Oerlikon Leybold Vacuum PENNINGVAC PTR 90, Руководство по эксплуатации

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Appendix
GA09313_0202 – (2008-02) –
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Oerlikon Leybold Vacuum 27
Conversion table
Measuring
signal U
[V]
[mbar]
Pressure p
[Torr] [Pa]
<0.5 Measuring system error
0.5 … 1.82 Underrange
1.82
2.0
2.6
3.2
3.8
4.4
5.0
5.6
6.2
6.8
7.4
8.0
8.6
5.0×10
-9
1.0×10
-8
1.0×10
-7
1.0×10
-6
1.0×10
-5
1.0×10
-4
1.0×10
-3
1.0×10
-2
0.1
1.0
10
100
1000
3.8×10
-9
7.5×10
-9
7.5×10
-8
7.5×10
-7
7.5×10
-6
7.5×10
-5
7.5×10
-4
7.5×10
-3
7.5×10
-4
0.75
7.5
75
750
5.0×10
-7
1.0×10
-6
1.0×10
-5
1.0×10
-4
1.0×10
-3
1.0×10
-2
0.1
1.0
10
100
1000
1.0×10
4
1.0×10
5
8.6 … 9.5 Overrange
9.5 … 10.5 Measuring system error (Pirani defective)