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Turbomolecular Drag Pumps

With Electronic Drive Unit TC 600

800 504 BE/I (0308)

TMH 071 P

TMU 071 P

Betriebsanleitung • Operating Instructions

Содержание TMH 071 P

Страница 1: ...Turbomolecular Drag Pumps With Electronic Drive Unit TC 600 PM 800 504 BE I 0308 TMH 071 P TMU 071 P Betriebsanleitung Operating Instructions...

Страница 2: ...ting The RS 485 10 3 12 Connections Diagram 11 4 Operations 12 4 1 Before Switching ON 12 4 2 Switching ON 12 4 3 Switching OFF And Venting 13 4 4 Operations With The DCU 001 DCU 100 13 4 5 Gas Type D...

Страница 3: ...racket screws to connect the high vacuum flange ISO flange The turbopump must be anchored in accordance with the installation instructions Do not disconnect the plug between the TC 600 and accessory c...

Страница 4: ...ly Pfeiffer Vacuum power units may be used to operate the TC 600 The use of other power units requires the prior agreement of the manufacturer and equalization with the valid specification The pumps m...

Страница 5: ...with the complete set of M8 screws or Underside of the pump with 4 screws M5 screws quality 8 8 Either air or water cooling is necessary for operating the pump Where operations with convection coolin...

Страница 6: ...ore vacuum flange with following components The exhausted process gases and vapours can represent a health hazard and can also be envi ronmentally damaging Comply with all the gas manufacture s safety...

Страница 7: ...ENT of the TC 600 8 on the turbopump The venting mode of the venting valve is selected via the DCU or Serial Interface RS 485 3 6 Connecting The Casing Heating Unit The attainment of final pressures i...

Страница 8: ...r Pumps TMH 071 P TMU 071 P is 24 VDC 5 in accordance with EN 60 742 If the turbopump is being operated with the Operations And Display Unit DCU 001 100 remote plug 8d should be disconnected Connectio...

Страница 9: ...t tp pu ut t l lo ow w O Ou ut tp pu ut t h hi ig gh h Collective malfunction message malfunction free operations output can be loaded with 24 V 50 mA 10 Mass ground ____________ 11 Contact Output 1 S...

Страница 10: ...OTE WARNING D De es si ig gn na at ti io on n V Va al lu ue e Serial interface type RS 485 Baud rate 9600 Baud Data file word length 8 bit Parity no parity Start bits 1 Stop bits 1 2 The electrical co...

Страница 11: ...Heating Mains input heating 115 208 230 VAC Mains input pumping station 115 208 230 VAC Connection pumping station Relay box Pumping station Imax 16A HEATING VENTING VALVE TVF 005 L N PE PE N L L N P...

Страница 12: ...see Section 3 8 P Pl le ea as se e n no ot te e The following pre settings have been programmed Running up time 8 min Rotation speed switchpoint 80 Automatic venting 50 These settings can only be alte...

Страница 13: ...r cooling is required if the pumps are to be operated with gas load CAUTION PLEASENOTE Where high level gas loads and rotation speeds are involved the resulting friction subjects the rotor to the effe...

Страница 14: ...no operations for 2 2 y ye ea ar rs s Close the high vacuum flange and evacuate the turbopump via the fore vacuum flange Vent turbopump via the venting connection with nitrogen or dry air Close fore...

Страница 15: ...aximum 24 V and a key ratio of 25 75 enables the rotation speed to be set in the range 20 100 of the nominal rotation speed If no signal is present the pump accelerates up to its final rotation speed...

Страница 16: ...eed switch point and results in the turbomolecular pump being switched off LED on the TC 600 glows red Collective malfunction L LE ED D C Ca au us se e g gr re ee en n r re ed d Glows Power unit OK Fu...

Страница 17: ...fferVacuumService TCrun uptimetooshort Setlongerstart uptimewiththeDCUorPC Thermaloverloadingcausedby Waterflowinsufficient Ensurefreeflow Insufficientairsupply Ensureadequateairsupply Fore vacuumpres...

Страница 18: ...e the locking cover 90 on the underside of the pump with adjustable pin type face wrench E order number N 5709 103 take care with the O ring 91 Lever out the lubricant reservoir 92 with the help of tw...

Страница 19: ...n and invoice this work to you if you have not attached this note This also applies where the operator does not have the facilities to carry out the decontamination work Units which are contaminated m...

Страница 20: ...500 B W Hz 80 1500 80 1500 80 1500 C W Hz 55 1500 55 1500 55 1500 D W Hz 80 1300 80 1300 80 1300 Final pressure 5 With rotary vane pumps mbar 1 10 7 1 10 7 5 10 10 With diaphragm pumps mbar 1 10 7 1 1...

Страница 21: ...58 29 5 48 90 5 104 5 155 2 65 5 32 86 82 5 64 5 M5 2 5 9 7 83 4 3 3 0 100 7 95 DN 63 CF F DN 63 ISO K DN 40 ISO KF DN 16 ISO KF G 1 4 9 1 Dimensions Diagram TMH 071 P TMU 071 P Cooling unit Cooling u...

Страница 22: ...Spare parts TMH 071 P TMU 071 P Set of seals 1 PM 083 077 T 6 Rubber foot 4 P 3695 700 ZD 17 USIT ring 1 P 3529 133 A 90 Locking cover 1 PM 083 021 X 91 O ring 1 68 x 3 P 4070 972 PV 92 Lubricant rese...

Страница 23: ...ers PM 041 827 T PM 800 521 BN TPS 100 19 insert unit PM 041 828 T PM 800 521 BN DCU 100 19 insert unit with Operating and Display Control Unit DCU PM C01 694 PM 800 477 BN Mains cable Schuko plug 230...

Страница 24: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Страница 25: ...ereby certify that the product specified below is intended for installation in a machine which is forbidden to be put into operation until such time as it has been determined that the end product is i...

Страница 26: ...ax 49 0 64 41 8 02 2 02 info pfeiffer vacuum de www pfeiffer vacuum net Your Vacuum Technology Experts in Turbo Pumps Rotary Vane Vacuum Pumps Roots Pumps Dry Vacuum Pumps Leak Test Units Valves Flang...