Technical Data
6
GA09313_0202 – (2008-02) –
¤
Oerlikon Leybold Vacuum
2 Technical
Data
Measurement range (Air, N
2
)
5×10
-9
… 1000 mbar
Accuracy (N
2
)
≈
±30%
in the range 1×10
-8
… 100 mbar
Repeatability
≈
±5%
in the range1×10
-8
… 100 mbar
Gas type dependence
→
28
Output signal (measuring signal)
Voltage range
0 … +10.5 V
Measurement range
1.82 … 8.6 V
Voltage vs. pressure
logarithmic , 0.6 V / decade (
→
26)
Error signal
<0.5 V no supply
>9.5 V Pirani sensor defective
(filament
rupture)
Output impedance
2×10
Ω
Minimum loaded impedance
10 k
Ω
, short-circuit proof
Response time (pressure dependent)
p > 10
-6
mbar
p = 10
-8
mbar
<
10 ms
≈
1000 ms
Identification transmitter
85 k
Ω
, referenced to supply common
Status
pin 6
p > 10
-2
mbar
Pirani-only mode
Low = 0 V
p < 10
-2
mbar
Cold cathode not ignited
Pirani-only mode
Low = 0 V
p < 10-2 mbar
Cold cathode ignited
Combined Pirani / cold cathode
mode
High = 15 … 30 VDC
LED
High voltage on (LED on)
Supply
DANGER
The transmitter may only be connected to power supplies, instruments
or control devices that conform to the requirements of a grounded
extra-low voltage (SELV-E according to EN 61010). The connection to
the transmitter has to be fused
1)
.
Voltage at the transmitter
15 … 30 VDC (ripple
≤
1 V
pp
)
Power consumption
≤
2 W
Fuse
1)
≤
1 AT
The minimum voltage of the power supply unit must be increased proportionally to
the length of the sensor cable.
Voltage at the supply unit with maxi-
mum cable length
16 … 30 VDC (ripple
≤
1 V
pp
)
1)
Oerlikon Leybold Vacuum controllers fulfill these requirements.
