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MKS Granville-Phillips Mini-Convectron 275 series, Инструкция по эксплуатации

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6

Mini-Convectron Module with RS-485

Instruction Manual - 275545

ReaD Convectron pressure response  . . . . . . . . . . . . . . . . . .  30
Set Offset Address  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  30
Set span (typically at atmospheric pressure)   . . . . . . . . . . . .  31
Set zero (at or near vacuum)  . . . . . . . . . . . . . . . . . . . . . . . .  32
Set setpoint 2 trip point  . . . . . . . . . . . . . . . . . . . . . . . . . . . .  33
Set setpoint 1 trip point  . . . . . . . . . . . . . . . . . . . . . . . . . . . .  33
Read setpoint 2 trip point  . . . . . . . . . . . . . . . . . . . . . . . . . .  33
Read setpoint 1 trip point  . . . . . . . . . . . . . . . . . . . . . . . . . .  34
Read Mini-Convectron firmware version . . . . . . . . . . . . . . .  34
Set factory default  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  34
Set baud rate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  34
Set parity to 8 bits, none  . . . . . . . . . . . . . . . . . . . . . . . . . . .  35
Set parity to 7 bits, odd  . . . . . . . . . . . . . . . . . . . . . . . . . . . .  35
Set parity to 7 bits, even  . . . . . . . . . . . . . . . . . . . . . . . . . . .  35
Set frequency   . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  35
Reset module   . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  35
Set pressure units of measure   . . . . . . . . . . . . . . . . . . . . . . .  36
Read pressure units of measure  . . . . . . . . . . . . . . . . . . . . . .  36
Command – Response Timing . . . . . . . . . . . . . . . . . . . . . . .  36
RX, TX Timing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  37

Chapter 4 

Calibration  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

39

4.1 

Calibration  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  39
Vacuum Adjust  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  39
Atmosphere Adjust  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  40

4.2 

Use with Gases Other Than N

2

 and Air . . . . . . . . . . . . . . . .  40

Chapter 5 

Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

47

5.1 

General Information  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  47

5.2 

Guidelines   . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  47

5.3 

Mini-Convectron Disassembly   . . . . . . . . . . . . . . . . . . . . . .  47

5.4 

Symptoms and Possible Causes . . . . . . . . . . . . . . . . . . . . . .  48

5.5 

Returning a Mini-Convectron Module for Service  . . . . . . . .  50

Содержание Granville-Phillips Mini-Convectron 275 series

Страница 1: ...Granville Phillips Mini Convectron Module with RS 485 and Dual Process Relays Instruction Manual Instruction manual part number 275545 Revision C November 2016 Series 275 ...

Страница 2: ......

Страница 3: ...asurement Solutions MKS Instruments Inc Granville Phillips Division 6450 Dry Creek Parkway Longmont Colorado 80503 USA Tel 303 652 4400 Fax 303 652 2844 Email mks mksinst com MKS Corporate Headquarters MKS Instruments Inc 2 Tech Drive Suite 201 Andover MA 01810 USA Tel 978 645 5500 Fax 978 557 5100 Email mks mksinst com 2016 MKS Instruments Inc All rights reserved Granville Phillips and Convectron...

Страница 4: ...lange E NW40KF flange K 1 33 inch NW16CF ConFlat type flange F 2 75 inch NW35CF ConFlat type flange G Measurement Units Torr T mbar M pascal P Instruction Manual 20 275318 20 275507 EU 275507 EU 275527 EU 275528 EU 275529 EU 275530 EU 275531 EU 275532 EU 275533 EU 275534 EU 275535 EU 275536 EU 275546 EU 275546 EU 1 275585 EU 275546 Granville Phillips Mini Convectron Module with RS 485 and Dual Pro...

Страница 5: ... 17 2 3 Damaged Material 17 2 4 Important Precautions for Mini Convectron Installation 18 2 5 Gauge Tube Construction 19 2 6 Mounting Orientation and Physical Dimensions 20 Mounting Convectron Gauges 20 Environment 20 Location 21 2 7 Grounding 21 2 8 Gauge Mounts 21 Compression Mount Quick Connect 21 1 8 NPT Mount 21 NW or Flange Mount 21 ConFlat Flange 22 2 9 Dimensions 22 2 10 I O Connector Wiri...

