9
Permissible installation orientation for the turbopump in
standard version
11 Vacuum chamber
The maximum loading capacity of the high vacu-
um flange is 200 N (equivalent to 20 kg).
Assymetric loading on the high vacuum flange
must be avoided.
Horizontal installation
With horizontal pump installation and oil-sealed backing
pumps (e.g. rotary vane pumps) the fore-vacuum flange of the
turbopump must be aligned vertically downwards (maximum
deviation ±20°), otherwise the turbopump could become dirty.
CAUTION
20°
20°
11
Installation position with oil-sealed backing pump
11 Vacuum chamber
No forces from the piping system must be
allowed to act on the pump where turbopumps
are anchored. Suspend or support all pipes to
the pump.
CAUTION
11
90°
3.3. Connecting The Fore-Vacuum Side
Backing pump:
Vacuum pressure
≤
10 mbar; with
enhanced convection cooling < 0.1 mbar.
Recommendation: Oil-free diaphragm pump or rotary vane
vacuum pumps from the Pfeiffer Vacuum
range (note installation position,
turbopump, see section 3.2.).
Connecting the backing pump
All connections of the fore-vacuum line: with the usual small
flange components or hose screw connections.
Be sure to conduct away the exhaust gases
from the backing pump. Do not reduce the free
cross section of the fore-vacuum flange with
following components.
The exhausted process gases and vapours can
represent a health hazard and can also be envi-
ronmentally damaging.
Comply with all the gas manufacture's safety
instructions.
➡
With rigid pipe connections: fit a bellows in the connecting
line to reduce vibration.
➡
The electrical connection of the backing pump is made via
a relay box whose control line is connected to ”FV PUMP”
on the TC 600 (see section “accessories”).
3.4. Connecting The Cooling Unit
Turbopumps TMH 071 / TMU 071 can optionally be provided
with enhanced convection cooling, air cooling or water
cooling. The turbopumps must be operated with air or water
cooling where the fore-vacuum pressure is increased
(> 0.1 mbar) and/or operations with gas loads. For all proces-
ses from 50% of the maximum gas load sealing gas must be
used to ensure rotor cooling.
Use and installation:
– Heat sink for convection cooling (installation orientations
see section “dimensions”).
– Water cooling unit
– Air cooling unit (only valid for ambient temperatures from
5° to 40° C).
➡
Plug control lead into the connection ”FAN” of the TC 600
on the turbopump.
WARNING
CAUTION
