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12

3.8. Installing The Cover Plate For 

The TC 750

The turbomolecular pump with integrated Electronic Drive
Unit TC 750 has an IP 30 protection class rating.

When the turbopump is water cooled the enclosed cover
plate for the TC 750 m

mu

usstt be installed by an electrical specia-

list, in order to attain protection class IP 54

Before installing the cover plate, the Electronic

Drive Unit TC 750 must be disconnected from
the power supply. The speed of the turbomole-
cular pump must be 0 Hz.

Before beginning with any installation work

involving the cover plate for the Electronic
Drive Unit TC 750, the remote plug 8d (see
Section 3.6.) must be removed.
When using the remote plug, the cover of the
remote plug must be unscrewed from the
remote plug.

First the cable clamp must be removed from the TC 750.

Thereafter unscrew the 3 cylinder head screws with slot
(M3) from the TC 750.

Stick on the enclosed sealing to the bottom section 107a.

Bolt the bottom section 107a to the TC 750 with the
hexagon socket screws 107b (3 pieces). The sealing 
surface must rest against the TC 750.

Insert the O-ring 107c into the bottom section.

PLEASE NOTE

WARNING

TC 750

8

Dichtung/ 
Sealing

107a

107b

107c

First pull the corresponding cables through the inserts with
screwed cable glands and the cover 107d and insert the
cables at the TC 750.
In case the pump is operated using the remote control, the
remote control unit must be connected in accordance with
Section 3.11 and the wiring diagram (Section 3.13).

Installing the bottom section

8

Electronic Drive Unit TC 750

107a

Bottom section

107b

Hexagon socket screw (3 pieces)

107c

O-ring

The cable arrangement is as follows:

– Accessories (venting valve, backing pump) in PG 16 with

flat cable (single or dual)

– Interface cable RS 485 in PG 16; for cable dia. 6
– Connecting cable for remote control etc. in insert E 153/8

or E 153/11.

Thereafter screw the cover 107d to the bottom section
107a with the screws 107e (6 pieces).
Particularly ensure that the O-ring 107c is properly seated!

PG 16; for
cable Ø6

Blank 
disc

Screw 
fitting

PG 16 for
flat cable, single

PG 16 for 
flat cable, dual

(scope of delivery
2 pieces)

Insert

 

(scope of delivery 
1 piece E 153/8
1 piece E 153/11)

Inserts and Screw fittings

Firmly tighten the screwed cable glands at the cover 107d.

If a cable feedthrough remains unoccupied, a

blank disc must be inserted instead of the
cable.

After installing the cover plate, the requirements of protection
class IP 54 are fulfilled. The turbomolecular pump may then
be operated once more.

PLEASE NOTE

TC 750

8

107a

107d

107e

107c

Installing the cover

8

Electronic Drive Unit TC 750

107a

Bottom section

107c

O-ring

107d

Cover

107e

Screw (6 pieces)

Содержание TPH 1201 P

Страница 1: ...Turbomolecular Pump With Electronic Drive Unit TC 750 PT 0147 BE G 0703 TPH 1201 P PC TPU 1201 P PC Betriebsanleitung Operating Instructions...

Страница 2: ...erations 18 Operation with cooling water temperature 25 C 19 4 5 Circulatory Lubrication 20 4 6 Switching OFF And Venting 20 4 7 Shutting Down For Longer Periods 20 4 8 Operations With The DCU 001 DCU...

Страница 3: ...the turbopump Take care to avoid burns Keep leads and cables well away from hot surfaces 70 C Operate the turbopump with TC 750 only in conjunction with the relevant power supply accessory Without th...

Страница 4: ...y II Connection voltage 140 VDC 5 Proper Use The Turbomolecular Pumps may only be used for the purpose of generating vacuum The Turbomolecular Pumps TPH TPU 1201 P C please see the type plate are desi...

Страница 5: ...been agreed by the manufacturer The connection to power supplies with earthing of a direct voltage pole The turbomolecular pumps and flange connections must not be used to tread on when climbing onto...

Страница 6: ...ccidental contact Floor mounting of the turbomolecular pump is admissible after consulting the manufacturer The person responsible for commissioning must ensure that the installation is carried out in...

Страница 7: ...he component parts in your set of mounting material Use 1 18 8 bracket screws Tighten the clamps crosswise in three steps Tightening torque 5 Nm 15 Nm 25 2 Nm See that the sealing surface is not damag...

Страница 8: ...your set of mounting material Use 1 12 2 screws and 2 24 4 nuts For a flange material having a strength of 170 N mm2 and a stud screw with clearance hole the nuts must be tightened crosswise in three...

Страница 9: ...Pfeiffer Vacuum range Connecting the backing pump All connections of the fore vacuum line With the usual small flange components or screwed hoses Be sure to conduct away the exhaust gases from the bac...

Страница 10: ...nnection to a torque of 10 Nm Tighten all hose clips and check for firm seating of the hoses Cooling with the Recycled Water Cooling Unit TZK Accessory Connection Dirt traps are not permissible in the...

Страница 11: ...TC 750 should be disconnected and then proceed in accordance with the relevant Operating Instructions 1 only with cable PM 051 843 T please see Section 11 CAUTION PLEASENOTE 3 7 Installing The Power S...

Страница 12: ...serts with screwed cable glands and the cover 107d and insert the cables at the TC 750 In case the pump is operated using the remote control the remote control unit must be connected in accordance wit...

