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ASSEMBLY/SETUP

MANUAL

This manual is for assembly and setup of the Olympus MX61/MX61L Semiconductor/FPD
Inspection Microscopes. To ensure the safety, obtain optimum performance and familiarize yourself
fully with the use of this microscope, we recommend that you study this manual thoroughly before
operating the microscope. As this manual will be needed when you replace the lamp or fuses or
modify a setup, retain it in an easily accessible place near the work desk for future reference.

A X 7 5 9 9

MX61/MX61L

200mm/300mm COMPATIBLE SEMICONDUCTOR/FPD

INSPECTION MICROSCOPES

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Содержание MX61

Страница 1: ...rize yourself fully with the use of this microscope we recommend that you study this manual thoroughly before operating the microscope As this manual will be needed when you replace the lamp or fuses...

Страница 2: ......

Страница 3: ...HE MERCURY XENON BURNER 25 26 4 MICROSCOPE CONTROL FROM COMPUTER 27 37 CONTENTS 6 MAINTENANCE PART LISTS 39 PROPER SELECTION OF THE POWER SUPPLY CORD 40 41 5 EXTERNAL CONTROL OF REVOLVING NOSEPIECE 38...

Страница 4: ...hock hazard always set the main switch to OFF and disconnect the power cord before replacing the burner or connecting disconnecting motorized parts And since the system contains motorized parts do not...

Страница 5: ...from the microscope because contact with them may result in their fusion and an electric shock due to it 7 To avoid a potential shock hazard make sure that the power cord is safety grounded earthed 8...

Страница 6: ...d light observation Note that the position is variable depending on the weight of specimen position of the stage and other modules used MX61 installation space Unit mm MX61 Stage movement range Instal...

Страница 7: ...es and the rear panel x 2 holes Clamp the microscope using L shaped clamps and these screw holes as required When clamping the microscope using L shaped clamps pre pared by the customer be sure to use...

Страница 8: ...s are found on the microscopes Study the meaning of the symbols and always use the equipment in the safest possible manner Symbol Explanation l Indicates that the surface becomes hot and should not be...

Страница 9: ...ze If a lens is stained with fingerprints or oil smudges wipe it gauze slightly moistened with commercially available absolute alcohol Since the absolute alcohol is highly flammable it must be handled...

Страница 10: ...n accordance with the instruction manual may cause harmful interference to radio communications Operation of this equipment in a residential area is likely to cause harmful interference in which case...

Страница 11: ...MX SIC1412R2 Transmitted light reflected light observation model MX61 MX SIC8R Transmitted light reflected light observation model MX SIC6R2 Reflected light observation only MX SIC6A Reflected light...

Страница 12: ...nch Mask Holder BH3 MH4 Black Plate BH3 SP6 Glass Plate BH3 SPG6 Rotary Wafer Holder Plate MX WHPR86 For 6 8 inch wafers 6x6 Inch Stage MX SIC6A 6x6 Inch Stage MX SIC6R2 8x8 Inch Stage MX SIC8R Rotary...

Страница 13: ...MX61 MX61L 10 Stage and Holder System for the MX61L 6 Inch Mask Holder MX MH6 Glass Plate MX SPG1412 Rotary Wafer Holder for 8 inch and 12 inch wafers MX WHPR128 14x12 Inch Stage MX SIC1412R2...

Страница 14: ...len wrench 3 mm Tool holder Tools Used Provided with the microscope frame Halogen bulb 12V100WHAL L 12V100WHAL 100 W halogen lamp housing U LH100 3 U LH100L 3 High intensity lamp housing U LH75XEAPO U...

Страница 15: ...ly Fig 5 The clutch and belt may stick together and prevent smooth operation of the release function if the stage has not been moved for a long time If this phenomenon occurs take the remedial action...

Страница 16: ...e plate by tightening the holder clamping screw on the left side of the stage Attaching the Black Plate Glass Plate Carefully place the plate on the stage surface and tighten the holder clamping screw...

Страница 17: ...ctives do not touch the stage when mounting the revolving nosepiece Slide the revolving nosepiece all the way into the dovetail mount until it stops The revolving nosepiece is a heavy module Take care...

Страница 18: ...on the top of the lamp housing 2 Lift the lamp housing to remove 3 Tilt the lamp socket by 90 in the direction of the arrow 4 While holding down the lamp clamping lever hold the halogen bulb by means...

Страница 19: ...hipment condition or with an old burner when the burner is replaced Remove the holder or old burner by loosening the two burner holding screws 4 Attach the positive pole of a specified mercury burner...

Страница 20: ...ll shorten the service life of the burner 2 Before replacing the burner wait at least 10 minutes or until the burner and lamp housing have cooled down after turning the burner off Before removing the...

Страница 21: ...t for Mercury Burner CAUTION This operation should be performed after completing the attachment of the lamp housing described in the next section Cables and cords are vulnerable to bend or twist Do no...

