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FMA 5400A/FMA 5500A

Mass Flow Controllers

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Содержание FMA 5400A

Страница 1: ...FMA 5400A FMA 5500A Mass Flow Controllers omega com e mail info omega com For latest product manuals omegamanual info User sGuide Shop online at ...

Страница 2: ...ed by the United Kingdom Office Toll Free 0800 466 342 TEL 33 0 161 37 29 00 FAX 33 0 130 57 54 27 e mail sales omega fr Germany Austria Daimlerstrasse 26 D 75392 Deckenpfronn Germany Toll Free 0 800 6397678 TEL 49 0 7059 9398 0 FAX 49 0 7056 9398 29 e mail info omega de United Kingdom OMEGA Engineering Ltd ISO 9001 Certified One Omega Drive River Bend Technology Centre Northbank Irlam Manchester ...

Страница 3: ... Warm Up 5 2 Flow Signal Output Readings 5 3 Swamping Condition 5 4 Setpoint Reference Signal 5 5 Valve OFF Control Open Collector NPN Compatible 5 6 Valve Test Purge 6 MAINTENANCE 6 1 Introduction 6 2 Flow Path Cleaning 6 2 1 Cleaning the Inlet Filter Screen in FMA Models 6 2 2 Valve Maintenance for FMA 5400A 5500A Series Max Flow 10 50 and 100 L min 7 CALIBRATION PROCEDURES 7 1 Flow Calibration ...

Страница 4: ...ntiometer 7 2 18 Close Loop 50 Flow Adjustment 7 2 19 Close Loop 75 Flow Adjustment 7 2 20 Close Loop 100 Flow Adjustment 7 3 Calibration of FMA 5400A 5500A Series Max Flow 200 500 and 1000 L min 7 3 1 Connections and Initial Warm Up 7 3 2 ZERO Adjustment 7 3 3 SPAN Adjustment 7 3 4 Linearity Adjustment 7 3 4 1 Open Motorized Valve in FMA 5400A 5500A Series Max Flow 200 500 and 1000 L min 7 3 5 Co...

Страница 5: ... Common Conditions 8 2 General Troubleshooting Guide 8 3 FMA 5400A 5500A Series Max Flow 10 50 and 100 L min Valve Related Troubleshooting 8 4 Technical Assistance 9 CALIBRATION CONVERSIONS FROM REFERENCE GASES APPENDIX 1 COMPONENT DIAGRAM APPENDIX 2 GAS FACTOR TABLE K FACTORS APPENDIX 3 DIMENSIONAL DRAWINGS APPENDIX 4 WARRANTY 28 28 28 29 29 29 29 30 32 35 35 36 38 42 46 ...

Страница 6: ...tages promptly 1 3 Returning Merchandise for Repair Please contact an OMEGA customer service representative and request a Return Authorization Number AR It is mandatory that any equipment returned for servicing be purged and neutral ized of any dangerous contents including but not limited to toxic bacterially infec tious corrosive or radioactive substances No work shall be performed on a returned ...

Страница 7: ...ther contaminants Be sure to observe the direction of gas flow as indicated by the arrow on the front of the meter when connecting the gas system to be monitored Insert tubing into the compression fittings until the ends of the properly sized tub ings home flush against the shoulders of the fittings Compression fittings are to be tightened according to the manufacturer s instructions to one and on...

Страница 8: ...vice permanent damage The operating power input is supplied via the 15 pin D connector located at the side of the flow transducer enclosure On FMA 5400A 5500A s purchased without an LCD readout a readout panel meter digital multimeter or other equivalent device is required to facilitate visual flow readings A built in SETPOINT potentiometer is used for local control of the flow Variable analog 0 t...

Страница 9: ...NG THE POWER SUPPLY CHECK YOUR CONTROLLER MODEL NUMBER AND POWER SUPPLY REQUIREMENTS LABEL LOCATED ON THE CONTROLLER BACK COVER DO NOT CONNECT 24 Vdc POWER SUPPLY UNLESS YOUR FMA 5400A 5500A CONTROLLER WAS ORDERED AND CONFIGURED FOR 24 Vdc EXCEEDING THE SPECIFIED MAXIMUM POWER SUPPLY VOLTAGE LIMIT MAY RESULT IN PERMANENT DEVICE DAMAGE Important notes In general D Connector numbering patterns are s...

Страница 10: ...ducer in a manner other than that specified in this manual or in writing from OMEGA may impair the protection provided by the equipment CAUTION Fuse will not protect controller if power supply voltage exceeds maximum voltage specified for a particular model NR7 LOCAL SET POINT POTENTIOMETER R34 ZERO POTENTIOMETER R38 50 R39 75 R40 100 R33 SPAN 10 or 25 R1 RESPONSE TIME AJUSTMENT NJ1 CONTROL CIRCUT...

