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Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany 
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws 

 

MP148E 

N­565 NEXACT® Linear Stage 

User Manual 

Version: 1.4.0 

 

 

 

 

Date: 10.06.2020 

This document describes the following products: 

 

N­565.160

 

Precision linear stage, 13 mm travel range, 

PIOne linear encoder, 0.5 nm resolution, 10 N 

drive force, dimensions 65 × 80 × 20 mm (W × L 

× H), NEXACT® piezoelectric walking drive 

 

N­565.260

 

Precision linear stage, 26 mm travel range, 

PIOne linear encoder, 0.5 nm resolution, 10 N 

drive force, dimensions 65 × 110 × 20 mm (W × 

L × H), NEXACT® piezoelectric walking drive 

 

N­565.360

 

Precision linear stage, 52 mm travel range, 

PIOne linear encoder, 0.5 nm resolution, 10 N 

drive force, dimensions 65 × 160 × 20 mm (W × 

L × H), NEXACT® piezoelectric walking drive 

Содержание NEXACT Stage N-565 Series

Страница 1: ...ear stage 13 mm travel range PIOne linear encoder 0 5 nm resolution 10 N drive force dimensions 65 80 20 mm W L H NEXACT piezoelectric walking drive N 565 260 Precision linear stage 26 mm travel range...

Страница 2: ...is manual are protected by copyright With regard thereto Physik Instrumente PI GmbH Co KG retains all the rights The use of any text images and drawings is permitted only in part and only when indicat...

Страница 3: ...3 2 Product View 8 3 2 1 Product Details 8 3 2 2 Product Labeling 8 3 3 Scope of Delivery 9 3 4 Suitable Controllers 9 3 5 Technical Features 10 3 5 1 Linear Encoder Sensor 10 3 5 2 Reference Switch 1...

Страница 4: ...sible Causes and Correction 30 9 Customer Service 31 10 Technical Data 33 10 1 Specifications 33 10 1 1 Data Table 33 10 1 2 Ambient Conditions and Classifications 34 10 2 Maximum Ratings 35 10 3 Dime...

Страница 5: ...rstanding of basic servo systems as well as motion control concepts and applicable safety procedures The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols a...

Страница 6: ...in the center of the motion platform Linear encoder The linear encoder is an incremental sensor for detecting changes in position Signals from the sensor are used for axis position feedback After swi...

Страница 7: ...artment p 31 Downloading manuals 1 Open the website www pi ws 2 Search the website for the product number e g N 565 or the product family e g NEXACT 3 Click the corresponding product to open the produ...

Страница 8: ......

Страница 9: ...eramic rail PiezoWalk principle The N 565 is equipped with a linear encoder for direct position measuring It is only possible to use the N 565 as intended when it is installed and only in conjunction...

Страница 10: ...nical notes If you give the N 565 to a third party include this user manual as well as other relevant information provided by the manufacturer Do the work only if the user manual is complete Missing i...

Страница 11: ...mm travel range PIOne linear encoder 0 5 nm resolution 10 N drive force dimensions 65 80 20 mm W L H NEXACT piezoelectric walking drive N 565 260 Precision linear stage 26 mm travel range PIOne linea...

Страница 12: ...duct Labeling Labeling Description N 565 N 565 x60 Product name Characters following the period identify the model exactly 123456789 Serial number example individual for each N 565 Meaning of each pos...

Страница 13: ...laser p 29 here bottom of sensor socket 3 3 Scope of Delivery Product number Description N 565 Positioner according to order p 7 5860500028 Screw set for mounting of the N 565 4 socket head screws M3...

Страница 14: ...fore errors occurring in the drivetrain such as nonlinearity backlash or elastic deformation cannot influence the measurement of the position 3 5 2 Reference Switch The positioner is equipped with a d...

Страница 15: ...ct our customer service department p 31 immediately 4 Keep all packaging materials in case the product needs to be returned Remove the protective foil The top and bottom surfaces of the N 565 are scra...

Страница 16: ......

Страница 17: ...xternal forces can damage the drive Changes in position caused by external forces acting on the positioner can also damage the load or the surroundings Make sure that forces acting the platform in the...

Страница 18: ...delivery condition If necessary before installing and removing Start the positioner p 23 and do a reference move to the reference switch refer to the user manual for the controller NOTICE Malfunction...

Страница 19: ...is 10 m For applications with large temperature changes Mount the N 565 only onto surfaces that have the same or similar thermal expansion properties as the N 565 NOTICE Damage due to unsuitable cable...

Страница 20: ...565 top view M4 holes with core hole diameter 3 4 mm and counterbore for mounting from above with M3 screws Mounting from above with M3x12 screws For example this mounting is used when building an XY...

