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Oerlikon Leybold Vacuum PENNINGVAC PTR 90, Руководство по эксплуатации

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Installation 

GA09313_0202 – (2008-02) – 

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 Oerlikon Leybold Vacuum

 

9 

3 Installation 

3.1 Vacuum 

Connection 

DANGER

DANGER: overpressure in the vacuum system >1 bar 

Injury caused by released parts and harm caused by escaping process 
gases can result if clamps are opened while the vacuum system is 
pressurized. 

Do not open any clamps while the vacuum system is pressurized. Use 
the type of clamps which are suited to overpressure. 

DANGER

DANGER: overpressure in the vacuum system >2.5 bar 

KF flange connections with elastomer seals (e.g. O-rings) cannot with-
stand such pressures. Process media can thus leak and possibly 
damage your health. 

Use O-rings provided with an outer centering ring. 

DANGER

DANGER: protective ground 

Products that are not professionally connected to ground can be 
extremely hazardous in the event of a fault. 

The transmitter must be electrically connected to the grounded 
vacuum chamber. The connection must conform to the requirements 
of protective connection according to EN 61010: 

•

CF connections fulfill this requirement.

•

For transmitters with KF connections, use a conductive metallic
clamping ring.

Caution

Caution: vacuum component 

Dirt and damages impair the function of the vacuum component. 

When handling vacuum components, take appropriate measures to 
ensure cleanliness and prevent damages. 

Caution

Caution: dirt sensitive area 

Touching the product or parts thereof with one's bare hands increases 
the desorption rate. 

Always wear clean, lint-free gloves and use clean tools when working 
in this area. 

Содержание PENNINGVAC PTR 90

Страница 1: ...PENNINGVAC PTR 90 Operating Manual GA09313_0202 Part Numbers 230 070 230 071 230 072 ...

Страница 2: ... They apply to transmitters with other vacuum connections by analogy We reserve the right to make technical changes without prior notice All dimensions in mm Intended Use The PENNINGVAC Transmitter PTR 90 has been designed for vacuum measure ment in the pressure range of 5 10 9 1000 mbar The transmitter must not be used for measuring flammable or combustible gases which react in air It can be oper...

Страница 3: ...rlikon Leybold Vacuum Controller 12 3 2 2 Use With Another Control Device 12 4 Operation 13 4 1 Principle Measuring Behavior 13 5 Deinstallation 15 6 Maintenance 16 6 1 Adjusting the Transmitter 16 6 2 Cleaning the Transmitter Replacing Parts 18 6 2 1 Disassembling the Transmitter 18 6 2 2 Cleaning the Transmitter 19 6 2 3 Reassembling the Transmitter 20 6 3 Troubleshooting 22 7 Accessories 23 8 S...

Страница 4: ... process media used Consider possible reactions between the materials 7 and the process media Consider possible reactions e g explosion of the process media due to the heat generated by the product Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document Before beginning to work find out whether a...

Страница 5: ...information in this document use the product in a non conforming manner make any kind of interventions modifications alterations etc on the product use the product with accessories not listed in the product documentation The end user assumes the responsibility in conjunction with the process media used Transmitter failures due to contamination as well as expendable parts filament are not covered b...

Страница 6: ...ced to supply common Status pin 6 p 10 2 mbar Pirani only mode Low 0 V p 10 2 mbar Cold cathode not ignited Pirani only mode Low 0 V p 10 2 mbar Cold cathode ignited Combined Pirani cold cathode mode High 15 30 VDC LED High voltage on LED on Supply DANGER The transmitter may only be connected to power supplies instruments or control devices that conform to the requirements of a grounded extra low ...

Страница 7: ...afety 50 V accuracy 10 V Supply common signal common conducted separately Materials exposed to vacuum Vacuum connection Measurement chamber Feedthrough isolation Internal seals Anode Ignition aid Pirani measurement tube Pirani filament stainless steel stainless steel ceramic FPM Mo stainless steel Ni Au W Mounting orientation any Internal volume 20 cm Pressure 10 bar absolute limited to inert gase...

Страница 8: ...ata 8 GA09313_0202 2008 02 Oerlikon Leybold Vacuum Dimensions mm 110 18 ø 63 5 28 55 DN 25 ISO KF 60 75 116 18 5 24 ø 63 5 28 55 DN 40 CF F DN 40 ISO KF 110 5 60 75 Weight 230 070 230 071 230 072 700 g 720 g 980 g ...

Страница 9: ...uter centering ring DANGER DANGER protective ground Products that are not professionally connected to ground can be extremely hazardous in the event of a fault The transmitter must be electrically connected to the grounded vacuum chamber The connection must conform to the requirements of protective connection according to EN 61010 CF connections fulfill this requirement For transmitters with KF co...