Страница 11: ...ound the LCD The LCD readout for panel mounting includes a bezel with two plastic screws which conveniently fit into a rec tangular cut out for panel mounting see Figure 2 3 When active the 2 cutoff will shut off the power to the valve when a setpoint of less than 2 of the full scale flow range is set Figure 2 2 shows the jumper con figurations for the three basic valve control options The factory...

Страница 12: ...ream coil windings The resultant temperature dependent resistance differential is detected electronically The measured gradient at the sensor wind ings is linearly proportional to the instantaneous rate of flow taking place An output signal is generated that is a function of the amount of heat carried by the gases to indicate mass molecular based flow rates FMA 5400A 5500A Mass Flow Controller Ser...

Страница 13: ...Flow 10 50 and 100 L min 500 psig 34 5 bars Series Max Flow 200 500 1000 L min Optimum pressure is 20 psig 1 4 bars TURNDOWN RATIO 40 1 MAX DIFFERENTIAL PRESSURE 50 psid 345 kPa for 5400A 5500A 10 50 200 500 1000 AND 40 psid 276 kPa for 5400A 5500A 100 GAS TEMPERATURE 32 F F to 122 F F 0 F C to 50 F C AMBIENT TEMPERATURE 14 F F to 122 F F 10 F C to 50 F C GAS RELATIVE HUMIDITY Up to 70 MAXIMUM INT...

Страница 14: ...10 50 100 200 500 and 1000 L min Anodized aluminum brass 416 Stainless Steel and 316 stainless steel with FKM O rings seals BUNA EPR or Perflouroelastomer O rings are optional FMA 5400AST 5500AST Series Max Flow 10 50 100 200 500 and 1000 L min 416 Stainless Steel and 316 stainless steel with FKM O rings seals BUNA EPR or Perflouroelastomer O rings are optional OMEGA makes no expressed or implied ...

Страница 15: ... as amended Emission Standard EN 55011 1991 Group 1 Class B Immunity Standard EN 55082 1 1992 CODE liters min N2 23 15 24 20 26 30 27 40 28 50 CODE liters min N2 40 60 41 80 42 100 43 200 44 500 45 1000 upper block element and may be tilted over 90 degrees for optimal viewing comfort Remote or panel mounting remote reading is optional Standard readings are in direct engi neering units for the give...

Страница 16: ...A transducer has not yet attained it s minimum operating tempera ture This condition will automatically cancel within a few minutes and the trans ducer should eventually zero If after the 15 minutes warm up period the display still indicates a reading of less than 3 0 of F S readjust the ZERO potentiometer R34 through the access window Before zero adjustment to temporarily disconnect the gas sourc...

Страница 17: ...sducer see Figure 2 1 Meter signal output is linearly proportional to the mass molecular flow rate of the gas being metered The full scale range and gas for which your meter has been calibrated are shown on the flow transducer s front label Default calibration is performed for 0 to 5 VDC input output signal If 4 20 mA out put signal is used for flow indication on the FMA 5400A 5500A which was cali...

Страница 18: ...points are controlled locally or remotely Setpoints inputs respond to analog 0 to 5 VDC or 4 to 20 mA reference voltages default jumper setting is 0 to 5 VDC Voltage is a linear representation of 0 to 100 of the full scale mass flow rate Response times to setpoint changes are 1 second FMA Series Max Flow 10 L min 2 seconds FMA Series Max Flow 50 and 100 L min and 5 seconds FMA 200 500 and 1000 L m...

Страница 19: ...it 14 Conversely when the connection is left open or pin 12 remains unconnected the valve remains active The valve will remain active when the VALVE OFF pin remains floating This feature is compatible with open collector NPN transistor switches as found in DC output ports of programmable controllers and similar devices The simplest means for utilizing the VALVE OFF control feature is to connect a ...

Страница 20: ...calibration CAUTION TO PROTECT SERVICING PERSONNEL IT IS MANDATORY THAT ANY INSTRUMENT BEING SERVICED IS COMPLETELY PURGED AND NEUTRALIZED OF TOXIC BACTERIOLOGICALLY INFECTED CORROSIVE OR RADIOACTIVE CONTENTS 6 2 Flow Path Cleaning Inspect visually the flow paths at the inlet and outlet ends of the meter for any debris that may be clogging the flow through the meter Remove debris carefully using t...

