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MKS 270D, Инструкция по эксплуатации

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Chapter Four:  Operation

Additional Procedures for the 0.1 Torr Sensors

43

C. Turn the shaft an extra ½ turn in the same direction.

D. Turn the control back slowly until the same output just appears.

E. Carefully turn the shaft an additional ¹/

8 

 turn in the same direction.

This will center the pot in the middle of a step for maximum stability.

Note

The above method is the only method that accurately finds the center of a
wire.  The technique of turning the zero control shaft clockwise until it
shifts, turning it counterclockwise until it shifts, and positioning it
midway does not work properly.

5. Adjust the   

COARSE   

and   

FINE  

 zero controls on the 270 instrument to bring the display

(or output) to precisely zero.

When using the Fine control, you may need to down range the 270 instrument to the x0.1
range to make the final setting.  Do not use any other range settings.

Using a Low Range Pressure Sensor with the Remote Zero Option

If you are using a pressure sensor less than 1 Torr Full Scale and your 270 instrument is equipped
with the Remote Zero option, you should consult an MKS Service Center.  Your 270 instrument
may need to be modified.

Please refer to the back cover of this manual for a list of the authorized MKS Calibration and
Service Centers.

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Содержание 270D

Страница 1: ...underutilized and idle equipment along with credit for buybacks and trade ins Custom engineering so your equipment works exactly as you specify Critical and expedited services Leasing Rentals Demos I...

Страница 2: ...Accuracy Signal Conditioner Six Shattuck Road Andover MA 01810 2449 800 227 8766 or 978 975 2350 Fax 978 975 0093 E mail mks mksinst com Web site http www mksinst com Artisan Technology Group Quality...

Страница 3: ...ve and sole remedy of the purchaser for any breach by MKS of this warranty The purchaser before returning any equipment covered by this warranty which is asserted to be defective by the purchaser shal...

Страница 4: ...115817 P1 Rev E 7 98 MKS Type 270D High Accuracy Signal Conditioner Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 5: ...al including photocopying and recording or by any information storage or retrieval system except as may be expressly permitted in writing by MKS Instruments Inc Printed in the United States of America...

Страница 6: ...sur l appareil 10 Mesures de s curit et mises en garde 11 Informaci n sobre seguridad 13 S mbolos usados en el manual de instrucciones 13 S mbolos que aparecen en la unidad 14 Procedimientos y precau...

Страница 7: ...BCD Interface Signals 34 REMOTE DISPLAY HOLD Line 34 Data Ready Line 34 Enable Lines 34 Overranging Output on the 5 Digit Unit 270 5 35 MULTIPLEX Connector 36 Chapter Four Operation 37 How to Configur...

Страница 8: ...zing the Malfunction to the Cable or the Electronics Unit 50 Test B Localizing Malfunctions to the Electronics Unit 52 How to Recalibrate the 270 Unit 52 Appendix A Product Specifications 53 Index 55...

Страница 9: ...Table of Contents vi Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 10: ...ci n de los s mbolos que aparecen en la unidad 14 Table 5 RESPONSE Switch Settings 27 Table 6 REMOTE Connector J402 Pinout 28 Table 7 ACCESSORY Connector J401 Pinout 29 Table 8 HEAD Connector J403 Pin...

Страница 11: ...List of Figures and Tables viii Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 12: ...performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard It calls attention to an operating procedure practice or the like which if not correctly performe...

Страница 13: ...5020 Equipotentiality IEC 417 No 5021 Direct current IEC 417 No 5031 Alternating current IEC 417 No 5032 Both direct and alternating current IEC 417 No 5033 a Class ll equipment IEC 417 No 5172 a Thre...

Страница 14: ...grounded through the grounding conductor of the power cord To avoid electrical shock plug the power cord into a properly wired receptacle before connecting it to the product input or output terminals...

Страница 15: ...THE PROPER FUSE Use only a fuse of the correct type voltage rating and current rating as specified for your product DO NOT OPERATE IN EXPLOSIVE ATMOSPHERES To avoid explosion do not operate this prod...

