MKS T3B Series, Инструкция к добавке

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15
Table 6: RS-232 Setup Messages (continued)
Description Command Request Response
Set Model Based
Parameters ST letter-value:
A = STA
D = STD
E = STE
F = STF
R60
R63
R64
R65
STA value
STD value
STE value
STF value
Sensor Signal Input
Range G value
value:
0 = 1 V
1 = 5 V
2 = 10 V*
R35 G value
value
: 0 = 1 V
1 = 5 V
2 = 10 V
Analog Setpoint Range A value
value:
0 = 5 VDC
1 = 10 VDC*
R24 A value
value
: 0 = 5VDC
1 = 10VDC
Sensor Range LOW EL value
value: 00 = 0.1 Torr
01 = 0.2
02 = 0.5
03 = 1
04 = 2
05 = 5
06 = 10*
21 = 20
07 = 50
08 = 100
22 = 200
09 = 500
10 = 1000
11 = 5000
12 = 10000
13 = 1.33 mBar
14 = 2.66
15 = 13.33
16 = 133.3
17 = 1333
18 = 6666
19 = 13332
20 = 0.1333
23 = 0.001
R55
EL value
value
: 00 = 0.1 Torr
01 = 0.2
02 = 0.5
03 = 1
04 = 2
05 = 5
06 = 10
21 = 20
07 = 50
08 = 100
22 = 200
09 = 500
10 = 1000
11 = 5000
12 = 10000
13 = 1.33 mBar
14 = 2.66
15 = 13.33
16 = 133.3
17 = 1333
18 = 6666
19 = 13332
20 = 0.1333
23 = 0.001
* Initial setting
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