Страница 13: ...agonal SW 14 Electrical connection Plug control lead 42a into the connection VENT of the TC 750 8 on the turbopump Release for venting is executed via remote plug pin 2 pre set on delivery please see...

Страница 14: ...be processed 6 standby off standby on pump is accelerated to 66 of its nominal rotation speed 7 rotation speed setting mode off the rotation speed can be changed by feeding a PWM signal to this pin o...

Страница 15: ...the TC 750 is 960 Only safety low voltages SELV may be connected to Serial Interface RS 485 All switched on remote functions have priority over the serial interface functions Please refer to the separ...

Страница 16: ...Mains input heating 115 208 230 VAC HEATING L N PE PE N L REMOTE 1 2 3 4 5 6 24 VDC max 50 mA Venting release Motor TMP Pumping station Heating Reset opt sealing gas Standby PWM on touch relation 25 7...

Страница 17: ...lay And Operating Unit DCU HPU Turbopump rotors rotate at high speed When the high vacuum flange is open there is a danger of injury and of damage to the pump caused by objects falling into the pump T...

Страница 18: ...a the DCU or HPU please refer to the respective operating Instructions Pumping gases with molecular mass 40 with the incorrect gas mode can cause damage to the pump When pumping noble gases heavier th...

Страница 19: ...to high for the current power the rotor can overheat and being damaged that way A cooling water temperature 25 C has no influen ce the pump acts as with a cooling water temperature of 25 C To reduce p...

Страница 20: ...ble First stage venting with a pressure increase rate of 15 mbar s for 20 seconds Second stage venting with an optionally large venting valve The valve cross section for a venting rate of 15 mbar s mu...

Страница 21: ...ed setting operations for the turbopump Switching Outputs Switching outputs 1 and 2 can be loaded with a maximum 24 V 50 mA per output The following functions are assigned to the switching outputs S S...

Страница 22: ...ts in the turbomolecular pump being switched off LED on the TC 750 glows red Collective malfunction L LE ED D C Ca au us se e g gr re ee en n r re ed d glows Power supply OK Function pumping station O...

Страница 23: ...CU HPU or PC Thermal overloading caused by Insufficient water flow Ensure free flow Insufficient air supply Ensure adequate air supply Fore vacuum pressure too high Reduce fore vacuum pressure Ambient...

Страница 24: ...FR 49 Part 173 240 Definition and Preparation We will carry out the decontamination and invoice this work to you if you have not attached this note This also applies where the operator does not have t...

Страница 25: ...tle the turbopump to change the lubricant this may only be carried out in the position shown in Section 3 2 otherwise the lubricant could contaminate the turbopump It is possible to detach the lubrica...

Страница 26: ...Section 11 1 Install the lubricant pump back onto the turbomolecular pump again 8 4 Replacing The Electronic Drive Unit TC 750 Turbopump and Electronic Drive Unit TC 750 must only be disconnected fro...

Страница 27: ...ow rate for Nitrogen N2 l s 1250 1250 1170 1170 Helium He l s 1300 1300 1230 1230 Hydrogen H2 l s 1100 1100 1050 1050 Argon Ar l s 1200 1200 1100 1100 CF4 l s 950 950 890 890 Compression ratio N2 1 10...

Страница 28: ...sions Diagram 240 200 142 9 40 70 314 242 5 191 123 122 334 5 25 M16x32 tief 4 0 3 0 1 2 0 96 4 5 73 264 69 95 140 4 161 128 17 30 30 30 99 170 0 1 M6 DN 200 ISO K DN 40 ISO KF M6 G1 8 TPH 1201 P P C...

Страница 29: ...29 200 142 9 40 70 122 25 M16x32 4 0 3 0 1 2 0 96 4 5 73 69 95 140 161 128 17 30 30 30 99 264 341 5 130 197 91 249 5 321 170 0 1 285 M6 DN 40 ISO KF DN 200 ISO F M6 G1 8 TPH 1201 P P C DN 200 ISO F...

Страница 30: ...30 200 142 9 40 70 122 25 M16x32tief 4 0 3 0 1 2 0 96 4 5 73 69 95 140 161 99 253 264 142 210 262 333 354 128 30 30 30 17 170 0 1 M6 DN 200 CF F DN 40 ISO KF M6 G1 8 TPU 1201 P P C DN 200 CF F...

Страница 31: ...rive Unit TC 750 1 PM C01 713 8d Remote plug 1 P 0920 668 E 17 Seal ring for water connections 2 P 3529 133 A 71 Lubricant filler screw 1 N 3191 382 X see Section 4 72 Lubricant drain screw 1 N 3191 3...

Страница 32: ...321 Other accessories Connecting cable TC 750 TPS DCU PM 051 103 T 3 m other lengths on request Connecting cable TC 750 TPS DCU shielded PM 051 143 GT 3 m other lengths on request Power Supply TPS 60...

Страница 33: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Страница 34: ...specified below is intended for installation in a machine which is forbidden to be put into operation until such time as it has been determined that the end product is in accordance with the provisio...

Страница 35: ...0 64 41 8 02 2 02 info pfeiffer vacuum de www pfeiffer vacuum net Vacuum is nothing but everything to us Turbopumps Rotary vane pumps Roots pumps Dry compressing pumps Leak detectors Valves Component...

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