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3.10. Connecting The Sealing Gas Valve

For protection pruposes the turbopumpe should be operated
with sealing gas, particularly where corrosive and dusty 
processes are involved. 
Even in non-corrosive processes, from 50% of the maximum
gas load sealing gas should be used to ensure rotor cooling.

Connection is made via the sealing gas valve 66 (please see
Section 11. Accessories).

3.9. Connecting The Venting Valve

The venting valve (see Section 11. Accessories) provides
automatic venting in the event of a power failure and
switching off.

Fitting the venting valve

Unscrew the venting screw 4 (see Section 2.1.) from the
venting connection of the turbopump.

Screw in venting valve 42 with seal (USIT ring) on 
hexagonal SW 14.

Electrical connection

Plug control lead 42a into the connection ”VENT“ of the 
TC 750 (8) on the turbopump.

Release for venting is executed via remote plug pin 2 (pre-set
on delivery, please see Section 4.9.)
The venting mode of the venting valve is selected via the
DCU/HPU or Serial Interface RS 485.

The maximum pressure at the venting valve is 

1.5 bar absolute.

Please refer to Operating Instructions PM 0507 BN for details
on Venting Valve TVF 005.

CAUTION

66

66a

15

9

Connecting the sealing gas valve

9

Locking screw sealing gas connection

15 Seal
66 Sealing gas valve
66a Seal

Please refer to Operating Instructions PM 0229 BN for details
on installing the sealing gas valve and adjusting the sealing
gas flow.

VENT

8d

8

42a

42a

42

42b

TC 750

TC 750

Connecting the venting valve

8

Electronic Drive Unit TC 750

8d Remote plug
42 Venting valve
42a Connector plug venting valve/TC 750
42b Plug

Содержание TPH 1201 P

Страница 1: ...Turbomolecular Pump With Electronic Drive Unit TC 750 PT 0147 BE G 0703 TPH 1201 P PC TPU 1201 P PC Betriebsanleitung Operating Instructions...

Страница 2: ...erations 18 Operation with cooling water temperature 25 C 19 4 5 Circulatory Lubrication 20 4 6 Switching OFF And Venting 20 4 7 Shutting Down For Longer Periods 20 4 8 Operations With The DCU 001 DCU...

Страница 3: ...the turbopump Take care to avoid burns Keep leads and cables well away from hot surfaces 70 C Operate the turbopump with TC 750 only in conjunction with the relevant power supply accessory Without th...

Страница 4: ...y II Connection voltage 140 VDC 5 Proper Use The Turbomolecular Pumps may only be used for the purpose of generating vacuum The Turbomolecular Pumps TPH TPU 1201 P C please see the type plate are desi...

Страница 5: ...been agreed by the manufacturer The connection to power supplies with earthing of a direct voltage pole The turbomolecular pumps and flange connections must not be used to tread on when climbing onto...

Страница 6: ...ccidental contact Floor mounting of the turbomolecular pump is admissible after consulting the manufacturer The person responsible for commissioning must ensure that the installation is carried out in...

Страница 7: ...he component parts in your set of mounting material Use 1 18 8 bracket screws Tighten the clamps crosswise in three steps Tightening torque 5 Nm 15 Nm 25 2 Nm See that the sealing surface is not damag...

Страница 8: ...your set of mounting material Use 1 12 2 screws and 2 24 4 nuts For a flange material having a strength of 170 N mm2 and a stud screw with clearance hole the nuts must be tightened crosswise in three...

Страница 9: ...Pfeiffer Vacuum range Connecting the backing pump All connections of the fore vacuum line With the usual small flange components or screwed hoses Be sure to conduct away the exhaust gases from the bac...

Страница 10: ...nnection to a torque of 10 Nm Tighten all hose clips and check for firm seating of the hoses Cooling with the Recycled Water Cooling Unit TZK Accessory Connection Dirt traps are not permissible in the...

Страница 11: ...TC 750 should be disconnected and then proceed in accordance with the relevant Operating Instructions 1 only with cable PM 051 843 T please see Section 11 CAUTION PLEASENOTE 3 7 Installing The Power S...

Страница 12: ...serts with screwed cable glands and the cover 107d and insert the cables at the TC 750 In case the pump is operated using the remote control the remote control unit must be connected in accordance wit...

Страница 13: ...agonal SW 14 Electrical connection Plug control lead 42a into the connection VENT of the TC 750 8 on the turbopump Release for venting is executed via remote plug pin 2 pre set on delivery please see...

Страница 14: ...be processed 6 standby off standby on pump is accelerated to 66 of its nominal rotation speed 7 rotation speed setting mode off the rotation speed can be changed by feeding a PWM signal to this pin o...

Страница 15: ...the TC 750 is 960 Only safety low voltages SELV may be connected to Serial Interface RS 485 All switched on remote functions have priority over the serial interface functions Please refer to the separ...