Страница 6: ...ault 34 Set baud rate 34 Set parity to 8 bits none 35 Set parity to 7 bits odd 35 Set parity to 7 bits even 35 Set frequency 35 Reset module 35 Set pressure units of measure 36 Read pressure units of measure 36 Command Response Timing 36 RX TX Timing 37 Chapter 4 Calibration 39 4 1 Calibration 39 Vacuum Adjust 39 Atmosphere Adjust 40 4 2 Use with Gases Other Than N2 and Air 40 Chapter 5 Maintenanc...

Страница 7: ... safe service provided it is installed operated and serviced in strict accordance with these safety instructions These safety precautions must be observed during all phases of operation installation and service of this product Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of design manufacture and intended use of the instrumen...

Страница 8: ...e product does not operate normally even if you follow the operating instructions Adjust only those controls that are covered by the operation instructions Improper adjustment of other controls may result in damage and will often require extensive work by a qualified To reduce the risk of fire or electric shock do not expose this product to rain or moisture Objects and Liquid Entry Never push obje...

Страница 9: ...ety Check Upon completion of any service or repairs to this product ask the Qualified Service Person to perform safety checks to determine that the product is in safe operating order Finite Lifetime After ten years of normal use or even non use the electrical insulation in this product may become less effective at preventing electrical shock Under certain environmental conditions which are beyond ...

Страница 10: ...Relief and Discs Rupture Be aware that an electrical discharge through a gas may couple dangerous high voltage directly to an ungrounded conductor almost as effectively as would a copper wire connection A person may be seriously injured or even killed by merely touching an exposed ungrounded conductor at high potential This hazard is not unique to this product Install suitable devices that will li...

Страница 11: ... that grounding this product does not guarantee that other components of the vacuum system are maintained at Earth ground Complying with the usual warning to connect the power cable only to a properly grounded outlet is necessary but not sufficient for safe operation of a vacuum system with this or any similar high voltage producing product Verify that the vacuum port to which the Mini Convectron ...

Страница 12: ...sinst com or may be obtained by contacting an MKS Granville Phillips Customer Service Representative Do not operate in an explosive atmosphere Do not operate the product in the presence of flammable gases or fumes Operation of any electrical instrument in such an environment constitutes a definite safety hazard Do not use the product to measure the pressure of explosive or combustible gases or gas...

Страница 13: ...n RMA In some cases a hazardous materials disclosure form may be required The MKS Granville Phillips Customer Service Representative will advise you if the hazardous materials document is required When returning products to Granville Phillips be sure to package the products to prevent shipping damage Shipping damage on returned products as a result of inadequate packaging is the Buyer s responsibi...

Страница 14: ...is likely to cause harmful interference in which case the user will be required to correct the interference at his own expense If this equipment does cause harmful interference to radio or television reception which can be determined by turning the equipment off and on the user is encouraged to try to correct the interference by one or more of the following measures Reorient or relocate the receiv...

Страница 15: ... device incorporating Convectron gauge technology and electronics in a compact modular design The electronics and gauge are packaged in an all metal package that provides a rugged enclosure and a high level of immunity to electrical noise The Convectron gauge used in the module is field replaceable The Mini Convectron module is available in a variety of output configurations This instruction manua...

Страница 16: ...ro by reducing system pressure to below 1 x 10 5 Torr 1 x 10 4 to 1 300 mBar 1 0 2 to 130 KPa Ambient operating temperature range 4 to 40 C Bakeout temperature range non operating 85 C max IP Rating IP20 Digital interface RS 485 2 wire Baud rate 300 1200 2400 4800 9600 19200 default 38400 Data format 7 bits even parity 1 stop bit or 7 bits odd parity 1 stop bit or 8 bits no parity 1 stop bit Power...

Страница 17: ... correct for reasons other than shipping damage 2 2 International Shipments Inspect all material received for shipping damage Confirm that your shipment includes all material and options ordered If items are missing or damaged the carrier making delivery to the customs broker must be notified within 15 days of delivery If an airfreight forwarder handles the shipment and their agent delivers the sh...

Страница 18: ...e pressure in the tube should not exceed 1000 Torr Do not perform electrical continuity tests on the Mini Convectron tube with instruments applying voltages in excess of 1 volt when the tube is at vacuum or 5 volts when at atmospheric pressure Exceeding these voltages will damage the sensing element Keep the tube clean Do not remove the mounting port cover until you are ready to install the tube D...

