b Insert a screw into each of the four mounting h...

Страница 33: ...r p 25 You have installed the P 890 vacuum feedthrough p 15 into your vacuum chamber Use the P 890 1CV vacuum feedthrough for operating single axis positioners Use the P 890 2CV vacuum feedthrough for...

Страница 34: ...5 Installation 30 Version 1 2 0 PZ234D P 62x Positioners Figure 11 Connection of the 2U vacuum version to the electronics with P 890 2CV vacuum feedthrough...

Страница 35: ...ective earth conductor has to be removed temporarily e g in the case of modifications reconnect the P 62x to the protective earth conductor before restarting NOTICE Destruction of the piezo actuator d...

Страница 36: ...d by a humming noise and can be caused by the following A change in the load and or dynamics requires the servo control parameters to be adjusted The P 62x is operated near to its resonant frequency I...

Страница 37: ...P 62x 6 3 Discharging the P 62x The P 62x must be discharged in the following cases Before Installation When the P 62x is not in use but the electronics remain switched on to ensure temperature stabi...

Страница 38: ......

Страница 39: ...ructed in this manual Do not open the P 62x 7 2 Cleaning the P 62x NOTICE Damage from ultrasonic cleaning Ultrasonic cleaning can damage the P 62x Do not do any ultrasonic cleaning Requirements You ha...

Страница 40: ......

Страница 41: ...s distorted Mount the P 62x onto surfaces with the following characteristics only Flatness of at least 20 m The thermal expansion properties are similar to those of the P 62x e g surfaces made of alum...

Страница 42: ...ecause for example the load was changed 1 Switch off the servo mode of the corresponding motion axes immediately 2 Check the settings of the servo control parameters on the controller 3 Adjust the ser...

Страница 43: ...on Product and serial numbers of all products in the system Firmware version of the controller if applicable Version of the driver or the software if applicable Operating system on the PC if applicabl...

Страница 44: ......

Страница 45: ...p 60 120 300 600 950 1800 m 20 0 Travel range closed loop 50 100 250 500 800 1500 m Resolution closed loop open loop 0 2 0 1 0 4 0 2 0 7 0 4 1 4 0 5 1 8 0 5 3 2 nm typ Linearity error closed loop 0 02...

Страница 46: ...rsions LEMO CD versions D sub 7W2 CL versions LEMO CD versions D sub 7W2 CL versions LEMO CD versions D sub 7W2 CL versions LEMO CD versions D sub 7W2 CL versions LEMO Recommended electronics E 503 E...

Страница 47: ...ty X Y 2 2 2 5 10 14 nm typ Pitch yaw 3 3 3 3 5 20 5 30 5 rad typ Mechanical properties Stiffness X Y 0 22 0 25 0 2 0 1 0 05 0 1 N m 20 Resonant frequency in X no load 575 420 225 135 75 60 Hz 20 Reso...

Страница 48: ...ns LEMO CD versions D sub 7W2 m CL versions LEMO CD versions D sub 7W2 m CL versions LEMO Recommended electronics E 503 E 505 E 663 E 712 E 727 x E 727 xAP E 727 xF E 503 E 505 E 663 E 712 E 727 x E 7...

Страница 49: ...A P 885 Electrical capacitance 0 7 3 6 2 F 20 Miscellaneous Operating temperature range 20 to 80 20 to 80 20 to 80 C Material Aluminum Aluminum Aluminum Dimensions 30 mm 30 mm 15 mm 40 mm 40 mm 17 5 m...

Страница 50: ...in X and Y P 622 2x x 20 to 120 V 100 Hz in X and Y 7 W in X and Y P 625 2xx 20 to 120 V 65 Hz in X and Y 9 W in X and Y P 628 2xx 20 to 120 V 35 Hz in X and Y 15 W in X and Y P 629 2xx 20 to 120 V 3...

Страница 51: ...0 1 hPa Vacuum compatible models 1100 hPa to 10 9 hPa Relative humidity Highest relative air humidity 80 for temperatures to 31 C Decreasing linearly to 50 relative air humidity at 40 C Operating tem...

Страница 52: ...24 15 12 15 18 19 24 15 P 621 1x x 40 15 30 20 14 18 24 26 26 20 P 622 1x x 50 15 40 24 20 25 30 35 35 24 P 625 1xx 60 15 50 40 27 32 44 5 46 46 40 P 628 1xx 80 17 70 58 41 45 63 66 66 58 P 629 1xx 1...

Страница 53: ...connector A B C D E F G H J K L M N P 620 2xx 30 21 5 24 24 19 1 01 1 5 M2 3 5 5 1 2 2 9 6 P 621 2x x 40 25 30 26 26 1 51 2 5 M3 5 6 25 3 2 10 5 P 622 2x x 50 25 40 35 35 1 51 2 5 M3 5 6 25 3 2 11 5...

Страница 54: ...P 62x ZCD ZCL Z0L The P 620 does not have a separate protective earth connector A B C D E F G H J K L M N P 620 Zxx 30 15 24 19 24 1 01 2 M2 28 5 2 2 4 5 6 P 621 Zxx 40 17 5 30 26 26 1 51 2 5 M3 36 5...

Страница 55: ...y attention to the screw in depth required for the respective material according to the VDI directive 2230 10 4 Maximum Torque on the Platform The following torque may not be exceeded when mounting a...

Страница 56: ...16 D sub connector Example top view Pin Signal Function A1 PZT Piezo voltage A2 Probe Probe sensor signal immovable part of the capacitive sensor 1 Data ID chip Data line for ID chip 2 GND Target and...

Страница 57: ...gnal shield 1 Target Target sensor signal movable part of the capacitive sensor 2 PZT Piezo voltage 3 GND Target Target sensor signal shield 4 PZT Piezo voltage LEMO coaxial connectors Figure 18 LEMO...

Страница 58: ......

Страница 59: ...ional national and local rules and regulations In order to fulfil its responsibility as the product manufacturer Physik Instrumente PI GmbH Co KG undertakes environmentally correct disposal of all old...

Страница 60: ......

Страница 61: ...nformity has been issued in accordance with the following European directives Low Voltage Directive EMC Directive RoHS Directive The applied standards certifying the conformity are listed below Safety...

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