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LEYBOLD MAG W 2010 CHT, Руководство по эксплуатации

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62

GA 05.139/1.02 - 06/99

The system MAG 2000

• turbomolecular pump

• connecting cables

• frequency converter 

has been tested by the TÜV Rheinland of North America
according to the requirements of 

• NRTL

(used standards UL 3101, EN 61010) and 

• SEMI S2

The components are in compliance to the tested stan-
dards.

NRTL Report No. E9814034E01

The tested system includes the following components:

Turbomolecular pump MAG (W) 1600/2000, 
Cat. Nos. 121 31, 121 32
894 14, 894 15, 894 16, 894 17, 
894 28, 894 29, 894 30, 894 31

Frequency converter MAG.DRIVE 2000,
Cat. Nos. 121 35, 121 37, 121 44

Plug-in control, Cat. No. 121 36

BEARING cable, Cat. Nos. 
121 17, 121 19, 121 21, 121 25, 121 29

DRIVE/TMS cable, Cat. Nos. 
121 18, 121 20, 121 22, 121 26, 121 30

Certifications

Содержание MAG W 2010 CHT

Страница 1: ...ecular Pump with Magnetic Bearing MAG DRIVE 2000 Electronic Frequency Converter Software version 1 4 xx Cat Nos 121 31 121 44 Operating Instructions Vacuum Solutions Application Support Service LEYBOL...

Страница 2: ...8 4 3 Operating menu 40 4 3 1 Basic menu 40 4 3 2 Settings converter 41 4 3 3 Settings pump 42 4 3 4 Settings temperature management system 42 4 3 6 Total view of the menu 43 4 4 Temperature managemen...

Страница 3: ...anges without reduction of the maxi mum gas throughput The MAG DRIVE 2000 frequency converter The electronic converter converts the single phase line supply voltage into a three phase DC voltage to dr...

Страница 4: ...on In order to handle gases or media e g AlCl3 WOCl4 which can form deposits insi de the pump it is required to use the TMS Temperature Management System The temperature selected for such processes ha...

Страница 5: ...ly controls the pump rotor in five axes closed loop control All parameters required for pump operation and the listed faults and operating hours are stored in a non volatile memory in the pump When th...

Страница 6: ...as dry nitrogen argon or similar Purge gas throughput 0 5 to 0 65 mbar l s 1 30 to 40 sccm Connection VCR Nut 1 4 1 5 Standard specification MAG The turbomolecular pumps are shipped complete sealed in...

Страница 7: ...Start Stop Esc Mon Prog Enter _ Each Fuse 4 A Fig 3 Front panel X14 Connection control plug X19 Mains connection X20 Connection magnetic bearing X21 Connection pump motor and TMS Fig 4 Rear panel wit...

Страница 8: ...tand by approx 100 W Continuous rated speed 810 W Maximum 1800 W Max voltage motor 60 V Maximum pump current 20 A rms Continuous pump current max 15 A rms Maximum frequency 480 Hz Load capability rela...

Страница 9: ...raight 121 17 3 m DRIVE TMS straight straight 121 18 5 m BEARING bended 225 straight 121 19 5 m DRIVE TMS bended 180 straight 121 20 10 m BEARING bended 225 straight 121 21 10 m DRIVE TMS bended 180 s...

Страница 10: ...drawing and standard fixing of the MAG DRIVE dimensions in mm START STOP Com Status Main X7 Fuses TMS MAG D RIVE 2000 Each Fuse 4 A 19 installation frame 4 x M3 screws 455 113 196 128 135 27 max 115 1...

Страница 11: ...escription 11 GA 05 139 1 02 06 99 Fig 7 MAG W 2010 CHT Dimensions in mm DN 40 DN 250 ISO F 272 386 303 16 355 335 261 400 199 320 5 284 201 310 336 12x60 360 11 310 30 18 51 18 1 0 3 0 3 5 421 102 11...