Страница 19: ...nted inside the gauge tube envelope with the sensor All other resistors of the bridge are mounted upon the exterior electrical feedthrough pins of the gauge tube Pin 4 serves as an electrical terminal for construction of the compensating network R2 but no connection is made therefrom to the controller All materials have been chosen for ultra high vacuum service corrosion resistance and bakeability...

Страница 20: ...ssures above 1 Torr if the gauge axis is not horizontal Vibration causes convection cooling of the sensor and will result in high pressure readings Mount Mini Convectron Modules where they will not vibrate excessively Orient the gauge to prevent condensation of process vapors on the internal surfaces through line of sight access to its interior If vapor condensation is likely orient the port downw...

Страница 21: ...unded through its vacuum connection For safety you must either Add a separate ground wire or Shield the envelope to prevent human contact Ground the gauge envelope by using a metal hose clamp on the gauge connected by a 12 AWG minimum size copper wire to the grounded vacuum chamber 2 8 Gauge Mounts Compression Mount Quick Connect Do not use for positive pressure applications The gauge may be force...

Страница 22: ... surfaces To avoid contamination do not use nonmetal gaskets Finger tighten all bolts Use a wrench to continue tightening 1 8 turn at a time in crisscross order e g 1 4 2 5 3 6 4 until all flanges are in contact After contact further tighten each bolt about 1 16 turn 2 9 Dimensions Dimensions are in cm in All dimensions are nominal For tolerances contact the Granville Phillips Customer Service Dep...

Страница 23: ... inch quick connect weld 2 5 cm 1 0 in VCR type female fitting 1 4 inch VCR type female fitting 1 2 inch VCR type female fitting 3 0 cm 1 2 in 3 9 cm 1 4 in ConFlat type flange 1 33 inch NW16CF ConFlat type 2 75 inch NW35CF ConFlat type 3 8 cm 1 5 in 3 8 cm 1 5 in KF flange NW16KF flange NW25KF flange NW40KF flange 3 1 cm 1 2 in 3 1 cm 1 2 in 3 1 cm 1 2 in 5 No Connection 4 Power Ground 3 Power In...

Страница 24: ... there are no active drivers on the network To maintain the proper idle voltage state bias resistors must be applied to force the data lines to the idle condition Figure 2 5 illustrates the placement of bias resistors on a host computer for typical 5 volt and 24 volt systems Table 2 2 D type Connector Pin Descriptions Pin number Function Pin 1 RS 485 input Pin 2 RS 485 input Pin 3 Input power 11 V...

Страница 25: ...allation Mini Convectron Module with RS 485 25 Instruction Manual 275545 Safety Instructions Introduction Installation Operation Maintenance Calibration Figure 2 5 Bias Resistor Placement on Host Controller ...

Страница 26: ...26 Mini Convectron Module with RS 485 Instruction Manual 275545 ...

Страница 27: ...atures Figure 3 1 Front Panel Indicators and Address Selector Table 3 1 Front Panel Features Front panel feature Function P 100 mTorr Indicator A red light emitting diode is used as a rough pressure indicator The LED will be OFF below 100 milliTorr and gradually illuminates as pressure increases Power Indicator A green light emitting diode is on when power is applied and the microprocessor is work...

Страница 28: ...n All data fields responses will contain 13 characters uppercase alpha characters The commands are of various character lengths A response of 01_SYNTX_ER CR is caused by an incorrect character string sent from the host or when the syntax is not recognized by the module RS 485 Address Switch Settings The address switch sets the base module address The address switch ranges from 0 to 15 00 Hex 0F He...

Страница 29: ...rite Confirm or state SH Set setpoint 2 Write Confirm SL Set setpoint 1 Write Confirm RH Read setpoint 2 Read Setpoint 2 On value RL Read setpoint 1 Read Setpoint 1 On value VER Read firmware revision Read Firmware revision FAC Set factory default Write Confirm SB Set baud rate Write Confirm SPN Set parity to 8 bits none Write Confirm SPO Set parity to 7 bits odd Write Confirm SPE Set parity to 7 ...

Страница 30: ...set by the TZ command The number received at vacuum will fluctuate under normal operation but if it reads negative consistently calibration may be required See Another possible response from RD is 01_DEF_SNSR There are three possible causes for this response 1 Defective transducer see Chapter 5 2 Pressure much higher than 1000 Torr 3 Gases other than nitrogen in system Atmosphere pressure of heliu...

