CX21 MAINTENANCE MANUAL
CONTENTS
CHAPTER 1 MAINTENANCE PROCEDURE ........................................................................ 1
1.
Maintenance of Microscope............................................................................................ 1
2.
Guide to Maintenance .................................................................................................... 2
2-1 Overview of maintenance....................................................................................... 2
2-2 Cleaning method for the optical components.......................................................... 3
3.
Preparing for Inspection ................................................................................................. 6
4.
CX21 Inspection Sheet................................................................................................... 7
CHAPTER 2 INSPECTION PROCEDURE............................................................................. 8
1.
Checking Performance of Microscope............................................................................ 8
2.
Checking Dirty Portion.................................................................................................... 8
2-1 Image influence caused by dirt on each component ............................................... 8
2-2 How to find dirty portion through observation.......................................................... 9
2-3 How to check cleaning condition .......................................................................... 10
CHAPTER 3 REPAIR PROCEDURE.....................................................................................11
1.
Optical Adjustment ........................................................................................................11
2.
Mechanical Adjustment................................................................................................. 14
2-1 Preparation for the tension adjustment of X/Y-wire................................................ 14
2-2 Adjustment method for the tension of X-wire......................................................... 15
2-3 Adjustment method for the tension of Y-wire......................................................... 15
2-4 Final adjustment................................................................................................... 16
3.
Replacing Grease for Coarse/Fine Adjustment Knob Ass’y........................................... 17
4.
Replacing Circuit Board................................................................................................ 18
4-1 CX21 wiring diagram............................................................................................ 18
4-2 Replacement of circuit board / socket ................................................................... 18
5.
Replacing Pinion Ass'y of Plane Stage ......................................................................... 19
CHAPTER 4 JIGS AND TOOLS / GREASES ..................................................................... 20
1.
List of Jigs and Tools.................................................................................................... 20
2.
List of Greases............................................................................................................. 20
CHAPTER 5 MAINTENANCE PARTS ................................................................................... 1
1.
List of Maintenance Parts............................................................................................... 1
