Service and Maintenance
If the product requires service, contact the MKS
Technical Support Department at 1-303-652-4400 for
troubleshooting help over the phone.
If the product must be returned to the factory for service,
request a Return Material Authorization (RMA) from
MKS, which can be completed at https://
www.mksinst.com/service/servicehome.aspx. Do not
return products without first obtaining an RMA. In most
cases a hazardous materials disclosure form is required.
The MKS Customer Service Representative will advise
you if the hazardous materials document is required.
When returning products to MKS, be sure to package the
products to prevent shipping damage. Damaged
returned products as a result of inadequate packaging is
the Buyer's responsibility.
Customer Service / Technical Support
MKS Pressure and Vacuum Measurement Solutions
MKS Instruments, Inc.
6450 Dry Creek Parkway
Longmont, Colorado 80503 USA
Tel: 303-652-4400
Fax: 303-652-2844
Email: [email protected]
MKS Corporate Headquarters
MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, MA 01810 USA
Tel: 978-645-5500
Fax: 978-557-5100
Email: [email protected]
© 2017 MKS Instruments, Inc. All rights reserved.
Granville-Phillips
®
is a registered trademark, and mksinst
TM
is a trademark of MKS Instruments, Inc. All other trademarks
and registered trademarks are the properties of their respective
owners.
Quick Start Guide p/n 20002191-Rev. A
June 2017
Template p/n DR100019-Rev. F