Страница 21: ... TO ATTEMPT TO DISASSEMBLE OR REPAIR FMA SERIES MAX FLOW 50 100 200 500 and 1000 L min DISASSEMBLY NECESSITATES RE CALIBRATION 6 2 2 Valve Maintenance for FMA Series Max Flow 10 50 100 L min The solenoid valve consists of 316 and 416 stainless steel and VITON7 or optional EPR or KALREZ7 O rings and seal materials No regular maintenance is required except for periodic cleaning It is advisable that ...

Страница 22: ...re 2 1 and attempt to flush through with a clean filtered and neutral gas such as nitrogen Another option for fully opening the valve is to remove the plastic cap on top of the valve and turning the set screw counterclockwise until it stops See section 7 3 for valve adjustment to return the valve to functional use 17 SPIDER SPRING STEM SEAT VITON INSERT ORIFICE O RING BLOCK CORE SPIRAL SPRING COMP...

Страница 23: ...e gas is found with thermodynamic properties similar to the actual gas under consideration The appropriate relative correction factor should be recalculated see section 9 It is standard practice to calibrate Mass Flow Controllers with dry nitrogen gas It is best to calibrate the FMA Series Max Flow 100 L min transducers to actual operating conditions Specific gas calibrations of non toxic and non ...

Страница 24: ... require a different Restrictor Flow Element RFE Additionally a different Solenoid Valve Orifice may also be required see Table VI Consult OMEGA for more information 7 2 1 Connections and Initial Warm Up At the 15 pin D connector of the FMA 5400A 5500A transducer connect the multimeter to output pins 1 and 2 for 0 to 5 VDC or pins 9 and 14 for 4 to 20 mA see Figure 2 1 When using a remote setpoint...

Страница 25: ...an nitrogen recheck appropriate K factor from Gas Factor Table Temperature and or pressure correction errors See also section 8 TROUBLESHOOTING If after attempting to remedy the above conditions a malfunction still persists return the meter for factory service see section 1 At this point the calibration is complete However it is advisable that several addi tional points between 0 and 100 such as 2...

Страница 26: ...ow 7 2 7 25 Flow Adjustment Reconnect the gas source Using the flow regulator adjust the flow rate to 25 of full scale flow Check the flow rate indicated against a flow calibrator Adjust the setting for potentiometer R33 by using the insulated screwdriver through the access window until the output of the flow meter reads 1 25VDC 63mV or 8mA 0 25mA Using the flow regulator adjust the flow rate unti...

Страница 27: ...ator The output of the flow meter should read 2 50 Vdc 63mV or 12mA 0 25mA If the reading is outside of that range place the jumper at J1B as appropriate to increase or decrease the signal Adjust the setting for potentiometer R38 by using the insulated screwdriver through the access window until reading is within specification 7 2 11 75 Flow Adjustment Using the flow regulator increase the flow ra...

Страница 28: ...ontrol mode turning R33 clockwise will decrease the flow Conversely turning R33 counterclockwise will increase the flow through the FMA 5400A 5500A 7 2 15 10 Close Loop Flow Adjustment using R33 potentiometer If the J1A jumper is not installed in upper or lower position paragraphs 7 2 8 and 7 2 9 were skipped then skip this paragraph and paragraph 7 2 16 Proceed directly to paragraph 7 2 17 Change...

Страница 29: ...djust the setting for potentiometer R40 until the flow output is correct Repeat steps 7 2 15 to 7 2 20 at least once more 24 ORIFICE PART NUMBER FLOW RATE N2 OR 020 10 to 1000 sccm OR 040 1 to 5 slpm OR 055 5 to 10 slpm OR 063 10 to 15 slpm OR 094 20 to 50 slpm OR 125 50 to 100 slpm TABLE II FMA 5400A 5500A SOLENOID VALVE ORIFICE SELECTION TABLE 7 3 Calibration of FMA 5400A 5500A Series Max Flow 2...

Страница 30: ...ower up the Mass Flow Controller for at least 30 minutes prior to commencing the calibration procedure 7 3 2 ZERO Adjustment Shut off the flow of gas into the Mass Flow Controller To ensure that no seepage or leak occurs into the meter temporarily disconnect the gas source Using the multimeter and the insulated screwdriver adjust the ZERO potentiometer R34 through the access window for 0 Vdc or 4 ...

Страница 31: ...4 to pin 3 at the 15 pin D connector 7 3 5 Connections and Initial Warm Up Connect the multimeter to output pins 1 and 2 for 0 to 5 Vdc or pins 9 and 14 for 4 to 20 mA of the 15 pin D connector see Figure 2 1 If calibration to a new flow range or different gas is being performed it may be necessary to remove any jumpers at J1A J1B and J1C before beginning linearizing procedure Power up the Mass Fl...