Страница 31: ...amination which may cause readout error to increase between TZ and TS settings If 01_OFST_LIM CR was received while setting TZ this response may occur 01_LO_ATM_V CR Transducer output voltage is lower than it should be Similar to HI_ATM_V 01_GAIN_LIM CR Gain programmed at limit Readout errors will occur even at TS setting 01_DEF_SNSR CR Sensor defect no change in programming see maintenance sectio...

Страница 32: ...may be tube contamination which may cause readout error to increase between TZ and TS settings 01_LO_VAC_V CR Transducer output voltage is lower than it should be Similar to HI_VAC_V 01_OFST_LIM CR Offset programmed at limit Readout errors will occur even at TZ setting 01_DEF_SNSR CR Sensor defect no change in programming see maintenance section 01_RANGE_ER CR Command error TZ must be set below 1 ...

Страница 33: ... of Convectron bridge voltage This corresponds to 10 TORR at atmosphere and 1 mTorr near vacuum In the example here if the host sets the OFF point to 1 01E 01 TORR the ON point will automatically change to 9 80E 02 The response will be 01 MIN HYS SH SH may be set for the same pressure If this is done the second SH_ command will determine the relay logic SH sent last will generate a MIN HYS respons...

Страница 34: ...CR From Mini Convectron 01_PROGM_OK CR Notes This can be used when a Mini Convectron is not responding properly Cycle power or send RST after doing this function FAC will cause default communication and transducer parameters to be programmed Base Address 01 Zero and span are set to default values A D sample frequency is set to 60 Hz Baud rate 19200 Data format 8 bits no parity 1 stop bit SB Set ba...

Страница 35: ...ency Example From host 01SF10 CR From Mini Convectron 01_PROGM_OK CR Notes This is the frequency in Hz that the A D samples the transducer voltage This can be programmed to reject line frequency noise or noise caused by mechanical vibration The allowable sample frequency range is 2 to 120 Hz The pressure update rate is dependent on sample frequency Pressure update sample frequency 6 For a sample f...

Страница 36: ...the unit of measure where M mBar P pascal and T Torr RU Read pressure units of measure Example From host 01RU CR From Mini Convectron 01 MBAR CR or 01 PASCAL CR or 01 TORR CR Command Response Timing The speed of the response from the Mini Convectron varies depending on the type of command being carried out The Mini Convectron will shut off its driver H 80US after sending data to host The times ind...

Страница 37: ...uctions Introduction Installation Operation Maintenance Calibration RX TX Timing DATA DATA RECEIVED TRANSMITTED T Baud rate T 38400 3 3 ms 19200 3 9 ms 9600 5 1 ms 4800 7 5 ms 2400 13 ms 1200 22 ms 300 79 ms Command type Time added to T FAC 105 MS RD 0 MS RST No response All others 17 MS ...

Страница 38: ...38 Mini Convectron Module with RS 485 Instruction Manual 275545 ...

Страница 39: ... for use with gases other than N2 and air If the tube becomes contaminated or does not read correctly the Mini Convectron can be calibrated by performing the following steps Always perform vacuum adjust before atmosphere adjust Atmosphere adjust will not effect vacuum setting but vacuum adjust will effect atmosphere setting Vacuum Adjust 1 Evacuate the system 2 If you know the pressure is less tha...

Страница 40: ...Mini Convectron gauges are supplied calibrated for N2 within the accuracy of the instrument With certain safety precautions the Mini Convectron gauge may be used to measure pressure of other gases Mini Convectron gauge tubes are thermal conductivity gauges of the Pirani type These gauges transduce gas pressure by measuring the heat loss from a heated sensor wire maintained at constant temperature ...

Страница 41: ...n gauge tube utilizes convection cooling to provide resolution superior to any other thermal conductivity gauge near atmospheric pressure of N2 and air Because convection effects are geometry dependent the true pressure vs indicated pressure curves for the Mini Convectron gauge tube are likely to be much different from curves for heat loss tubes made by others Therefore it is not safe to attempt t...

Страница 42: ...indicated pressure to the argon curve and then horizontally to the left to a true pressure of 250 Torr Thus 250 Torr argon pressure produces an indication of 10 Torr N2 equivalent Example 3 True to Indicated Pressure Conversion Assume you want to set a process control setpoint at a true pressure of 20 Torr of C02 On Figure 4 2 locate 20 Torr on the true pressure scale travel horizontally to the ri...

