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9
– Annex
45
Chapter 9
| Annex
Indications for calibrating the CTX 300 SC
This information relates to the
CTX 300
semiconductor.
P/N
Gas types
Measurement
range
After sale service
standard gas
Test gas
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Methyl Chloride
CH
3
Cl
500 ppm
50 ppm CH
3
Cl
2000 ppm H
2
= 190
ppm ± 25ppm
Methylene chloride
CH
2
Cl
2
500 ppm
100 ppm CH
2
CL
2
100 ppm CO = 80ppm
± 15 ppm
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Trichloroethylene
C
2
HCl
3
500 ppm
75 ppm
Trichloroethylene
300 ppm CO = 120
ppm ± 35ppm
Toluene
C
6
H
5
CH
3
2 000 ppm
100 ppm Toluene
300 ppm CO =
330ppm ± 50ppm
Xylene
C
6
H
4
(CH
3
)2
2 000 ppm
100 ppm Xylene
300 ppm CO =
330ppm ± 50ppm
Ethanol
C
2
H
5
OH
5 000 ppm
1000 ppm Ethanol
1000ppm H
2
= 880ppm
± 150ppm
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Freon R12
1 % volume
1000 ppm R12
0.5%CH4=overscale
Freon R22
2000 ppm
1000 ppm R22
0.5% CH4 = 750ppm ±
200ppm
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Freon R134A
2000 ppm
1000 ppm R134A
0.5% CH4 = 2000ppm
± 500ppm
Freon R11
1% volume
1000 ppm R134A =
150 ppm
0.5% CH4=overscale
Freon R23
1% volume
1000 ppm R22 =
4500ppm
0.5% CH4 = 2800ppm
±800ppm
Содержание ctx 300
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