Страница 21: ...2 screws Four M3 holes with a depth of at least 5 mm are provided For mounting from below with M4 screws Four through holes are provided for M4 screws The thickness of the underlying surface and the d...

Страница 22: ...e that screw heads do not protrude from the countersunk holes 5 Check that the N 565 is fixed firmly to the underlying surface 5 3 Building an XY System Two N 565 positioners can be combined to an XY...

Страница 23: ...ers 1 Upper positioner platform in reference position with a b c d mounting holes 3 4 mm with counterbore for M3 socket head screws 2 Lower positioner with a b c d M3 mounting holes in the platform Ho...

Страница 24: ...6 Only use screws of the correct length for the respective mounting holes Requirements You have read and understood the general notes on installation p 13 You have fixed the positioner properly p 15 Y...

Страница 25: ...th Refer to Dimensions p 36 for the exact position 1 Align the load so that the selected mounting holes in the platform can be used to fix it 2 Use the screws to fix the load to the selected mounting...

Страница 26: ...ed in the scope of delivery p 9 Screwdriver for slotted screws SL Connecting the N 565 to the E 861 1A1 controller 1 Connect the positioner s drive connector to the corresponding controller socket ref...

Страница 27: ...n be caught by moving parts Stop the motion immediately if a controller malfunction occurs If possible adapt the travel range limits of your mechanical system in the software that you use for commandi...

Страница 28: ...refer to the user manual for the controller INFORMATION The positive direction of motion is in the opposite direction of the cable exit INFORMATION The repeatability of the positioning is only ensured...

Страница 29: ...e INFORMATION The N 565 is driven by NEXACT piezo actuators Temperature changes and compressive stress can induce charges in piezo actuators After disconnecting from the electronics piezo actuators ca...

Страница 30: ......

Страница 31: ...2 Cleaning the N 565 NOTICE Damage from ultrasonic cleaning Ultrasonic cleaning can damage the N 565 Do not do any ultrasonic cleaning Requirements You have discharged the piezo actuators of the N 565...

Страница 32: ......

Страница 33: ...r of the N 565 uses a class 2 laser according to DIN EN60825 1 2007 Technical data of the laser Lmax 1 mW 655 nm The laser is fully shielded before dispatch and when the N 565 is used as intended Radi...

Страница 34: ...parameters Target position is not kept stable Uncontrolled oscillation of the N 565 Reduced holding force and feed force Ceramic rail of the NEXACT drive is dirty Contact our customer service departm...

Страница 35: ...mation Product and serial numbers of all products in the system Firmware version of the controller if applicable Version of the driver or the software if applicable Operating system on the PC if appli...

Страница 36: ......

Страница 37: ...ve axes X X X Travel range 13 26 52 mm Velocity closed loop 10 10 10 mm s Max Unidirectional repeatability 50 50 50 nm 100 Pitch 50 100 200 rad 80 Yaw 50 50 50 rad 60 Mechanical properties N 565 160 N...

Страница 38: ...f Recommended electronics E 861 1A1 The N 565 positioner series replaces the LPS 65 series 10 1 2 Ambient Conditions and Classifications Pay attention to the following ambient conditions and classific...

Страница 39: ...NEXACT Linear Stage MP148E Version 1 4 0 35 10 2 Maximum Ratings The positioner is designed for the following operating data Maximum operating voltage Maximum operating frequency Maximum power consum...

Страница 40: ...ear Stage 10 3 Dimensions Dimensions in mm Characters used to separate decimal points Depth and diameter of holes Period All other dimensions Comma Figure 10 Dimensions of the N 565 Models a b c N 565...

Страница 41: ...m for the drive connector side Pin Function Direction 1 Piezo 1 Input 2 Piezo 3 Input 3 4 5 6 Piezo 0 Input 7 Piezo 2 Input 8 AMP Amplifier enable Output 9 10 11 Piezo GND AGND 12 Piezo GND AGND 13 14...

Страница 42: ...sensor and the reference switch Figure 12 D sub 15 socket f for sensor connector side Pin Signal Function Direction 1 VDD Supply voltage 5V Input 2 GND GND GND 3 COS Encoder signal 1 cosine Output 4 C...

Страница 43: ...3 D sub 15 m connector for sensor connector side HD D sub 15 f socket See the following table Figure 14 HD D sub 15 socket f for sensor connector side Pin Signal Function Direction 1 REF Reference swi...

Страница 44: ......

Страница 45: ...rnational national and local rules and regulations In order to fulfil its responsibility as the product manufacturer Physik Instrumente PI GmbH Co KG undertakes environmentally correct disposal of all...

Страница 46: ......

Страница 47: ...65 an EU Declaration of Conformity has been issued in accordance with the following European directives EMC Directive RoHS Directive The applied standards certifying the conformity are listed below EM...

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