Страница 10: ...ber preferably choose a horizontal to upright position and possibly use a seal with a centering ring and filter If adjustment should be possible after the transmitter has been installed be sure to install it so that potentiometers HV and ATM can be accessed with a screwdriver Adjusting the Transmitter Procedure Remove the protective lid and install the product at the vacuum system When making a CF...

Страница 11: ...ead screw 3 on the magnet unit 4 and remove the magnet unit The magnetic force and the tendency to tilt make it difficult to separate the magnet unit and the measuring chamber 7 d Make the flange connection between the transmitter and the vacuum system e Remount the magnet unit and lock it with the hexagon head screw 3 f Carefully mount the electronics unit 2 Make sure the pin of the Pirani ele me...

Страница 12: ...ransmitter to the controller using a sensor cable 3 2 2 Use With Another Control Device n Make a sensor cable according to the following diagram Electrical connection Pin 1 Supply 15 30 VDC Pin 2 Supply common Pin 3 Signal output measuring signal Pin 4 Identification Pin 5 Signal common Pin 6 Status Pin 7 8 n c 8 poles FCC 68 1 8 10 10 Ident 3 5 4 1 2 6 10 k Signal o Connect the transmitter to the...

Страница 13: ...it and is activated only at pressures 1 10 2 mbar The status output pin 6 indicates the current status of the transmitter Pressure Green lamp on the transmitter Operating mode Pin 6 p 1 10 2 mbar Pirani only mode Low 0 V p 1 10 2 mbar Cold cathode not ignited Pirani only mode Low 0 V p 1 10 2 mbar Cold cathode ignited Combined Pirani cold cathode mode High 15 30 VDC As long as the cold cathode mea...

Страница 14: ...e severe conta mination as well as reduced up time and maintenance cycles With constantly low pressures p 1 10 6 mbar the transmitter can be operated for more than one year without cleaning cleaning the transmitter 18 Contamination of the transmitter generally causes a deviation of the measured values In the high pressure range 1 10 3 mbar 0 1 mbar the pressure reading is too high contamination of...

Страница 15: ...component When handling vacuum components take appropriate measures to ensure cleanliness and prevent damages Caution Caution dirt sensitive area Touching the product or parts thereof with one s bare hands increases the desorption rate Always wear clean lint free gloves and use clean tools when working in this area Procedure n Vent the vacuum system o Put the transmitter out of operation and unplu...

Страница 16: ...rate Always wear clean lint free gloves and use clean tools when working in this area 6 1 Adjusting the Transmitter The transmitter is factory calibrated If used under different climatic conditions through extreme temperatures aging or contamination and after exchanging the sensor the characteristic curve can be offset and readjustment may become necessary The cold cathode measurement circuit whic...

Страница 17: ...ans of a 1 5 mm screwdriver to 4 20 V or to 5 10 4 mbar After that turn the potentiometer counter clockwise by 1 3 of a turn s Vent the transmitter with air or nitrogen to atmospheric pressure and wait at least 10 minutes t Turn the nameplate clockwise until the mechanical stop is reached u Using the 1 5 mm screwdriver adjust the ATM potentiometer to 8 60 V or to 1 10 3 mbar v Turn the nameplate b...

Страница 18: ...leaning agents We recommend replacing the Pirani element when cleaning the trans mitter Tools material required Allen wrench AF 1 5 Allen wrench AF 3 Open end wrench AF 7 Pliers for circlip Polishing cloth 400 grain or Scotch Brite Tweezers Cleaning alcohol Mounting tool for ignition aid Ignition aid Pirani element 13 incl FPM seal 13a FPM seal 11 for anode feedthrough 6 2 1 Disassembling the Tran...

Страница 19: ...ts in this order without exerting stress on the Pirani element 13 pressure piece 9 complete anode 10 FPM seal 11 incl support ring 12 Pirani element 13 incl FPM seal 13a The parts can now be cleaned or replaced individually 6 2 2 Cleaning the Transmitter Cleaning the measuring chamber and the polarity insert n Using a polishing cloth rub the inside walls of the measuring chamber and the polarity i...

Страница 20: ...ani element section 6 2 3 Replacing the Pirani element If it is severely contaminated or defective n Slide a new FPM seal 13a over the Pirani element 13 and insert it into the corresponding groove o Mount the Pirani element section 6 2 3 6 2 3 Reassembling the Transmitter n Insert the FPM seal 11 with the support ring 12 centered into the measuring chamber 7 The sealing surface seal and ceramic pa...

Страница 21: ...t max eccentricity 0 5 mm v If possible perform a leak test leak rate 10 9 mbar l s WARNING WARNING electric arcing Helium may cause electric arcing with detrimental effects on the electronics of the product Before performing any tightness tests put the product out of operation and remove the electronics unit w Mount the magnet unit 4 and lock it with the screw 3 Carefully mount the electronics un...

Страница 22: ...thode dis charge has not ignited Wait until the gas dis charge ignites in case of contamination with insu lation layers the cold cathode may completely fail to ignite Cleaning 18 The transmitter has only been activated at p 3 10 9 mbar Slightly increase the pressure Measuring signal continu ally 5 V or display 10 3 mbar although vacuum pressure is OK Pirani measuring circuit not adjusted e g due t...

