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27
ACTUAL GAS
K FACTOR
Relative to N
2
Cp
[Cal/g]
Density
[g/I]
Phosphorous Oxychloride POCl
3
.36
.1324
6.843
Phosphorous Pentafluoride PH
5
.3021
.1610
5.620
Phosphorous Trichloride PCl
3
.30
.1250
6.127
Propane C
3
H
8
.35
.399
1.967
Propylene C
3
H
6
.40
.366
1.877
Silane SiH
4
.5982
.3189
1.433
Silicon Tetrachloride SiCl
4
.284
.1270
7.580
Silicon Tetrafluoride SiF
4
.3482
.1691
4.643
Sulfur Dioxide SO
2
.69
.1488
2.858
Sulfur Hexafluoride SF
6
.2635
.1592
6.516
Sulfuryl Fluoride SO
2
F
2
.3883
.1543
4.562
Tetrafluoroethane (Forane 134A) CF
3
CH
2
F
.5096
.127
4.224
Tetrafluorohydrazine N
2
F
4
.3237
.182
4.64
Trichlorofluoromethane (Freon-11) CCl
3
F
.3287
.1357
6.129
Trichlorosilane SiHCl
3
.3278
.1380
6.043
1,1,2-Trichloro-1,2,2 Trifluoroethane
(Freon-113) CCl
2
FCClF
2
.2031
.161
8.36
Triisobutyl Aluminum (C
4
H
9
)AL
.0608
.508
8.848
Titanium Tetrachloride TiCl
4
.2691
.120
8.465
Trichloro Ethylene C
2
HCl
3
.32
.163
5.95
Trimethylamine (CH
3
)
3
N
.2792
.3710
2.639
Tungsten Hexafluoride WF
6
.2541
.0810
13.28
Vinyl Bromide CH
2
CHBr
.4616
.1241
4.772
Vinyl Chloride CH
2
CHCl
.48
.12054
2.788
Xenon Xe
1.44
.0378
5.858
Содержание FMA1800A
Страница 27: ...23 APPENDIX 1 COMPONENTS DIAGRAM FMA1700A 1800A METERING PC BOARD...
Страница 33: ...29 PARTS OF THE FLOW METER LEFT AND RIGHT VIEWS FRONT VIEW...
Страница 34: ...NOTES 30...