EDH0211En1051 — 12/18
4
IMS-V Series High-Performance Linear Stages for Vertical Use
3.2
Mechanical Specifications
CAUTION
To reach specifications stated, stages must be fixed on a plane surface
with a flatness of 5 µm.
3.3
Load Specification Definitions
(Depends on the Controller)
CAUTION
To go over the indicated speed in accordance with the
payload may damage the stage mechanism.
Axial Load Capacity (±Cx)
Maximum load along the direction of the drive train.
Off-Centered Load (Q)
Maximum cantilever-load a stage can move: Q
V
≤
1500 ÷ (1 + D/90), but not
greater than Cx Max.
D:
Cantilever distance.
G
U
AR
ANTE
E
D
S
P
E
CIFICATIO
N
S
IMS100V
IMS300V
Travel Range (mm) 100
300
Minimum Incremental Motion (µm) 0.3 µm with XPS,
0.6 µm with ESP301 or SMC100CC
Uni-directional Repeatability, Typical (Guaranteed) (µm) ±0.10 (±0.25)
±0.12 (±0.25)
Bi-directional Repeatability, Typical (Guaranteed)
(1)
(µm) ±0.15 (± 0.50)
±0.20 (± 0.50)
Accuracy, Typical (Guaranteed)
(1)
(µm) ±0.6 (±2.0)
±3.5 (±5.0)
Maximum Speed 20 mm/s with up to 100 N load
5 mm/s with higher loads
Pitch, Typical (Guaranteed)
(1) (2)
(µrad) ±15 (±50)
±35 (±125)
Yaw, Typical (Guaranteed)
(1) (2)
(µrad) ±10 (±38)
±20 (±75)
MTBF 20,000 h with 300 N load and with a 10% duty cycle
1)
For the definition of Typical and Guaranteed specifications see “Motion Basics Terminology & Standards” Tutorial
at www.newport.com
2)
To obtain arcsec units, divide µrad value by 4.8.
Payload (N)
100 400
Specified Speed
(1)
(mm/s) 20 5
Specified Acceleration (mm/s
2
) 80 20
1)
The variation of the speed is linear between 100 N and 400 N.
Load on Carriage (N)
Maximum Speed vs Payload
0
5
10
15
20
0
40
100
200
300
400
S
p
e
e
d
(
m
m
/s
)