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GA02329_002_03 - 01/2010 - © Oerlikon Leybold Vacuum
Contents
Page
Important Safety Information
3
1 Description
5
1.1
Principle of operation
5
1.2
Technical characteristics
6
1.3 Accessories
8
1.4 Lubricants
8
2
Transport and Storing
9
2.1
Transport and packaging
9
2.2 Mounting
orientation
9
2.3 Storing
9
3
Installation
10
3.1
Setting up
10
3.2
Electrical connections
11
3.3 Oil
filling
12
4
Operation
13
4.1 Operation
13
4.2
Working in cycles in / out
14
4.3
Switching off / Shutdown
14
5
Maintenance
15
5.1 Safety
Information
15
5.2 Maintenance
Intervals
15
5.3
Oerlikon Leybold Vacuum Service
16
5.4
Maintenance Work
16
6 Troubleshooting
18
7 Spare
parts
20
EC Conformance Declaration
24
Declaration of Contamination of Compressors,
Vacuum Pumps and Components
25