PI A-62 Series, Руководство пользователя

Страница: 24 / 32

User Manual
A620D0001 Rev 1.2
30-July-2019
Page 24 of 32
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: air@pi-usa.us
10. Technical Data
See the PI website for latest published specifications.
10.1. Sizes and Load Capacities
Model
Table
Diameter
(mm)
Journal
Length
(mm)
Load Capacity
(N [lb
f
])
Tilt Load
Capacity
(N-m [lb
f
-in])
Stiffness
(N/µm [lb
f
/µin])
Axial Radial Axial Radial
A-621.025 50 25 134 [30] 57 [13] 0.57 [5] 26 [0.15] 8 [0.05]
A-623.025 100 25 536 [121] 115 [26] 1.7 [15] 96 [0.55] 18 [0.10]
A-623.050 100 50 536 [121] 229 [51] 4.52 [40] 96 [0.55] 35 [0.20]
A-624.050 150 50 1206 [271] 344 [77] 22.6 [200] 210 [1.2] 64 [0.37]
A-625.065 200 65 2144 [482] 577 [129] 39.6 [350] 385 [2.2] 110 [0.63]
A-627.075 300 75 4244 [954] 1203 [269] 141.3 [1250] 788 [4.5] 204 [1.17]
Values listed assume supply pressure of 80 psi. Please contact PI if alternate pressures are required.
10.2. Performance Specifications
Specification Units A-621.025 A-623.025 A-623.050 A-624.050 A-625.065 A-627.075
Drive System - Frameless, brushless, slotless, direct-drive torque motor
Feedback System - Non-contact optical rotary encoder
Travel - Unlimited, 360° continuous
Positioning Accuracy
(1)
µrad < +/- 8
Repeatability, Bi-directional µrad < +/- 4
Radial Error Motion
(2)
nm < 300 < 175 < 100 < 100 < 75
Axial Error Motion
(2)
nm < 100 < 75 < 50 < 50 < 40
Tilt Error Motion
(2)
µrad < 5 < 3 < 2 < 2 < 1
Max Velocity
(3)
RPM 2500 1200 600 500 500
Rotating Moment of Inertia kg-mm
2
125 1,485 1,530 8,790 32,350 210,850
Rotating Mass kg 0.4 1.2 1.4 3.2 6.9 21.5
Total Stage Mass kg 1.2 3.1 4.5 8.6 14 50
Operating Pressure
(4)
- 550 +/-35 kPa (80 +/-5 psi)
Air Consumption - < 57 liters/minute (2.0 SCFM)
Air Quality -
Clean (filtered to 1.0 µm or better) - ISO 8573-1 Class 1
Oil-free - ISO 8573-1 Class 1
Dry (-15 °C dew point) - ISO 8573-1 Class 3
Construction
(5)
- Hardcoat Aluminum, SS Fasteners
Notes:
1. Values shown are obtained using controller-based error compensation. Stage must be purchased with a PI controller to achieve this
performance. Accuracy values assume short-term time duration and do not consider the long-term effects of thermal drift on the stage.
2. Precision specifications are dependent on quality of mounting surfaces, payload, orientation, and external forces on the stage. Please
consult PI for application-specific parameters. Values shown are static (zero rotational velocity during measurement) with no payload.
3. Velocity may be further limited by encoder options, payload imbalance, or controller and drive electronics.
4. To protect stage from damage, an under-pressure air sensor tied to the controller E-stop input is recommended.
5. Alternate custom tabletop materials, such as stainless steel, are available. Please contact PI for a quote.