Страница 16: ...Mains input heating 115 208 230 VAC HEATING L N PE PE N L REMOTE 1 2 3 4 5 6 24 VDC max 50 mA Venting release Motor TMP Pumping station Heating Reset opt sealing gas Standby PWM on touch relation 25 7...

Страница 17: ...lay And Operating Unit DCU HPU Turbopump rotors rotate at high speed When the high vacuum flange is open there is a danger of injury and of damage to the pump caused by objects falling into the pump T...

Страница 18: ...a the DCU or HPU please refer to the respective operating Instructions Pumping gases with molecular mass 40 with the incorrect gas mode can cause damage to the pump When pumping noble gases heavier th...

Страница 19: ...to high for the current power the rotor can overheat and being damaged that way A cooling water temperature 25 C has no influen ce the pump acts as with a cooling water temperature of 25 C To reduce p...

Страница 20: ...ble First stage venting with a pressure increase rate of 15 mbar s for 20 seconds Second stage venting with an optionally large venting valve The valve cross section for a venting rate of 15 mbar s mu...

Страница 21: ...ed setting operations for the turbopump Switching Outputs Switching outputs 1 and 2 can be loaded with a maximum 24 V 50 mA per output The following functions are assigned to the switching outputs S S...

Страница 22: ...ts in the turbomolecular pump being switched off LED on the TC 750 glows red Collective malfunction L LE ED D C Ca au us se e g gr re ee en n r re ed d glows Power supply OK Function pumping station O...

Страница 23: ...CU HPU or PC Thermal overloading caused by Insufficient water flow Ensure free flow Insufficient air supply Ensure adequate air supply Fore vacuum pressure too high Reduce fore vacuum pressure Ambient...

Страница 24: ...FR 49 Part 173 240 Definition and Preparation We will carry out the decontamination and invoice this work to you if you have not attached this note This also applies where the operator does not have t...

Страница 25: ...tle the turbopump to change the lubricant this may only be carried out in the position shown in Section 3 2 otherwise the lubricant could contaminate the turbopump It is possible to detach the lubrica...

Страница 26: ...Section 11 1 Install the lubricant pump back onto the turbomolecular pump again 8 4 Replacing The Electronic Drive Unit TC 750 Turbopump and Electronic Drive Unit TC 750 must only be disconnected fro...

Страница 27: ...ow rate for Nitrogen N2 l s 1250 1250 1170 1170 Helium He l s 1300 1300 1230 1230 Hydrogen H2 l s 1100 1100 1050 1050 Argon Ar l s 1200 1200 1100 1100 CF4 l s 950 950 890 890 Compression ratio N2 1 10...

Страница 28: ...sions Diagram 240 200 142 9 40 70 314 242 5 191 123 122 334 5 25 M16x32 tief 4 0 3 0 1 2 0 96 4 5 73 264 69 95 140 4 161 128 17 30 30 30 99 170 0 1 M6 DN 200 ISO K DN 40 ISO KF M6 G1 8 TPH 1201 P P C...

Страница 29: ...29 200 142 9 40 70 122 25 M16x32 4 0 3 0 1 2 0 96 4 5 73 69 95 140 161 128 17 30 30 30 99 264 341 5 130 197 91 249 5 321 170 0 1 285 M6 DN 40 ISO KF DN 200 ISO F M6 G1 8 TPH 1201 P P C DN 200 ISO F...

Страница 30: ...30 200 142 9 40 70 122 25 M16x32tief 4 0 3 0 1 2 0 96 4 5 73 69 95 140 161 99 253 264 142 210 262 333 354 128 30 30 30 17 170 0 1 M6 DN 200 CF F DN 40 ISO KF M6 G1 8 TPU 1201 P P C DN 200 CF F...

Страница 31: ...rive Unit TC 750 1 PM C01 713 8d Remote plug 1 P 0920 668 E 17 Seal ring for water connections 2 P 3529 133 A 71 Lubricant filler screw 1 N 3191 382 X see Section 4 72 Lubricant drain screw 1 N 3191 3...

Страница 32: ...321 Other accessories Connecting cable TC 750 TPS DCU PM 051 103 T 3 m other lengths on request Connecting cable TC 750 TPS DCU shielded PM 051 143 GT 3 m other lengths on request Power Supply TPS 60...

Страница 33: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Страница 34: ...specified below is intended for installation in a machine which is forbidden to be put into operation until such time as it has been determined that the end product is in accordance with the provisio...

Страница 35: ...0 64 41 8 02 2 02 info pfeiffer vacuum de www pfeiffer vacuum net Vacuum is nothing but everything to us Turbopumps Rotary vane pumps Roots pumps Dry compressing pumps Leak detectors Valves Component...

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