Страница 32: ...ing is outside of that range place the jumper at J1B as appropriate to increase or decrease the signal Adjust the setting for potentiometer R39 by using the insulated screwdriver through the access window until reading is within specification 7 3 10 100 Flow Adjustment Using the flow regulator increase the flow rate to 100 of full scale flow Check the flow rate indicated against the flow calibrato...

Страница 33: ... for potentiometer R38 until the flow output is correct 7 3 15 75 Flow Adjustment Change the setpoint to 3 75 Vdc to control at 75 of full scale flow Check the flow rate indicated against the flow calibrator If the flow is not within 0 75 of full scale re adjust the setting for potentiometer R39 until the flow output is correct 7 3 16 100 Flow Adjustment Change the setpoint to 5 00 Vdc to control ...

Страница 34: ...s qual ity control points during and after manufacturing and assembly operations It was calibrated in accordance to your desired flow and pressure conditions for a given gas or a mixture of gases It was carefully packed to prevent damage during shipment Should you feel that the instrument is not functioning properly please check for the following common conditions first Are all cables connected co...

Страница 35: ...w reading does not coincide with the setpoint inadequate gas pressure apply appropriate gas pressure filter screen obstructed at inlet flush clean or disassemble to remove impediments or replace ground loop signal and power supply commons are different no response to setpoint inadequate gas pressure apply appropriate gas pressure cable or connector malfunction check cables and all connections or r...

Страница 36: ...ts occluded sensor tube flush clean or disassemble to remove impediments or return to factory for replacement filter screen obstructed at inlet flush clean or disassemble to remove impediments or replace transducer is not mounted properly check for any tilt or change in the mounting of the transducer generally units are calibrated for horizontal installation relative to the sensor tube FMA 5400A 5...

Страница 37: ...ro reading on the display Be very careful during adjustment make only 15 degree turn each time and wait one minute due to the sensor s response time If reading is still high make another 15 degree turn Do not over adjust valve If you made more than 5 complete 360 degree turns and leakage still exists stop adjustment In this case unit has to be returned to the factory for servicing 5 This is not a ...

Страница 38: ...screw on the top of the valve to CCW counter clock wise direction until reading on the display will be stable Be very careful during adjustment make only 15 degree turn each time and wait about 15 seconds due to sensor s response time If reading oscillates make another 15 degree turn Do not over adjust valve If you noticed that flow rate is constant and more than 105 of full scale it means you ove...

Страница 39: ...id valve 4 Using screwdriver readjust adjustment screw on the top of the valve to CCW counter clock wise direction until reading on the display will be equal to the set point value Be very careful during adjustment make only 15 degree turn each time and wait about 15 seconds due to sensors responds time If reading still below 100 make another 15 degree turn Do not over adjust valve If you noticed ...

Страница 40: ...unchanged a relative K fac tor is used to relate the calibration of the actual gas to the reference gas For example if we want to know the flow rate of oxygen and wish to calibrate with nitrogen at 1000 SCCM the flow rate of oxygen is NOTE One common reason for proportional solenoid valve to be out of adjustment keeping control set point even very small 2 for example while disconnecting inlet pres...

Страница 41: ...36 APPENDIX 1 COMPONENTS DIAGRAM FMA 5400A 5500A SERIES MAX FLOW 10 50 AND 100 L MIN PC BOARD TOP SIDE ...

Страница 42: ...37 COMPONENTS DIAGRAM FMA 5400A 5500A SERIES MAX FLOW 10 50 AND 100 L MIN PC BOARD BOTTOM SIDE ...

Страница 43: ...44 1 3 Butadiene C4H6 3224 3514 2 413 Butane C4H10 2631 4007 2 593 1 Butene C4H8 2994 3648 2 503 2 Butene C4H8 CIS 324 336 2 503 2 Butene C4H8 TRANS 291 374 2 503 Carbon Dioxide CO2 Carbon Dioxide CO2 1 10 L min 7382 658 2016 2016 1 964 1 964 Carbon Disulfide CS2 6026 1428 3 397 Carbon Monoxide C0 1 00 2488 1 250 Carbon Tetrachloride CCl4 31 1655 6 860 Carbon Tetrafluoride Freon 14 CF4 42 1654 3 9...

