
The following company names and brands are registered trademarks of
Physik Instrumente (PI) GmbH & Co. KG:
PI®, PIC®, NanoCube®, PICMA®, PIFOC, PILine®, NEXLINE®, PiezoWalk®, PicoCube®, PiezoMove, PIMikroMove,
NEXACT®, Picoactuator®, PInano®, NEXSHIFT®, PITOUCH®, PIMag®, PIHera, Q-Motion®
The patents held by PI can be found in our list at https://www.physikinstrumente.com/en/about-pi/patents.
© 2020 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs, and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG reserves
all rights. The use of any text, images and drawings is permitted only in part and only when indicating the
source.
Original instructions
First printing: 2020-06-19
Document number: MP164E, MMa, ASt, Version 1.2.0
Subject to change. This manual is superseded by any new release. The latest release is available for download
from our website (p.
Fehler! Textmarke nicht definiert.
).
Содержание L-402 Series
Страница 14: ......
Страница 30: ......
Страница 35: ...10 Technical Data L 402 Mniature Stage MP164E Version 1 2 0 31 10 2 2 L 402 10SD...
Страница 36: ...10 Technical Data 32 Version 1 2 0 MP164E L 402 Mniature Stage 10 2 3 Hole Pattern of the Motion Platform...
Страница 40: ......
Страница 42: ......