Nikon ECLIPSE L200ND / ECLIPSE L200N, Инструкция по эксплуатации

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3 Operation of Each Part
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IC Inspection Microscope ECLIPSE L200ND / L200N Instructions
3.2 Coarse / fine focus knobs
3.2.1 The relationship between the focus knob rotation and the stage vertical movement
The relationship between the direction of the focus knob rotation and the stage vertical
movement is shown in the figure.
Turn the focus knobs in
the direction indicated
by the arrows to lower
the stage.
Figure-11 Relationship between the focus knob rotation and the stage vertical movement
•
The stage moves 0.1 mm by one full rotation of the fine focus knob.
• The stage moves 1 μ m by one step of the fine focus knob graduations.
•
The stroke (range) of the stage vertical movement is 29 mm.
Note: When performing observation with the combination of the 8
×
8 stage, 8 inch
wafer holder, and 0.7 mm thick wafer, the stage vertical movement range is 16.2
mm up and 12.8 mm down from the focal plane.
Reference: Never attempt either of the following actions. They will damage the microscope.
•
Rotating the left and right knobs in opposite directions at the same time.
•
Continuing to rotate the coarse focus knob after the stage has reached the
limit of its motion.
3.2.2 Adjusting the torque of the coarse focus knobs
The torque of the coarse focus knobs can be adjusted using the torque adjustment ring at
the base of the right coarse focus knob.
Coarse torque
adjustment ring
To increase the torque
Figure-12 Adjusting the torque of the coarse focus knobs