Страница 16: ...EMUKEJVKIWPI W TRGTXGTNGV WPI H JTGP MCPP 8QTUKEJV Das Symbol VORSICHT weist auf eine Gefahrenquelle hin Es macht auf einen Bedienungsablauf eine Arbeitsweise oder eine sonstige Gegebenheit aufmerksam...

Страница 17: ...19 Rahmen oder Chassis IEC 417 Nr 5020 quipotentialanschlu IEC 417 Nr 5021 Gleichstrom IEC 417 Nr 5031 Wechselstrom IEC 417 Nr 5032 Wechselstrom und Gleichstrom IEC 417 Nr 5033 a Ger teklasse II IEC 4...

Страница 18: ...t da alle Sicherheitseinrichtungen voll funktionsf hig bleiben Wartung nur durch qualifizierte Fachleute Das Geh use des Instruments darf vom Bedienpersonal nicht ge ffnet werden Das Auswechseln von B...

Страница 19: ...Pr fvermerk einer zust ndigen Pr fstelle tragen z B VDE Semko oder SEV Richtige Stromquelle verwenden Dieses Produkt ist f r eine Stromquelle vorgesehen bei der die zwischen den Leitern bzw zwischen...

Страница 20: ...KQP KPEQTTGEVG QW FG PQP TGURGEV FGU EQPUKIPGU VVGPVKQP L indication ATTENTION signale un danger potentiel Elle est destin e attirer l attention sur une proc dure une utilisation une situation ou tout...

Страница 21: ...9 Masse IEC 417 No 5020 Equipotentialit IEC 417 No 5021 Courant continu IEC 417 No 5031 Courant alternatif IEC 417 No 5032 Courant continu et alternatif IEC 417 No 5033 a Mat riel de classe II IEC 417...

Страница 22: ...glages internes doivent tre effectu s uniquement par un personnel d entretien qualifi MISE LA TERRE DE L APPAREIL Cet appareil est mis la terre l aide du fil de terre du cordon d alimentation Pour vit...

Страница 23: ...imentation ou entre les conducteurs d alimentation et le conducteur de terre sup rieure celle sp cifi e dans le manuel UTILISATION D UN FUSIBLE APPROPRI Utiliser uniquement un fusible conforme au type...

Страница 24: ...UG EQTTGEVCOGPVG RQFT C ECWUCT NGUKQPGU C NQU GORNGCFQU 2TGECWEK P El s mbolo de PRECAUCI N indica un riesgo Pone de relieve un procedimiento pr ctica etc de tipo operativo que de no realizarse u obse...

Страница 25: ...C 417 N 5019 Caja o chasis IEC 417 N 5020 Equipotencialidad IEC 417 N 5021 Corriente continua IEC 417 N 5031 Corriente alterna IEC 417 N 5032 Corriente continua y alterna IEC 417 N 5033 a Equipo de cl...

Страница 26: ...eajustes internos deben efectuarlos nicamente t cnicos especializados PUESTA A TIERRA DEL INSTRUMENTO Este instrumento est puesto a tierra por medio del conductor de tierra del cable el ctrico Para ev...

Страница 27: ...entre los conductores de suministro o entre uno de los conductores de suministro y la puesta a tierra que el que se especifica en el manual USAR EL FUSIBLE ADECUADO Usar nicamente un fusible del tipo...

Страница 28: ...ument consists of power supplies an oscillator and the heater supply necessary to interface with the compatible MKS 300 Series or 600 Series pressure sensors The pressure can be read in mmHg mbar kPa...

Страница 29: ...ef description of the instrument and its functionality Chapter Four Operation describes how to use the Type 270 instrument and explains all the functions and features Appendix A Product Specifications...

Страница 30: ...nstrument to MKS please obtain an ERA Number Equipment Return Authorization Number from the MKS Calibration and Service Center before shipping The ERA Number expedites handling and ensures proper serv...

Страница 31: ...Customer Support Chapter One General Information 20 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 32: ...r from the MKS Service Center before shipping Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers Caution Only qualified individuals should pe...

