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4. Trouble shooting.
Confirm exhausting Tip and find Crack with eyes to check the vacuum state of panel.
If there is problem replace the module .
⇒
in case of vacuum breakdown, module makes a shaking noise because of inside gas ventilation.
(there may be a small crack which could not see with naked eyes. And this noise is different from Capacitor noise. )
2. Exhaust tip Crack
NORMAL
CRACKED