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Installation
15
GA 05.139/1.02 - 06/99
Fig. 12 Connection elements
Intake flange
Forevacuum flange
Cooling water out
Cooling water in
Purge gas connector
(behind the pump)
Warning
The pump must be securely attached. If the
pump should suddenly seize, inadequate
attachment could cause the pump to break
away or allow internal pump parts to be dis-
charged. Never operate the pump (in bench
tests, for instance) without its being con-
nected at the vacuum chamber.
If the pump should suddenly seize, the dec-
celeration torque of 60,000 Nm will have to
be absorbed by the system. To accomplish
this, use all 12 bolts provided by Leybold for
fastening the high-vacuum flange; see also
Fig. 15.
Mount the MAG as close as possible to the vacuum
chamber. If the MAG is permanently flanged to a vacu-
um chamber with a weight exceeding 500 kg, it will not
be necessary to secure it in any other way.
The vacuum chamber must be securely attached to the
floor or a solid wall.
In case of lighter vacuum vessels secure the pump addi-
tionally. The pump’s bottom is equipped with tappered
holes for fastening a support; see Fig. 14.
If the pump is exposed to shocks, e.g. by a gate valve,
secure the pump so that it is supported in the direction of
the shock.
Earthquake protection
For earthquake protection fix the pump as shown in Fig.
13,14 and 15. Depending on the chamber’s weight and
fixing use the boreholes in the pump’s bottom in additi-
on.
The standard fixing for the converter is shown in Fig. 6.
We recommend installing an isolation valve between the
pump and the chamber. The valve should be closed
during wet cleans of the chamber and in case of pump
failures which will lead to a pump shut down. The valve
should normally be closed with power off.
Warning
The pump can become so hot during ope-
ration (> 85
°
C, > 185
°
F) that it represents
a burn hazard:
Provide protection against contact with the
hot components.
Содержание MAG W 2010 CHT
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