©Newport Corporation
MKS Spectra-Physics Confidential
1
of
11
Pre-Installation Guide
For all Spirit & HighQ-2
Laser Models
Spectra-Physics, Inc.
3635 Peterson Way
Santa Clara, CA 95054
April 2020
Страница 1: ...Newport Corporation MKS Spectra Physics Confidential 1 of 11 Pre Installation Guide For all Spirit HighQ 2 Laser Models Spectra Physics Inc 3635 Peterson Way Santa Clara CA 95054 April 2020...
Страница 2: ...Instruction Manuals 4 Laser Safety Considerations 4 Diagnostics 4 Pre Installation Considerations 5 Location and Environment 5 Physical Description 6 Utility Requirements 7 Computer Requirements 8 Pr...
Страница 3: ...d to carefully consider your operating environment prior to installation Proper water power and room temperature are required for each system A checklist of pre installation considerations is provided...
Страница 4: ...ction Manuals Please read the manual to get vital information about your system Familiarize yourself with the system You are encouraged to spend as much time as possible reviewing the system component...
Страница 5: ...ons ambient room temperature changes may be an important factor for the laser system s performance Air ducts should not blow directly on laser or optical path E To ensure stable day to day operation t...
Страница 6: ...x 6 4 683 x 310 x 163 88 0 40 0 1040 8 SHG Laser Head 29 9 x 12 2 x 6 4 759 x 310 x 163 99 0 45 0 Power Supply 11 0 x 5 7 x 1 9 280 x 144 x 48 5 8 60 3 9 Chiller 15 7 x 19 0 x 10 5 400 x 483 x 267 68...
Страница 7: ...ments HighQ 2 Controller 100 240 VAC 50 60 Hz Current 2A Spirit One Power Supply 90 305VAC 47 63 Hz Current 10A Chiller HECR008 100 240VAC 50 60 Hz Current 10A Spirit 4 Spirit 8 Spirit 16 non HE Contr...
Страница 8: ...utilize the laser s built in GUI via direct connection to the Spirit head s ethernet port RJ 45 connector HighQ 2 Spirit One Spirit 4 Spirit 8 Spirit 16 Spirit 16HE Spirit 30HE Spirit graphical user i...
Страница 9: ...e the system on your work surface Two or more people may be required to lift some equipment Compare the packing list with your quotation Call your Spectra Physics office about any discrepancies Check...
Страница 10: ...ing The cleaner should be circulated for a minimum of 8 hours the longer the better if time permits in order to assure thorough cleaning Filters ALPS filter All models except HighQ 2 and Spirit One Wh...
Страница 11: ...ntifrogen L coolant solution will ensure a correct coolant level readout of the chiller Fill the chiller reservoir with a mixture of Antifrogen L and distilled water ratio 1 3 Do not use deionized wat...