Страница 44: ...055 Ethyl Acetylene C4H6 3225 3513 2 413 Ethyl Chloride C2H5Cl 3891 244 2 879 Ethylene C2H4 60 365 1 251 Ethylene Oxide C2H4O 5191 268 1 965 Fluorine F2 9784 1873 1 695 Fluoroform Freon 23 CHF3 4967 176 3 127 Freon 11 CCl3F 3287 1357 6 129 Freon 12 CCl2F2 3538 1432 5 395 Freon 13 CClF3 3834 153 4 660 Freon 13B1 CBrF3 3697 1113 6 644 Freon 14 CF4 4210 1654 3 926 Freon 21 CHCl2F 4252 140 4 592 Freon...

Страница 45: ...omide CH3Br 5835 1106 4 236 Methyl Chloride CH3Cl 6299 1926 2 253 Methyl Fluoride CH3F 68 3221 1 518 Methyl Mercaptan CH3SH 5180 2459 2 146 Methyl Trichlorosilane CH3 SiCl3 2499 164 6 669 Molybdenum Hexafluoride MoF6 2126 1373 9 366 Monoethylamine C2H5NH2 3512 387 2 011 Monomethylamine CH3NH2 51 4343 1 386 Neon NE 1 46 246 900 Nitric Oxide NO 990 2328 1 339 Nitrogen N2 1 000 2485 1 25 Nitrogen Dio...

Страница 46: ...635 1592 6 516 Sulfuryl Fluoride SO2F2 3883 1543 4 562 Tetrafluoroethane Forane 134A CF3CH2F 5096 127 4 224 Tetrafluorohydrazine N2F4 3237 182 4 64 Trichlorofluoromethane Freon 11 CCl3F 3287 1357 6 129 Trichlorosilane SiHCl3 3278 1380 6 043 1 1 2 Trichloro 1 2 2 Trifluoroethane Freon 113 CCl2FCClF2 2031 161 8 36 Triisobutyl Aluminum C4H9 AL 0608 508 8 848 Titanium Tetrachloride TiCl4 2691 120 8 46...

Страница 47: ...12 7 1 00 25 4 0 50 12 7 0 53 13 5 2 69 68 3 0 69 17 5 0 16 4 0 6 32 UNC 2B 0 13 0 95 24 1 2 38 60 4 1 25 31 8 SERIES MAX FLOW 10 L min MASS FLOW CONTROLLER NOTE OMEGA reserves the right to change designs and dimensions at its sole discretion at any time without notice For certified dimensions please contact OMEGA ...

Страница 48: ...63 15 9 1 29 32 8 6 32 UNC 2B 0 09 0 28 7 1 0 69 17 5 6 10 154 9 1 38 34 9 1 03 26 2 2 69 68 3 SERIES MAX FLOW 15 100 L min MASS FLOW CONTROLLER NOTE OMEGA reserves the right to change designs and dimensions at its sole discretion at any time without notice For certified dimensions please contact OMEGA ...

Страница 49: ... change designs and dimensions at its sole discretion at any time without notice For certified dimensions please contact OMEGA 50 00 valve ontrol ontrol l 76 2 mm 3 00 76 2 mm 3 00 191 8 mm 7 55 7 25 184 1 mm 10 24 260 1 mm 12 62 320 5 mm 191 8 mm 7 55 10 24 260 1 mm 12 62 320 5 mm control CE flow 63 5 mm 2 50 6 75 171 5 mm 63 5 mm 2 50 August 15 2012 thread size 8 32 UNC 2B For units purchased pr...

Страница 50: ...7 30 185 4 mm 3 00 76 2 mm 6 80 172 7 mm 1 4 20 UNC 2B control valve CE 50 00 SERIES MAX FLOW 1000 L min MASS FLOW CONTROLLER NOTE OMEGA reserves the right to change designs and dimensions at its sole discretion at any time without notice For certified dimensions please contact OMEGA ...

Страница 51: ...herwise shall not exceed the purchase price of the component upon which liability is based In no event shall OMEGA be liable for consequential incidental or special damages CONDITIONS Equipment sold by OMEGA is not intended to be used nor shall it be used 1 as a Basic Component under 10 CFR 21 NRC used in or with any nuclear installation or activity or 2 in medical applications or used on humans S...

Страница 52: ...ators 䡺 Turbine Paddlewheel Systems 䡺 Totalizers Batch Controllers pH CONDUCTIVITY 䡺 pH Electrodes Testers Accessories 䡺 Benchtop Laboratory Meters 䡺 Controllers Calibrators Simulators Pumps 䡺 Industrial pH Conductivity Equipment DATA ACQUISITION 䡺 Data Acquisition Engineering Software 䡺 Communications Based Acquisition Systems 䡺 Plug in Cards for Apple IBM Compatibles 䡺 Datalogging Systems 䡺 Reco...

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