Страница 33: ...250 7 6 for a braided shielded cable use part number CB250S 7 6 CB270 2 2 and CB 270 4 2 Connect the 270 to a 274 multiplexer unit both cables are required CB250 7 6 Connects the 270 to a 200 Series c...

Страница 34: ...from the 300 Series 398 Differential Sensor 391 Differential Sensor 390 Absolute Sensor 370 Absolute or Differential Sensor 317 Bakeable Fast Absolute Sensor 315 Bakeable Absolute or Differential Sens...

Страница 35: ...ption Caution Mount the Type 270 instrument in a location with sufficient air circulation to stay within the specified temperature range Insufficient air circulation could damage the instrument Genera...

Страница 36: ...ay to display the pressure readings The x10 3 and x10 6 Lamps Neither lamp is included on the displayless unit 270 0 The 270 5 unit contains the x10 3 lamp only The 270 4 unit has both lamps These lam...

Страница 37: ...level Use the NULL control to produce a zero reading on the front panel display or on an external readout using the DC output signal F S Full Scale C The F S control calibrates the gain of the 270 ins...

Страница 38: ...This switch controls power to the heaters The switch has two positions REG and OFF When the switch is in the REG position power is applied to the heaters in a sensor to maintain a preset temperature T...

Страница 39: ...ternal connection REMOTE Connector This 9 pin male Type D connector allows an external device to access the range selection circuits The three range selection inputs 1 0 1 and 0 01 along with a 10 0 V...

Страница 40: ...onnector pinout ACCESSORY Connector J401 Pinout Pin Number Description 1 DC Output Voltage 2 Remote Zero Trigger 3 Digital Common 4 x1 Range ID 5 x0 1 Range ID 6 x0 01 Range ID 7 5 V 8 DC Output Retur...

Страница 41: ...nput 8 Heater 9 13 V 10 13 V 11 No Connection 12 No Connection 13 Preamp 14 System Check 15 Oscillator Table 8 HEAD Connector J403 Pinout Power Entry Module This module contains the RFI power line fil...

Страница 42: ...ription Pin Number Description 1 No Connection 17 Enable Digit 1 2 No Connection 18 5 V 25 mA 3 Digital Ground 19 Hold 4 Digital Ground 20 Good Data 5 10000 21 Decimal 4P 6 No Connection 22 Decimal 3P...

Страница 43: ...42 800 34 Enable Reminder 43 Chan 1 ID 35 80 44 Decimal 1P 36 2 45 Decimal 0P 37 4000 46 Decimal 3P 38 4 47 Decimal 2P 39 2000 48 Decimal 1P 40 8 49 5 Volt Return 41 Enable Digit 3 50 Chan 2 ID Used o...

Страница 44: ...8 40000 8 800 29 10000 9 200 30 Polarity 10 80 31 100000 11 20 32 Enable BCD 12 8 33 400 13 2 34 100 14 No Connection 35 35 15 No Connection 36 10 16 No Connection 37 4 17 No Connection 38 1 18 5 V 25...

Страница 45: ...croseconds minimum to 2 milliseconds maximum Data Ready Line This line goes high when the data is valid and ready to read Enable Lines The BCD information is controlled by the enable lines The 4 digit...

Страница 46: ...strument overranges at 130 000 counts When the display reaches its maximum count it simply remains locked at that reading Be wary of readings greater than full scale on these ranges Note The BCD OVERR...

Страница 47: ...onnector Note The displayless unit 270 0 does not have a MULTIPLEX connector MULTIPLEX Connector J405 Pinout Pin Number Description Pin Number Description 1 No Connection 14 No Connection 2 10K 15 No...

Страница 48: ...roller The lower drawing shows the Type 270 instrument connected to a Type 274 multiplexer unit Type 270 Connected to an MKS Controller MKS Pressure Controller CB270 2 xx 300 600 Series Pressure Senso...

Страница 49: ...l heater circuit in the sensor There will be a small delay between the closing of this switch and the lighting of the HEATER lamp The lamp will turn on brightly and then after the sensor warms up the...

Страница 50: ...0 instrument Use the zero controls on the multiplexer unit to adjust the zero 14 Position the RANGE SELECT switch in the x1 position and adjust the NULL pot for a zero reading if necessary 15 Repeat s...

