Page 24
MaskData
Left Rear
(550X650) mask
Position of 110mm from the left edge
side of X-direction mask frame
Position of 200mm from the inner
side of Y-direction mask frame
(650X550) mask
Position of 160mm from the left edge
side of X-direction mask frame
Position of 150mm from the inner
side of Y-direction mask frame
Right Center
(550X650) mask
Position of 110mm from the right
edge side of X-direction mask frame
Y-direction center distribution
(650X550) mask
Position of 160mm from the right
edge side of X-direction mask frame
Y-direction center distribution
Left Center
(550X650) mask
Position of 110mm from the left edge
side of X-direction mask frame
Y-direction center distribution
(650X550) mask
Position of 110mm from the left edge
side of X-direction mask frame
Y-direction center distribution
193C-E-PMA01-A03-00
330mm
550mm
250mm
650mm
160mm
CL
250mm
110mm
(160mm)
Sample board
pattern position
Transport
direction
193C-037E
250mm
330mm
550mm
250mm
650mm
160mm
CL
(160mm)
110mm
Transport
direction
193C-038E
Sample board
pattern position
250mm
330mm
550mm
160mm
250mm
200mm
(150mm)
650mm
110mm
(160mm)
Transport
direction
193C-040E
Sample board
pattern position
Содержание SP22P
Страница 2: ......
Страница 6: ...6 MEMO 193C E PMC00 B02 00...
Страница 10: ...MEMO Page 4 193C E PMA00 B03 00...
Страница 14: ...Page 4 193C E PMA01 A01 01 MEMO...
Страница 60: ...Page 50 193C E PMA01 A04 01 MEMO...