6
3. Installation
3.1. Preparations For Installation
Do not carry out any unauthorised conversions
or alterations to the turbopump. The operator
must ensure that the TC 600 is integrated into an
emergency safety circuit. The supply voltage of
the TC 600 must be interrupted when releasing
the emergency safety condition.
For special requirements please contact Pfeiffer
Vacuum.
In case the rotor blocks suddenly, torque levels
up to 882200 N
Nm
m can occur which need to be ab-
sorbed by the system and the high vacuum
flange.
– The maximum permissible rotor temperature of the pump
is 80 °C. If the vacuum chamber or parts in the vacuum
chamber are heated must be fitted if necessary, suitable
shielding in the vacuum chamber before the turbopump
(constructional suggestions available on request).
– The temperature of the high vacuum flange may not exeed
120 °C.
– Only remove the blank flange from the high and fore-vacu-
um side immediately before connection.
– On Turbopumps TMH 071 / TMU 071 the lubricant reser-
voir is already fitted and filled.
– Where magnetic fields of > 3 mT are involved suitable
shielding must be provided (available on request).
– If the pump is baked out, the heating sleeve and the body
of the pump must be insulated to prevent burns from
accidental contact.
– Either air or water cooling is necessary for operating the
pump. Where operations with convection cooling are in-
volved, a cooling unit must be used (please see "Accesso-
ries").
– Floor mounting of the turbomolecular pump is only
admissible after consulting the manufacturer.
The person responsible for commissioning must
ensure that the installation is carried out in
accordance with the legal regulations and the
pertinent industrial standards.
Notes to the accessories named below are
located in the section 11 “Accessories”. There
are also located the information on the
appropriate operating instructions.
☞
PLEASE NOTE
☞
PLEASE NOTE
WARNING
WARNING
3.2. Connecting The High Vacuum Side
The utmost cleanliness must be observed when
fitting all high vacuum parts. Unclean
components prolong the pumping time!
All mounting materials for the flanges must be
dry and free of any grease or dust with the
installation.
O
On
nllyy those turbopumps with a "Y
Y" behind the
type designation (please see rating plate, for
example TMH 071 Y P) may be fitted in all posi-
tions.
Connecting via a Pfeiffer Vacuum vibration compensator
The high vacuum side can be flanged onto the vacuum cham-
ber either directly or via a Pfeiffer Vacuum vibration compen-
sator (see Section 11. Accessories).
When using a Pfeiffer vacuum vibration compensator,
suitable securing needs to be introduced capable of
absorbing the energy of the rotor should it suddenly block,
since the vibration compensator itself alone cannot absorb
the occurring forces. Please consult the manufacturer.
The maximum permissible temperature at the
vibration compensator is 100 °C.
Use a Pfeiffer Vacuum splinter shield or protective screen
The use of a Pfeiffer Vacuum splinter shield or protective
screen in the high vacuum flange protects the turbopump
against foreign bodies coming from the vacuum chamber but
does reduce the volume flow rate as followed:
CAUTION
CAUTION
☞
PLEASE NOTE
R
Re
ed
du
uc
ce
ed
d vvo
ollu
um
me
e ffllo
ow
w rra
atte
e iin
n %
%
N
N22
H
He
e
H
H22
Splinter shield DN 63
13
5
3
Protective screen DN 63 3
1
1
Splinter shield DN 40
26
13
8