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Copyright © 1998 by MKS Instruments, Inc.

All rights reserved. No part of this work may be reproduced or transmitted in any form or by any
means, electronic or mechanical, including photocopying and recording, or by any information
storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments,
Inc.

Printed in the United States of America

Baratron

®

is a registered trademark of MKS Instruments, Inc., Andover, MA

Swagelok

®

, VCR

®

, and VCO

®

are registered trademarks of Swagelok Marketing Company,

Solon, OH

Inconel

®

is a registered trademark of Inco Alloys International, Inc., Huntington, WV

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Содержание 141A Series

Страница 1: ...112905 P1 Rev C 8 98 MKS Type 141A 142A Vacuum Pressure Switch...

Страница 2: ...ng or by any information storage or retrieval system except as may be expressly permitted in writing by MKS Instruments Inc Printed in the United States of America Baratron is a registered trademark o...

Страница 3: ...ieser Betriebsanleitung vorkommende Symbole 9 Erkl rung der am Ger t angebrachten Symbole 10 Sicherheitsvorschriften und Vorsichtsma nahmen 11 Medidas de seguridad del transductor de presi n 13 S mbol...

Страница 4: ...w To Adjust the Relay Set Point 29 How To Activate Fail Safe Operation 30 Chapter Five Maintenance 31 General Information 31 How To Clean the Unit 31 Maintenance 31 Appendix A Product Specifications 3...

Страница 5: ...Pressure Switch 22 Figure 3 Terminal Block Connections 24 Figure 4 Type 141 142 Block Diagram 26 Figure 5 Serial Number Label 27 Tables Table 1 Definition of Symbols Found on the Unit 2 Tableau 2 D f...

Страница 6: ...List of Figures and Tables vi...

Страница 7: ...a procedure practice condition or the like which if not correctly performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard to equipment It calls attention...

Страница 8: ...arth ground IEC 417 No 5019 Frame or chassis IEC 417 No 5020 Equipotentiality IEC 417 No 5021 Direct current IEC 417 No 5031 Alternating current IEC 417 No 5032 Both direct and alternating current IEC...

Страница 9: ...E CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS If hazardous materials are used users must take responsibility to observe the proper safety precautions completely purge the instrument when necessary...

Страница 10: ...to prevent system explosion should the system pressure rise KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants to enter the unit before or during use Contamination such as dust dirt lint gla...

Страница 11: ...ition ou toute autre situation pr sentant un risque d accident pour le personnel en cas d ex cution incorrecte ou de non respect des consignes Attention L indication ATTENTION signale un danger pour l...

Страница 12: ...asse IEC 417 No 5017 Terre de protection masse IEC 417 No 5019 Masse IEC 417 No 5020 Equipotentialit IEC 417 No 5021 Courant continu IEC 417 No 5031 Courant alternatif IEC 417 No 5032 Courant continu...

Страница 13: ...ge doit tre uniquement effectu par du personnel qualifi PR CAUTION EN CAS D UTILISATION AVEC DES PRODUITS DANGEREUX Si des produits dangereux sont utilis s l utilisateur est responsable de la prise de...

Страница 14: ...r un disque d chappement adapt dans le syst me vide afin d viter une explosion du syst me en cas d augmentation de la pression MAINTIEN DE L UNIT L ABRI DES CONTAMINATIONS Ne pas laisser des produits...

Страница 15: ...Zustand oder eine sonstige Gegebenheit aufmerksam deren unsachgem e Ausf hrung bzw ungen gende Ber cksichtigung zu Verletzungen f hren kann Vorsicht Das Symbol VORSICHT weist auf eine Gefahr f r das...

Страница 16: ...7 Aus Netz IEC 417 No 5008 Erde IEC 417 No 5017 Schutzerdung IEC 417 No 5019 Rahmen Chassis IEC 417 No 5020 Aquipotential anschlu IEC 417 No 5021 Gleichstrom IEC 417 No 5031 Wechselstrom IEC 417 No 50...

Страница 17: ...urch qualifizierte Fachleute Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten Fachleuten durchgef hrt werden niemals vom Bedienpersonal Vorsicht...

Страница 18: ...en Geeignete Berstscheibe installieren Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird sollte eine geeignete Berstscheibe in das Vakuumsystem installiert werden um eine Explosionsgefahr...

Страница 19: ...ales Pone de relieve un procedimiento pr ctica estado etc que en caso de no realizarse u observarse correctamente puede causar da os personales Precauci n El s mbolo de precauci n indica la posibilida...

Страница 20: ...tierra IEC 417 N 5017 Protecci n a tierra IEC 417 N 5019 Caja o chasis IEC 417 N 5020 Equipotencialidad IEC 417 N 5021 Corriente continua IEC 417 N 5031 Corriente alterna IEC 417 N 5032 Corriente cont...

