6
Safety
2.3 Proper use
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The pumping station is intended for evacuating vacuum chambers to pressure values
in the medium vacuum range.
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Only use the pumping station for creating vacuum.
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Only use the pumping station for evacuation of dry and inert gases; other applications
only after consultation with Pfeiffer Vacuum.
●
Use suitable gases (process-specific) such as sealing gas, flushing gas and cooling
gas at the inlets of the pumping station components.
●
Installation, operating and maintenance regulations must be complied with.
●
Other accessories, than those described in this manual, must not be used without the
agreement of Pfeiffer Vacuum.
2.4 Improper use
Improper use will cause all claims for liability and warranties to be forfeited. Improper use
is defined as usage for purposes deviating from those mentioned above, especially:
●
pumping of corrosive and reactive gases; special conditions of use only after consul-
tation with Pfeiffer Vacuum
●
pumping of explosive media or of oxygen at greater than atmospheric concentration
●
operation of the pumping station in potentially explosive areas
●
operation of the pump with open vacuum flange
●
pumping of gases containing impurities such as particles, dusts and condensate; note
the vapour compatibility levels of the pump
●
pumping of substances that tend to sublime
●
operation of the pumping station to generate pressure
●
pumping of liquids
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connection to pumps or units which are not suitable for this purpose according to their
operating instructions
●
connection to units which have exposed voltage-carrying parts
●
the evacuation of gases that may form adherent deposits or condensate in the suction
chamber
WARNING
Increased noise emission!
Increased noise emission can occur within a limited area surrounding the vacuum
pump.
Provide noise protection or
wear hearing protection.
NOTICE
EC conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies
the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must check
the entire system for compliance with the valid EU directives and reassess it accord-
ingly.