Страница 51: ...ver will flip open from left to right to expose the line voltage selector drum and the two fuse holders The two fuse holders are marked with up arrows Note that the cover is attached firmly so it requ...

Страница 52: ...E position 2 Apply the appropriate signal to select the desired range Table 12 lists the logic levels and the corresponding ranges Remote Range Logic Levels Range Remote Connector J402 Pin 3 Pin 4 x1...

Страница 53: ...nsor until the display or output is nearly zero The sensor control is located in a hole in the lower loop in the letter B in the word Baratron on the top of the sensor This control is a wirewound pot...

Страница 54: ...s not work properly 5 Adjust the COARSE and FINE zero controls on the 270 instrument to bring the display or output to precisely zero When using the Fine control you may need to down range the 270 ins...

Страница 55: ...Additional Procedures for the 0 1 Torr Sensors Chapter Four Operation 44 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 56: ...ur instrument please obtain an ERA Equipment Return Authorization Number before shipping The ERA Number expedites handling and ensures proper service of your instrument Please refer to the back cover...

Страница 57: ...Line Voltage Range Fuse Type 100 VAC 90 110 VAC 50 60 Hz 75 VA max 0 63A T 250 V 5x20 mm 120 VAC 108 132 VAC 50 60 Hz 75 VA max 0 63A T 250 V 5x20 mm 220 VAC 198 242 VAC 50 60 Hz 75 VA max 0 315A T 25...

Страница 58: ...the line voltage selector drum and the two fuse carriers The two fuse carriers are marked with up arrows Note that the cover is attached firmly so it requires a strong force on the screw driver to loo...

Страница 59: ...re Readings 1 Verify that all vacuum fittings are tight and that the sensor is properly pumped down Low range absolute sensors 100 mmHg and below will be overranged at atmospheric pressure 2 Connect a...

Страница 60: ...A on page 36 Does it pass Problem is in the sensor mechanics YES Problem may be the cable or the 270 Perform Test B on page 38 Does it pass Problem is in the 270 Place the RANGE SELECTOR in the Full S...

Страница 61: ...e DVM to check the voltages at the sensor end of the cable Refer to Table 14 for the appropriate voltage values Reference the DVM to pin H 2 Sensor Cable Voltage Check Sensor Cable Pin Number Voltage...

Страница 62: ...SELECT switch in the SYS CHK System Check position 6 Connect a short circuit across the 1K resistor and place the RANGE SELECT in the x0 01 position Adjust the COARSE zero control You should be able t...

Страница 63: ...in Voltage Function 13 12 to 13 Sensor electronics supply voltage 14 12 to 13 System Check command 15 6 Volts RMS Excitation voltage Table 15 Electronics Unit Voltage Check 5 Repeat step 5 of Test A a...

Страница 64: ...o peak BCD Outputs 270 4 and 270 5 only Pressure Information Decimal points channel ID range ID outputs Output Drive Ability parallel line 3 state logic buffered TTL levels 1 TTL load Electromagnetic...

Страница 65: ...ure 15 to 40 C 59 to 104 F Power Requirement 100 120 220 or 240 VAC 10 50 60 Hz 40 Watt 21 Watts with heater off Ranges x1 x0 1 and x0 01 of full range of the pressure sensor Weight 8 lbs 4 kg Zero Te...

Страница 66: ...Enable line 34 F Front panel 25 27 Fuses 46 H HEAD connector 30 HEATER lamp 27 HEATER switch 27 I Introduction 17 L Line voltage changing 40 Location requirements 24 M Maintenance 46 Manual conventio...

Страница 67: ...45 S Scientific notation lamps for 25 SENSOR RANGE switch 26 SENSOR ZERO controls 26 Setup 37 39 Specifications 53 54 T Type 274 Multiplex unit 17 36 37 39 Z Zero control 26 Artisan Technology Group...

Страница 68: ...uipment Have surplus equipment taking up shelf space We ll give it a new home Learn more Visit us at artisantg com for more info on price quotes drivers technical specifications manuals and documentat...

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