Страница 23: ...nd ordering number according to the spare parts list Pos Description Ordering number 12 13a 11 10a Maintenance kit consisting of 1 support ring 1 O ring FPM ø3 69 1 78 1 O ring FPM ø10 82 1 78 3 ignition aid 240 011 13 12 13a 11 10a 10 Repair kit consisting of 1 Pirani element 1 support ring 1 O ring FPM ø3 69 1 78 1 O ring FPM ø10 82 1 78 3 ignition aid 1 anode complete 240 010 10a Set of ignitio...

Страница 24: ...s returned to Oerlikon Leybold Vacuum should preferably be free of harmful substances Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly com pleted declaration of contamination 30 Products that are not clearly declared as free of harmful substances are de contaminated at the expense of the customer Products not accompanied by a duly completed...

Страница 25: ...thereof mechanical and electric components operating fluids etc can be detrimental to the environment Dispose of such substances in accordance with the relevant local regulations Separating the components After disassembling the product separate its components according to the following criteria Contaminated components Contaminated components radioactive toxic caustic or biological hazard etc must...

Страница 26: ...rr V 6 875 11 46 Pa V 5 6 9 333 where p pressure U measuring signal c d constants pressure unit dependent valid in the range 5 10 9 mbar p 3 8 10 9 Torr p 5 10 7 Pa p 1000 mbar 750 Torr 1 10 5 pa Conversion curves 1E 04 1E 02 1E 00 1E 02 1E 04 1E 06 1E 08 0 0 0 5 1 5 2 5 3 5 4 5 5 5 6 5 7 5 8 5 9 5 10 5 sensor error underrange sensor error overrange Pa mbar torr Measuring signal U V Pressure p ...

Страница 27: ...2 3 8 4 4 5 0 5 6 6 2 6 8 7 4 8 0 8 6 5 0 10 9 1 0 10 8 1 0 10 7 1 0 10 6 1 0 10 5 1 0 10 4 1 0 10 3 1 0 10 2 0 1 1 0 10 100 1000 3 8 10 9 7 5 10 9 7 5 10 8 7 5 10 7 7 5 10 6 7 5 10 5 7 5 10 4 7 5 10 3 7 5 10 4 0 75 7 5 75 750 5 0 10 7 1 0 10 6 1 0 10 5 1 0 10 4 1 0 10 3 1 0 10 2 0 1 1 0 10 100 1000 1 0 104 1 0 105 8 6 9 5 Overrange 9 5 10 5 Measuring system error Pirani defective ...

Страница 28: ...Ne Air N2 O2 CO 10 3 2 4 6 10 2 10 1 100 101 102 8 2 4 6 8 2 4 6 8 2 4 6 8 2 4 6 8 Water vapor peff mbar Indication range above 10 2 mbar Xe Kr Ar CO2 Freon 12 Indication range 10 6 0 1 mbar Pressure reading transmitter calibrated for air 6 4 2 6 4 2 6 4 2 10 4 8 6 4 2 10 6 2 4 6 10 5 10 4 Ar 10 5 8 6 4 2 10 6 8 2 4 6 8 2 4 6 2 4 6 2 4 6 10 3 8 10 2 8 10 1 8 10 3 8 10 2 8 10 1 8 peff mbar p mbar I...

Страница 29: ...ure can be determined by means of a simple conversion formula peff C pressure reading where Gas type C Air O2 CO N2 1 0 Xe 0 4 Kr 0 5 Ar 0 8 H2 2 4 Ne 4 1 He 5 9 These conversion factors are average values A mixture of gases and vapors is often involved In this case accurate determination is only possible with a partial pressure measurement instrument e g a quadrupole mass spectrometer ...

Страница 30: ...e please mark Repair chargeable warranty Adress Exchange chargeable warranty exchange already arranged received Person to contact Return only rent loan for credit Phone Fax Calibration DKD Factory calibration End user Quality test certificate DIN 55350 18 4 2 1 A Description of the Leybold product Failure description Material description Catalog number Additional parts Serial number Application To...

Страница 31: ...Notes GA09313_0202 2008 02 Oerlikon Leybold Vacuum 31 ...

Страница 32: ...les vacuum ba oerlikon com Service Phone 34 93 666 49 51 Fax 34 93 685 40 10 Sweden Oerlikon Leybold Vacuum Scandinavia AB Box 9084 SE 40092 Göteborg Sales and Service Phone 46 31 68 84 70 Fax 46 31 68 39 39 info vacuum gt oerlikon com Visiting delivery adress Datavägen 57B SE 43632 Askim Switzerland Oerlikon Leybold Vacuum Schweiz AG Leutschenbachstrasse 55 CH 8050 Zürich Sales Tel 41 44 308 40 5...

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