Страница 22: ...referringtothesection PROPER SELECTION OF THE POWER SUPPLY CORD at the end of this instruction manual If the proper power cord is not used Olympus can no longer warrant the electrical safety performan...

Страница 23: ...lectricity Since the human body is charged with a small amount of static electricity discharge it from your body before proceeding to the setup This is done by lightly touching any metallic object Fun...

Страница 24: ...ON When using computer control through the serial interface RS 232C When the request command 1OBA n is input the objective is switched at the same time as change of the AS value to the set value Table...

Страница 25: ...is recommended to use a highly reflective specimen such as a mirror 3 Remove the eyepiece and while looking into the eyepiece sleeve press the aperture iris diaphragm open close button so that the ape...

Страница 26: ...rews AB3 x 5 and Allen wrench 2 5 mm After clamping temporarily find the positioning with which the gear interlocking is smooth and tighten the clamping screws firmly 5 Using a Phillips screwdriver lo...

Страница 27: ...the screw limiting the light path selection stroke This screw should be retained by the user because it will be reused when restoring the light path switching stroke to the original setting 6 Attach a...

Страница 28: ...the U LH75XEAPO lamp housing Set the main switch to ON and wait until the arc image stabilizes for 5 to 10 minutes after ignition before proceeding to the centering 1 Remove an objective to make an i...

Страница 29: ...onger possible to restore the mirror position in the factory shipped condition 1 Using a pair of tweezers etc peel off the two blind stickers on the rear of the lamp housing 2 Fit the Allen screwdrive...

Страница 30: ...he RS 232C communication parameters are fixed as shown below 1 RS 232C Communication Parameters 2 Connection of the RS 232C Cable Fig 37 This connector is only for connection of a computer that corres...

Страница 31: ...e MX61 61L can be controlled exclusively using the request commands The status of the MX61 61L can be checked using the query commands The four buttons on the microscope front panel hereinafter referr...

Страница 32: ...after power ON until the completion of initialization When the MX61 61L is turned ON CTS Clear To Send RS 232C pin 8 is set to OFF and all commands received from the host while CTS is OFF are ignored...

Страница 33: ...umber specified with n n 0 Minimum 1550 Intermediate 3113 Maximum 1EAS 1EAS Query Check of the current aperture iris diaphragm position 1EAS n n 0 to 3113 1OBA n Request Rotation of the revolving nose...

Страница 34: ...switches and hand switch buttons are extinguished in remote mode 4 When the microscope is set to local mode by this instruction command all of the front panel switches and hand switch buttons are enab...

Страница 35: ...on nose piece is used Request Rotation of the re volving nose piece position objective with the number specified with n in the optical axis 1OB Successful The specified revolving nose piece position i...

Страница 36: ...ASB n n 0 to 3113 Command Type Description Response Result Description Request Setting of the aper ture iris diaphragm to the position with the number speci fied with n 1EAS Successful The aperture ir...

Страница 37: ...eturned when both operations have completed 2 If the request command for a 6 position is issued while a 5 position revolving nosepiece is used an illegal parameter error will occur 3 Even when multipl...

Страница 38: ...re added after any response Command Type Description Response Result Description Unit Presence 1UNIT Functions 1 Checks if units are connected to the MX61 61L Command descriptions 1UNIT Query Check th...

Страница 39: ...the remote mode to local mode until the microscope is turned OFF Command descriptions 1FPV ON Request Setting the anti glare setting in darkfield observation only 1FPV Setting is complete 1FPV E01120...

Страница 40: ...command A string was sent after a query command Re check the command to be sent E01511 Command System Busy The 1LOG IN command was sent in the middle of operation of a motorized module The 1LOG IN co...

Страница 41: ...rts rotation when MOVE R or MOVE L is set to L As the chattering processing is used for signal detection the retention period of L should be at least 0 1 s Since the L signal is not accepted during ro...

Страница 42: ...n oil 8 cc 50 cc 500 cc Bulb Burner Model Average Life Halogen bulb 12V100WHAL L Long life type PHILIPS 7724 2000 hrs 12V100HAL High resolution type PHILIPS 7023 50 hrs Mercury burner USH 103OL USHIO...

Страница 43: ...upling Table 1 Certified Cord A power supply cord should be certified by one of the agencies listed in Table 1 or comprised of cordage marked with an agency marking per Table 1 or marked per Table 2 T...

Страница 44: ...ter sterreichischer Verband f r Elektrotechnik VE Danmarks Elektriske Materialkontroll DEMKO National Standards Authority of Ireland NSAI Norges Elektriske Materiellkontroll NEMKO Asociacion Electrote...

Страница 45: ...MEMO...

Страница 46: ...MEMO...

Страница 47: ......

Страница 48: ...rg Germany One Corporate Drive Orangeburg NY 10962 U S A 2 8 Honduras Street London EC1Y OTX United Kingdom 31 Gilby Road Mt Waverley VIC 3149 Melbourne Australia 6100 Blue Lagoon Drive Suite 390 Miam...

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