PI M-126, Руководство пользователя

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10 Technical Data
M-126 Precision Microtranslation Stage MP42E Version: 3.0.0 33
10.1 Specifications
10.1.1 Data Table
M-126.CG1 M-126.DG1 M-126.PD1 M-126.PD2 M-126.2S1 M-126.M0 Unit
Active axes X X X X X X
Motion and
positioning
M-126.CG1 M-126.DG1 M-126.PD1 M-126.PD2 M-126.2S1 M-126.M0 Unit
Travel range 25 25 25 20 25 25 mm
Integrated sensor Rotary
encoder
Rotary
encoder
Rotary
encoder
Rotary
encoder
– –
Sensor resolution 2048 2000 4000 4000 – – Cts./rev
.
Design resolution 0.0035 0.0085 0.125 0.25 1.25 – µm
Minimum incre-
mental motion
0.1 0.1 0.25 0.5 0.1 1 µm
Unidirectional
repeatability
0.2 0.1 0.1 0.3 0.1 – µm
Bidirectional
repeatability
2 1 1 1 1 – µm
Accuracy 2.5 2.5 2.5 2.5 2.5 – µm
Pitch / yaw ±50 ±50 ±50 ±50 ±50 ±50 µrad
Straightness /
flatness
2 2 2 2 2 2 µm
Max. velocity 0.7 1.5 15* 50 6 – mm/s
Reference switch
repeatability
1 1 1 1 1 – µm
Mechanical
properties
M-126.CG1 M-126.DG1 M-126.PD1 M-126.PD2 M-126.2S1 M-126.M0 Unit
Drive screw Leadscrew Leadscrew Leadscrew Ball screw Leadscrew Leadscrew
Drive screw pitch 0.5 0.5 0.5 1 0.5 0.5 mm
10 Technical Data