Страница 12: ...pressure Rotor speed 480 Hz Purge gas flow 36 sccm Nitrogen with splinter guard Forepump D 65 B WS 251 Pipe 1 m DN 40 according to PNEUROP 1500 1000 500 0 2000 10 2 10 1 1 Torr 10 3 10 4 l s MAG W 201...

Страница 13: ...pump while connecting or remo ving the MAG The MAG is shipped in a sealed PE bag with desiccant Do not open the sealed package until immediately befo re installing Do not remove the covers and blankin...

Страница 14: ...sealed PE bag with desiccant Do not open the package until immediately before instal ling Do not remove the covers and blanking flanges until you are ready to make the connections to ensure that the M...

Страница 15: ...ssary to secure it in any other way The vacuum chamber must be securely attached to the floor or a solid wall In case of lighter vacuum vessels secure the pump addi tionally The pump s bottom is equip...

Страница 16: ...GA 05 139 1 02 06 99 Installation 16 M 60 000 Nm M 60 000 Nm Correct Wrong Fig 13 Vacuum chamber fixed to the floor 125 7 0 3 0 310 15 Fig 14 Fixing the pump at the bottom Boreholes M8 15 mm deep...

Страница 17: ...m l 10 mm in steel Outer ring stainless steel Sealing FPM Centering ring stainless steel Splinter guard Max torque 60 000 Nm Fig 15 Fixing the intake flange Bolts M10 x 35 M10 x 40 Quality 12 9 accord...

Страница 18: ...bomolecular pump 2 Forevacuum gauge point 3 Backing pump 4 Anti vibration bellows 5 Forevacuum valve 6 High vacuum valve 7 Purge gas connection 8 Valve in the roughing line 9 Electronic frequency conv...

Страница 19: ...on valve between chamber and MAG The foreline isolation valve is recommended to protect the MAG from shock venting in case of uncontrolled shut down of the backing pump This valve must be able to clos...

Страница 20: ...e size 150 m Electrical conductivity 500 S cm pH value 7 to 8 5 Overall hardness total alkaline earths max 20 German hardness scale 3 57 mmol l Further information on request Connect the cooling water...

Страница 21: ...Installation 21 GA 05 139 1 02 06 99 Fig 19 Connecting the cooling water Cooling water out Cooling water in Cooling water in WRONG Cooling water out IN OUT Cooling valve MAG cooling circuit...

Страница 22: ...ccm is required You may use a flow controller to ensure the flow Inadequate purge gas flow voids the warranty Connect purge gas to the VCR nut 1 4 as shown in Fig 20 Warning Monitor the purge gas cont...

Страница 23: ...Installation 23 GA 05 139 1 02 06 99 Fig 20 Purge gas connection with connection kit VCR Nut 1 4 Port connector Tube to VCR Male connector Tube OD 1 4 ISO male pipe size 1 4...

Страница 24: ...t be connected to the metal housings of the SUB D connector and SUB D socket Installation 24 GA 05 139 1 02 06 99 2 8 Installing the MAG DRIVE The converter can be installed in a 19 cabinet It is 1 2...

Страница 25: ...is inserted at connector X19 at the rear of the converter Caution The converter will be damaged if it is ope rated with the incorrect supply voltage 25 GA 05 139 1 02 06 99 1 2 3 s 1 Phase L 2 Not ass...

Страница 26: ...Connect the converter X21 to the pump motor connec tion X25 and to the TMS connection X30 using the combined DRIVE TMS cable Also refer to Fig 21 and 23 Make sure that you have fixed all cables prope...

Страница 27: ...ription of the Emergency Off connection Pins 47 and 48 of control plug X14 make it possible to disable the output stage of the frequency converter via the hardware The power flow to the motor is then...

Страница 28: ...ively used to output motor current actual frequency motor temperature rotor displacement signals PW24 PV13 PZ12 The output value can be increased or reduced by a scale factor see Section 4 3 2 Setting...

