F3M-S
F3M-S
3
Specifications
J
RATINGS/CHARACTERISTICS
Part number
F3M-S625
F3M-S626
F3M-S825
F3M-S826
F3M-S1213
F3M-S1225
Sensing object
6-inch (5-inch) semiconductor
silicon wafers and transparent
wafers (with transparency of
92% max.) (See Note.)
8-inch semiconductor silicon
wafers and transparent wafers
(with transparency of 92% max.)
(See Note.)
12-inch semiconductor silicon
wafers and 12-inch SIC wafers
(with transparency of 30% max.)
Number of channels
25
26
25
26
13
25
Optical axis pitch
4.76 mm
6.35 mm
10 mm
Optical axis width
1.5 mm
Light source
Infrared LED (940 nm)
Power supply voltage
12 to 24 VDC
r
10%, ripple (p-p): 10% max.
Current consumption
120 mA max.
Output
Control
output
Load power supply voltage: 30 VDC
Load current: 20 mA max. (residual voltage: 1 V max.)
Inflow current: 20 mA
Parallel output from all channels, NPN open collector
Dark-ON operation
Answer-back
output
When remote teaching is ON, pin 28 will be used for this function.
Self-
diagnostic
output
Load power
supply voltage:
30 VDC max.
Load current:
20 mA max.
(Residual
voltage: 1 V
max.)
Inflow current:
20 mA
NPN open
collector
---
Load power
supply voltage:
30 VDC max.
Load current:
20 mA max.
(Residual
voltage: 1 V
max.)
Inflow current:
20 mA
NPN open
collector
---
Load power supply voltage:
30 VDC max.
Load current: 20 mA max.
(Residual voltage: 1 V max.)
Inflow current: 20 mA
NPN open collector
Indicators
Power
Green indicator is ON when power is being supplied.
Warning
Red indicator is ON under the following conditions:
Teaching, no sensing object, insufficient light, or error.
Response time
10 ms max.
Control output interrupt input
All outputs interrupted: GND and control output interrupt input terminals are short-circuited and 0-V
short-circuit current is 1 mA max.
Output interrupt reset: GND and control output interrupt input terminals are opened or the voltage is
between 9 V and the working power supply voltage.
Remote
ON
GND and remote input terminals are short-circuited and 0-V short-circuit current is 1 mA max.
Remote
teaching
input
OFF
GND and remote input terminals are opened or the voltage is between 9 V and the working power
supply voltage.
Teaching check function
Orange LED indicator
Ambient
temperature
Operating
0
q
C to 40
q
C (32
q
F to 104
q
F) with no icing or condensation
0
q
C to 55
q
C (32
q
F to 131
q
F)
with no icing or condensation
p
Storage
-- 25
q
C to 60
q
C (-- 13
q
F to 140
q
F)
-- 25
q
C to 60
q
C (-- 13
q
F to 140
q
F)
Relative humidity
35% to 85% with no condensation
Ambient illumination
Fluorescent lamp: 1,500
ç
x max.
Noise resistance
Power supply line:
r
480 V in normal mode with noise simulator
Noise resistance
Static electrical noise: No malfunction or destruction at
r
8 kV
Vibration resistance
10 to 55 Hz, 0.5-mm double amplitude for 2 hrs each in X, Y, and Z axes
Shock resistance
300 m/s
2
(30G) for 3 times each in X, Y, and Z axes
Degree of protection
IEC60529 IP40
Connection
Preleaded cable (standard cable length: 100 mm)
Connector
(This table continues on the next page.)