Страница 21: ...BEN SER EFECTUADAS NICAMENTE POR T CNICOS AUTORIZADOS Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el interior del instrumento Las tareas de mantenimiento...

Страница 22: ...hallar la presi n m xima permitida INSTALE UNA C PSULA DE SEGURIDAD ADECUADA Cuando el instrumento funcione con una fuente de gas presurizado instale una c psula de seguridad adecuada en el sistema de...

Страница 23: ...itry within a single enclosure The vacuum pressure switch senses the deflection of a diaphragm due to applied pressure providing a switched output when pressure exceeds the chosen trip point An LED pr...

Страница 24: ...ent in good working condition Appendix A Product Specifications lists the specifications of the instrument Appendix B Model Code Explanation describes the model code used to order the instrument Custo...

Страница 25: ...uring shipment Note Do not discard any packing materials until you have completed your inspection and are sure the unit arrived safely If you find any damage notify your carrier and MKS immediately If...

Страница 26: ...ents Operating Environmental Requirements Ambient operating temperature Type 141 0 C to 50 C 32 F to 122 F Type 142 20 C to 70 C 68 F to 158 F temperature controlled at 100 C 212 F Input power require...

Страница 27: ...ntheses 1 00 25 4 3 00 DIA 76 2 2 84 72 14 2 02 51 31 1 13 28 7 0 50 DIA 12 7 Swagelok 8 VCR Coupling 5K MM Through 25K MM 2 84 72 14 X See Table 1 1 MM Through 1K MM 3 00 DIA 76 2 0 50 DIA 12 7 1 00...

Страница 28: ...0 50 DIA 12 7 Swagelok 8 VCR Coupling 3 94 100 1 3 00 DIA 76 2 1 00 25 4 3 94 100 1 X See Table 1 0 50 DIA 12 7 3 00 DIA 76 2 1 00 25 4 1 MM Through 1K MM RANGE 1 mm 2 mm 10 100 1K mm TABLE 1 DIM X 1...

Страница 29: ...nted with the inlet port vertically downward as any foreign matter entering the pressure port will fall away from the diaphragm thereby not affecting the measurement It is important that the unit be k...

Страница 30: ...Ground Type 141 Type 142 Figure 3 Terminal Block Connections Shielded cable assemblies are recommended if the environment contains high EMI RFI noise The Normally Open NO Normally Closed NC and Common...

Страница 31: ...d to the trip point voltage as set by the Set Point Adjust potentiometer If the pressure signal is above the trip point voltage the comparator turns on the relay drivers and the LED to indicate an ove...

Страница 32: ...General Information Chapter Three Overview 26 Figure 4 Type 141 142 Block Diagram...

Страница 33: ...the serial number and the model number of the unit 141AA00100AB Serial Model 0123456789 MKS Instruments Inc Made in the USA Figure 5 Serial Number Label Note If your 141 142 unit was ordered for fail...

Страница 34: ...Labels Chapter Three Overview 28 This page intentionally left blank...

Страница 35: ...r than set point adjustment It is advised that users do not attempt adjustments other than the trip point adjust Caution Components inside the 141 142 instrument are susceptible to electrostatic disch...

Страница 36: ...e If the 141 142 unit was ordered with fail safe operation there will be a special number SP111 90 marked on the serial number label and the following instructions are not necessary To jumper the 141...

Страница 37: ...nit with a damp cloth Maintenance Should any difficulty be encountered in the use of this instrument it is recommended that you contact any authorized MKS Calibration or Service Center listed on the b...

Страница 38: ...Maintenance Chapter Five Maintenance 32 This page intentionally left blank...

Страница 39: ...tions Accuracy 0 5 of Range temperature coefficients Full Scale Ranges 1 2 10 100 1000 5000 10000 15000 20000 25000 Torr Media Compatibility Any gas compatible with Inconel 316 stainless steel Overpre...

Страница 40: ...nated with 8 VCR fittings Mechanical Outline Type 141 Type 142 Refer to Figure 1 page 21 Refer to Figure 2 page 22 Environmental Specifications Ambient Operating Temperature Range Type 141 Type 142 0...

Страница 41: ...l Code The options of your unit are identified in the model code The model code is identified as follows Type 14XA XXXXXYZ where Type Number Full Scale Range Fittings Type 14XAA XXXXX Y Z Relay Mode T...

Страница 42: ...00 Fittings Y The choice of fittings is designated by a single letter code Fittings Ordering Code Diameter Tubulation 10 100 and 1000 Torr units only A Swagelok 8 VCR Female B Mini CF rotatable C NW 1...

Страница 43: ...n 18 Medidas de seguridad del transductor de presi n 13 Model code 35 Mounting 23 O Operation fail safe operation 30 set point adjustment 29 P Pressure Transducer Safety Information 1 R Relays 17 24 3...

Страница 44: ...Index 38 W Warm up 29...

Страница 45: ...Index 39...

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