Страница 43: ...Installation Operation Maintenance Calibration Figure 4 1 Reading True Pressure Values 10 4 to 10 1 Torr Indicated pressure in Torr Nitrogen equivalent True pressure in Torr Mini Convectron gauge axis must be horizontal Pressure unit equivalents 1 μm Hg 1 mTorr 1 x 10 3 Torr 1000 μm Hg 1 Torr 1 mbar 100 pascal ...

Страница 44: ...75545 Figure 4 2 Reading True Pressure Values 10 1 to 1000 Torr True pressure in Torr Mini Convectron gauge axis must be horizontal Pressure unit equivalents 1 μm Hg 1 mTorr 1 x 10 3 Torr 1000 μm Hg 1 Torr 1 mbar 100 pascal Indicated pressure in Torr Nitrogen equivalent ...

Страница 45: ...Installation Operation Maintenance Calibration Figure 4 3 Reading True Pressure Values 10 1 to 1000 Torr True pressure in Torr Mini Convectron gauge axis must be horizontal Pressure unit equivalents 1 μm Hg 1 mTorr 1 x 10 3 Torr 1000 μm Hg 1 Torr 1 mbar 100 pascal Indicated pressure in Torr Nitrogen equivalent ...

Страница 46: ...46 Mini Convectron Module with RS 485 Instruction Manual 275545 ...

Страница 47: ...toms This listing of symptoms and possible causes is not complete but should be sufficient to solve most problems All possible causes of failure should be thoroughly explored before attempting any repair 5 2 Guidelines Since the Mini Convectron contains static sensitive electronic parts the following precautions must be followed when troubleshooting 1 Use a grounded conductive work surface 2 Use s...

Страница 48: ...th the gauge tube at atmospheric pressure and an ohmmeter which cannot apply more than 10 mA Pins 1 to 2 18 to 23 ohms Pins 2 to 3 50 to 60 ohms Pins 1 to 5 175 to 190 ohms If the resistance from pins 1 to 2 reads about 800 ohms the sensor wire in the gauge is broken Replace the gauge tube 2 Bridge amplifier failure All of this circuitry is located on the small PC board that the gauge tube plugs i...

Страница 49: ...roethylene perchloroethylene toluene or acetone is possible but it must be done very carefully so as not to damage the sensor a Hold the gauge with the main body horizontal and the port projecting upward at a 45 angle b Slowly fill the port with solvent using a standard wash bottle with the spout inserted in the port to the point where it touches the screen Let the solvent stand in the gauge for a...

Страница 50: ...us materials disclosure form may be required The MKS Granville Phillips Customer Service Representative will advise you if the hazardous materials document is required When returning products to Granville Phillips be sure to package the products to prevent shipping damage Shipping damage on returned products as a result of inadequate packaging is the Buyer s responsibility For Customer Service Tec...

Страница 51: ...40 Installation environment 20 grounding 21 location 21 Mini Convectron module 20 mounting 21 position 20 L Location for installation 21 M Maintenance returning a damaged module 50 Mini Convectron module mounting gauges 1 8 NPT mount 21 compression mount quick connect 21 ConFlat flange mount 22 NW16KF flange mount 21 Mounting gauges 21 1 8 NPT mount 21 compression mount quick connect 21 ConFlat fl...

Страница 52: ...ess switch settings 28 RS 485 commands 29 RS 485 wiring 24 S Safety 7 damage requiring service 8 instructions 7 Service guidelines 13 Setpoint 1 33 34 Setpoint 2 33 Span 31 Stop bit settings 28 Syntax address overview 28 System ground 11 T Troubleshooting 48 U Units of measure 36 V Vacuum adjust 39 W Warranty 12 ...

Страница 53: ... ...

Страница 54: ...mer Service Technical Support MKS Pressure and Vacuum Measurement Solutions MKS Instruments Inc Granville Phillips Division 6450 Dry Creek Parkway Longmont Colorado 80503 USA Tel 303 652 4400 Fax 303 652 2844 Email mks mksinst com MKS Corporate Headquarters MKS Instruments Inc 2 Tech Drive Suite 201 Andover MA 01810 USA Tel 978 645 5500 Fax 978 557 5100 Email mks mksinst com ...

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