2/2
B 310
Inlet and exhaust connections
GB 03368 - Edition 03 - Jan 12
Mounting of the inlet
screen
Position the screen (2) into the
inlet housing groove (1), bend
side opposite to the rotor.
Position the ring (3) and
press it manually into the
groove bottom all over its
circumference.
At inlet:
Check that an inlet screen accessory is installed on the pump ; if not,
install it. (pumps are delivered with inlet screen filter).
It is recommended to install an isolation valve between the chamber to allow
chamber venting without stopping the pump.
At exhaust
When pumping on corrosive gases, or aggressive gases, the gas can cause
injury or death. The exhaust of the turbopump must be connected to
roughing pump line compatible with process gases.
It is highly recommended to install an isolation valve (closed when power is
off) between the turbo pump and the roughing circuit.
The turbomolecular pumps can’t evacuate at atmospheric pressure, they
are connected to a roughing pump. For a transient period, they can start
to run at atmospheric pressure.
2
1
3
Inlet flange
1
2
3
adixen Vacuum Products - Operating instructions - ATH 500 M-MT
adixen Vacuum Products - Operating instructions - ATH 500 M-MT
