5 Maintenance
The MAG is nearly maintenance-free. Wear only occurs
at the touch-down bearings when hard shocks have to
be supported or when the pump frequently runs down
without venting.
Maintenance is also required after removing the bearing
cable during operation of the pump.
Under these conditions the rotor can not be controlled by
the magnet bearing and the pump will have a full run
down on the touch down bearing.
The rotor has to be changed after 40,000 hours of ope-
ration or after 5 years.
Depending on the installation site the converter may
collect grime (dust, moisture) on the inside. Such conta-
mination may lead to malfunctions, overheating or short
circuits. Therefore the converter must be cleaned after 5
years.
Only the Leybold service can change the rotor and clean
the converter.
5.1 Removing the pump
from the system
MAG which have been used in semiconductor processes
are contaminated by semiconductor process gases.
Most of these gases form acids when exposed to moist
air which causes serious corrosion damage to the pump.
To prevent corrosion damage during storage and ship-
ping, use the seal kit.
Failure to seal a contaminated MAG voids the warranty.
The seal kit contains the following
-
dry cartridge,
-
plastic cap for forevacuum connection flange,
-
plastic adhesive film and
-
aluminum cover and screws for the high-vacuum
connection flange.
Caution
For safety reasons we recommend to use a
metal seal kit (order no. 200 07 901; see
Fig. 38) for shipping of contaminated
pumps. For storage of contaminated pumps
during tool maintenance the seal kit provi-
ded with the pump can be used.
Proceed as follows to seal the turbomolecular pump
immediately after removing it from your process.
Purge the pump for two hours with the backing pump
running. This helps to remove a large quantity of the pro-
cess gases from the pump. We recommend purging the
pump via the intake flange and the purge valve with
approx. 200 sccm.
Press the STOP button at the MAG.DRIVE and wait until
the pump has come to a standstill.
Afterwards turn the mains switch to the „0“ position.
The cables between the MAG and MAG.DRIVE may be
disconnected only after the MAG has come to a full still-
stand and the mains is switched off.
Warning
When the pump has been pumping hazar-
dous gases, ensure that proper safety pre-
cautions are taken before opening the inta-
ke or exhaust connections.
Use gloves or protective clothing to avoid
skin contact with toxic or highly corrosive
substances. Work under a fume hood if
available.
Disconnect the cables from the pump.
Disconnect the cooling water lines. Remaining cooling
water may flow out. Protect all parts below.
Remove 10 of the 12 bolts which hold the intake flange.
The 2 remaining bolts must be directly opposite.
Disconnect the forevacuum line.
Support the pump with a lift-truck at the base plate and
remove the 2 remaining bolts.
Clean the intake and forevacuum connection flange as
necessary for good adhesion of tape.
Place the dry cartridge into the forevacuum port. Don’t
use loose crystals.
Firmly seal all ports with plastic adhesive film.
Cover the forevacuum connection port with its plastic
cap.
GA 05.139/1.02 - 06/99
Maintenance
46
Содержание MAG W 2010 CHT
Страница 63: ...Notes 63 GA 05 139 1 02 06 99...