Страница 29: ...X14 38 Function analog input 2 Analog input 2 Frequency setpoint X14 16 Analog input 1 Analog input 1 X14 32 33 Analog ground X14 35 X14 19 X14 2 Actual frequency Normal operation Start command applie...

Страница 30: ...PZ12peak Current limiting 80 mA 1 2 3 4 5 6 7 9 Pump standstill Start command Power supply o k Threshold Threshold Motor or bearing temperature Motor current Act frequency Function signal relay Functi...

Страница 31: ...rge gas OFF1 Vent ON1 The functions are active if a High signal 15 V e g Pins 28 or 29 is connected at the digital input Remote Start if Remote is active The functions Start and Remote are active if a...

Страница 32: ...urge may cause the rotor to make contact with the touch down bearings This will cause increased wear Do not disconnect the MAG and MAG DRIVE while they are operating If MAG and MAG DRIVE have been dis...

Страница 33: ...peration 33 GA 05 139 1 02 06 99 103 Forevacuum pressure mbar 102 101 100 10 1 10 2 10 3 Fig 30 Curve for safe venting of the MAG pressure rise as a function of venting time 0 10 20 30 40 50 60 Time s...

Страница 34: ...s fast flashing green When the STA TUS LED is off the pump has come to a standstill Close the cooling water supply when the pump is switched off in order to avoid condensate formation in the pump The...

Страница 35: ...t connected Start Stop via the operator control panel Jumper X14 11 X14 10 Start Stop via control input X14 12 0 1 P12 0 1 2 S R Q Q 1 s 0 1 2 1 1 START REMOTE 15 V X14 11 X14 12 X14 30 31 P36 1 X14 4...

Страница 36: ...ration 1 0 A 480 Hz is displayed The backing pump and the MAG can be switched on simultaneously In such a situation the MAG serves from the very outset as an effective baffle Switching off The MAG DRI...

Страница 37: ...use of the failure has been removed Increases a parameter value or proceeds to the next option Lowers a parameter value or returns to the previous option Selects the programming menu from the operatin...

Страница 38: ...celerate up to the frequen cy setpoint Overload The speed is continuously monitored and controlled If the speed even at maximum current cannot be held at the setpoint as a result of external influence...

Страница 39: ...time START command Mains ok Frequency P 25 x P24 Mains failure Mains failure Frequency P25 x P24 Frequency P25 x P24 Mains failure STOP command If a failure occurs the pump is decelerated Frequency 1...

Страница 40: ...actual value C r Actual PVW 13 Rotor displacement in the magnetic bearing actual value r plane VW13 Actual PVW 24 Rotor displacement in the magnetic bearing actual value r plane VW24 Actual PZ 12 Rot...

Страница 41: ...ing temp 100 C 10Vxscale factor V Actual PVW13 100 10Vxscale factor V Actual PVW24 100 10Vxscale factor V Actual PZ12 100 10Vxscale factor V Scale Factor Scale factor for the analog output 0 2 1 r w A...

Страница 42: ...point Temperature 20 62 62 C r w Management System 4 3 5 Settings purge vent Not active at MAG W 2010 CHT Menu item Description Adjustable value option Ac cess min max stan Unit value value dard Purge...

Страница 43: ...Option 1 Enter or Main menus Software Version 104 xx Enter German TMS OK No Purge Gas No Cooling Water Frequency Set Converter Enter Motor Current Option Relay 1 Bearing Temp Scale factor 1 0 x Enter...

Страница 44: ...ow If the flow is very high and the temperature low a high temperature setpoint might not be reached For temperature sensitive applications observe the cooling water specifications refer to Section 1...

Страница 45: ...llwert TMS TMS Code Heizung EIN K hlung EIN TMS OK Warnung TMS St rung TMS 1 The TMS status code is displayed on the operation display see Section 4 2 Heater or cooling active Fig 36 Function diagram...

Страница 46: ...ted pumps For storage of contaminated pumps during tool maintenance the seal kit provi ded with the pump can be used Proceed as follows to seal the turbomolecular pump immediately after removing it fr...

