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About this Document
1
1.1
Goal and Target Audience of this Manual ............................................................ 1
1.2
Symbols and Typographic Conventions ............................................................... 1
1.3
Other Applicable Documents ................................................................................ 2
2
Safety
3
2.1
Intended Use ........................................................................................................ 3
2.2
General Safety Instructions .................................................................................. 3
2.2.1
Organizational Measures .................................................................... 4
2.2.2
Measures for Handling Vacuum-Compatible Products ...................... 4
2.2.3
Safety Measures during Installation ................................................... 4
2.2.4
Safety Measures during Start-Up ....................................................... 5
2.2.5
Safety Measures during Operation ..................................................... 6
2.2.6
Safety Measures during Maintenance ................................................ 6
3
Product Description
7
3.1
System Overview .................................................................................................. 8
3.2
Features and Applications .................................................................................... 9
3.3
Model Overview .................................................................................................... 9
3.4
Product View.......................................................................................................11
3.5
Scope of Delivery ...............................................................................................12
3.6
Suitable Controllers ............................................................................................12
3.7
Accessories ........................................................................................................12
3.8
Technical Features .............................................................................................12
3.8.1
Rotary Encoder .................................................................................12
3.8.2
Limit Switches ...................................................................................12
3.8.3
Reference Point Switch ....................................................................13
Contents