Typical connection:
In this installation, we use:
A primary isolation valve V1 between the turbo pump and the
roughing pump;
- a secondary isolation valve V2 between the turbo pump and the
chamber to be pumped;
- a purge valve V3;
- a venting valve V4.
We recommend that you fit a separate earth (ground) conductor to earth
pump. Use an un-insulated braid or a separate insulated green/yellow
conductor with a minimum 9AWG (3mm2) conductor. Use a M4 x 8 screw and
a shakeproof washer fitted to the earth hole from the pump to secure the
earth conductor to the pump. The impedance between the pump-body and
the earth connection point must be < 0.1 Ohm at 25 A.
ATH500
V2
High vacuum isolation valve
Integrated
electronic
N
2
Water
valve
Purge
valve
Air valve
Roughing
isolation
valve
V1
Roughing pump
1
V4
Power supply
48VDC
Heater
V3
Valve
24VDC
1
Recommended to connect a wire to the pump to the potential earth
even in perturbated electromagnetical environment
Wiring diagram (typical)
Optional electrical connections recommended
by the manufacturer (version M only)
El
ectrical connections (version MT only)
Minimum electrical connections
Legend:
Power voltage
4/4
B 400
Safety instructions and electrical
connections
GB 03370 - Edition 03 - Jan 12
adixen Vacuum Products - Operating instructions - ATH 500 M-MT
adixen Vacuum Products - Operating instructions - ATH 500 M-MT