Страница 47: ...ve film washer 6x screw 6x nut 4x dry cartridge plastic adhesive film plastic cap Seal the high vacuum connection flange with the cover and the screws Pack the pump so that it may not be damaged durin...

Страница 48: ...upon request A copy of this form is printed at the end of the Operating Instructions Declaration of Contamination of Vacuum Equipment and Components Either fasten this form at the pump or simply enclo...

Страница 49: ...th the metal seal kit bolts collar flange retaining ring blank flange Centering ring with O ring desiccant nuts sealing disc screwed sealing plug for purge gas connector cap polyethylene bag with cabl...

Страница 50: ...es Refer to Section 2 8 for the correct mounting of the converter in a rack max ambient temperature 45 C Apply cooling water according to specificati ons Check cooling water tubes for deposits See als...

Страница 51: ...contact Ley bold If warning message persists contact Leybold service Check the chamber pressure during operati on Contact Leybold service Reduce backing pressure Additionally check process gas flow Se...

Страница 52: ...ged or in case the measurement of the resistance shows abnormal values 3 4 k now Contact Leybold service Apply cooling water according to specifications Check cooling water tubes for deposits See also...

Страница 53: ...s typically between 110 and 130 20 C to 70 C Replace the cable if it is damaged or in case the measurement of the resistance shows abnormal values now Check chamber temperature If the red LED at the w...

Страница 54: ...old service Reduce backing pressure Check if the rotor rotates freely Contact Leybold service if the rotor is damaged or blocked Reduce backing pressure Set parameter Accel Time to default 1000 s see...

Страница 55: ...onnectors straighten pins if required Deactivate Emergency off via control plug X14 and acknowledge failure message Reconnect or replace DRIVE cable Step 1 Check fuse Replace fuse TMS F4A 5x20 mm if b...

Страница 56: ...ervice if the sensor is defective Step 3 Check TMS DRIVE cable Check TMS DRIVE cable connector X21 In parti cular measure resistance between pins X21 K and X21 M as well as between pins X21 K and X21...

Страница 57: ...venting valve via control plug X14 LED on the valve must light up and a clicking noise can be heard Foreline pressure drops while the valve is closed Set purge flow according to specification Leave th...

Страница 58: ...EWG When using the appropriate Leybold accessories e g connector lines and when powering the pump with the specified Leybold frequency converters the protection level prescribed in the EMC Guidelines...

Страница 59: ...g No 121 35 121 36 121 37 121 44 The product indicated solely for fitting in another machine Commissioning is prohibited until the conformity of the end product with EC directive 89 392 EEC has been e...

Страница 60: ...marketed by us correspond to the basic health and safety regulations specified in the EEC Directives This declaration is no longer valid if the product is modified without us being in full agreement T...

Страница 61: ...compatibility The applicable measurements were made taking into account the following standards EN 50081 Part 2 EN 50082 Part 2 Note Attention must be paid to the information provided on proper insta...

Страница 62: ...in compliance to the tested stan dards NRTL Report No E9814034E01 The tested system includes the following components Turbomolecular pump MAG W 1600 2000 Cat Nos 121 31 121 32 894 14 894 15 894 16 894...

Страница 63: ...Notes 63 GA 05 139 1 02 06 99...

Страница 64: ...pment and components which have been contaminated by biological explosive or radioactive substances will not accepted without written evidence of decontamination Please list all substances gases and b...

Страница 65: ...er Turbopump Serial Number Complaint Process OEM Equipment Name and Model Process Gas Was the turbopump replaced Yes No If yes replacement pump P N replacement pump S N Date Installed Date Removed Dat...

Страница 66: ...G 1600 C CT MAG W 1600 C CT MAG 2000 C CT MAG W 2000 C CT MAG DRIVE L MAG DRIVE L2 GA 05 130 3 02 May 1998 MAG 1600 C CT MAG W 1600 C CT MAG 2000 C CT MAG W 2000 C CT MAG DRIVE 2000 GA 05 135 1 02 Aug...

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