MKS 651C, Инструкция по эксплуатации, Страница: 144 / 172

Command Reference Appendix F: Command and Request Reference
130
RS-232 Command Summary (Continued)
Command Function
I1 value Set softstart rate of set point A, value is % of full speed
I2 value Set softstart rate of set point B, value is % of full speed
I3 value Set softstart rate of set point C, value is % of full speed
I4 value Set softstart rate of set point D, value is % of full speed
I5 value Set softstart rate of set point E, value is % of full speed
I6 value Set softstart rate of analog set point, value is % of full
speed
I7 value Set softstart rate of open valve, value is % of full speed
I8 value Set softstart rate of close valve, value is % of full speed
P1 value Set low threshold for process limit 1
value is % of F.S.
P2 value Set high threshold for process limit 1
value is % of F.S.
P3 value
Set low threshold for process limit 2
value is % of F.S.
P4 value Set high threshold for process limit 2
value is % of F.S.
Z1 Zero the sensor
Z2 value Special zero
value is % F.S. of the base pressure reading
Z3 Remove the zero correction factors
Z4 Learn the zero of the analog set point. Assigns current
value of external analog set point to zero value. If the
current value of the analog set point is beyond
±
15% of
full scale, the controller ignores the command and does not
change the current zero value.
Table 26: RS-232 Command Summary
(Continued on next page)