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This Instruction Manual is for use with Granville-Phillips Series 274
Ionization Gauges. A list of applicable catalog numbers is provided
on the following page.

© 2014 MKS Instruments, Inc. All rights reserved.

Granville-Phillips

®

is a registered trademark of MKS Instruments, Inc. All other

trademarks and registered trademarks are the properties of their respective owners.

Granville-Phillips

®

Series 274 Bayard-Alpert

Type Ionization Gauges

Series 274

Instruction Manual

For Customer Service or Technical Support 24 hours per day,
7 days per week, every day of the year including holidays:
Phone: +1-800-227-8766 or +1-303-652-4691

MKS, Granville-Phillips Division

6450 Dry Creek Parkway
Longmont, CO 80503 USA

Phone:

1-303-652-4691 or 1-800-776-6543

FAX:

1-303-652-2844

Email:

[email protected]

Corporate Office
MKS Instruments, Inc.

2 Tech Drive, Suite 201
Andover, MA 01810 USA

Phone:

1-978-645-5500

www.mksinst.com

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Содержание Granville-Phillips 274 Series

Страница 1: ...Granville Phillips Series 274 Bayard Alpert Type Ionization Gauges Instruction Manual part number 274026 Revision B August 2014 Series 274 Instruction Manual...

Страница 2: ...Series 274 Tubulated and Nude Bayard Alpert type Ionization Gauges See Figure 2 1 on page 13 Theory of Operation on page 15 and Table 4 4 on page 28...

Страница 3: ...respective owners Granville Phillips Series 274 Bayard Alpert Type Ionization Gauges Series 274 Instruction Manual For Customer Service or Technical Support 24 hours per day 7 days per week every day...

Страница 4: ...log numbers for Granville Phillips Tubulated Glass and Nude Ionization Gauges Detailed information regarding the catalog numbers listed below is provided in Figure 2 1 on page 13 and Table 4 4 on page...

Страница 5: ...Inspection of Products 11 2 2 Vacuum System Connections 11 2 3 Electrical Connections 12 2 4 Grounding Requirements 12 Chapter 3 Operation 15 3 1 Theory of Operation 15 3 2 Filament Emission 17 3 3 P...

Страница 6: ...6 Ionization Gauge Instruction Manual 274026 Rev B...

Страница 7: ...s instruction manual explain the specific hazard that you must prevent or unsafe practice that you must avoid the potential result of your failure to prevent the specified hazard or avoid the unsafe p...

Страница 8: ...rt you to hazards or unsafe practices that could result in minor personal injury or property damage Each caution statement explains what you must do to prevent or avoid the potential result of the spe...

Страница 9: ...sure at a level considerably below that pressure which the system can safely withstand Do NOT use quick connects or other friction type connections where positive pressure such as backfilling operatio...

Страница 10: ...hock could then occur because of the high voltage between these exposed conductors and ground 1 8 Operation It is the installer s responsibility to ensure that the automatic signals provided by the pr...

Страница 11: ...gauge should be mounted as close as possible to the section of the vacuum chamber where pressure measurement is important Valves or other restriction between the gauge and the area where pressure meas...

Страница 12: ...to earth ground at all times Connect a heavy duty 12 AWG or larger ground wire from the ground lugs on the backs of the Power Supply and the Control Unit to your facility grounding electrode system T...

Страница 13: ...Gauges are electrically equivalent to other manufacturers but the pin geometry may be different Granville Phillips Nude Gauges catalog numbers 274022 274023 274028 and 274050 do not have a strain rel...

Страница 14: ...Chapter 2 14 Ionization Gauge Instruction Manual 274026 Rev B Figure 2 2 Series 274 Bayard Alpert Ion Gauge Connectors...

Страница 15: ...e is based on the ionization of the gas molecules by a constant flow of electrons The negative electrons are emitted at a well controlled selectable rate from a heated filament cathode and are acceler...

Страница 16: ...cs The recommended operating voltage potentials are Collector 0 V Grid 180 Vdc Filament 30 Vdc See the Operating Characteristics Charts for variations of these parameters Tungsten Helical Filament cat...

Страница 17: ...ffs on emission current are that high emission current gives better readout stability and sensitivity but more pumping if the gauge is clean and more outgassing if the gauge is contaminated Likewise l...

Страница 18: ...ose Figure 3 3 Operating Characteristics for Series 274 Bayard Alpert Gauges 3 4 X ray Limit The low end of the operating range of a B A gauge is determined by the X ray limit of this type of gauge Th...

Страница 19: ...deposits can generally be removed by degassing the electrodes 3 5 Degas Procedure The deposition of elements or compounds on exposed gauge surfaces can result from some processes such as sputtering o...

Страница 20: ...degassable nude gauges 274022 274023 274041 274042 274050 274057 and 274058 See the NUDE gauges listed in Figure 2 1 Tubulated glass gauges and nude gauges 274028 and 274043 can be degassed using eit...

Страница 21: ...indicator for pressures below 1 x 10 3 Torr More detailed information regarding the theory of operation for B A gauges is presented in the Operation Chapter of this Instruction Manual The low end of t...

Страница 22: ...sign permit operation to various orders of vacuum The nude type ionization gauges 274022 274023 274041 274042 274050 274057 and 274058 are suitable to 2 x 10 11 Torr Table 4 1 Operating Ranges of Baya...

Страница 23: ...ament to the grid and P is the pressure The glass envelope gauge tube and the I2R degassable nude gauge have K 10 Torr for nitrogen or air and the electron bombardment degassable nude gauge has K 25 T...

Страница 24: ...6 Rev B To convert the readout to a different gas the equation must also include KgasX tube 2 Most ion gauge controllers are designed for some calibrated set point of emission i_ The emission that cor...

Страница 25: ...Literature from NASA Technical Note TND5285 by Robert L Summers Lewis Research Center National Aeronautics and Space Administration Refer to this reference for further definition of these average valu...

Страница 26: ...Ionization Gauges UHV Nude B A Gauge EB Degas Nude B A Gauge I2R or EB Degas Tubulated B A Gauge I2R or EB Degas Nude ion gauge without cable connector strain relief Catalog numbers 274022 274023 and...

Страница 27: ...l thoria coated Iridium on replaceable assembly Thoria coated iridium on replaceable assembly Grid Refractory metals Refractory metals Refractory metals Overall Length 6 inch 152mm 4 125 inch 105mm 4...

Страница 28: ...ardous materials document is required When returning a products to Granville Phillips be sure to package the products to prevent shipping damage Circuit boards and modules separated from the gauge ass...

Страница 29: ...Instruction Manual part number 274026 Revision B August 2014...

Страница 30: ...port 24 hours per day 7 days per week every day of the year including holidays Phone 1 800 227 8766 or 1 303 652 4691 MKS Granville Phillips Division 6450 Dry Creek Parkway Longmont CO 80503 USA Phone...

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