Figure 5. Dimensions
3.3 Performance
Table 6 Performance data
25
35
Maximum pumping speed (m
3
/hr)*
25
35
Maximum continuous inlet pressure ambient (mbar)
1013
†
Maximum chamber size for evacuation (l)
No limit
Typical ultimate pressure (mbar)
0.01
Maximum continuous exhaust pressure (mbar(g))
200
Suck-back protection
Exhaust valve design
Leak tightness (static) (mbar l/s )
< 1 x 10
-6
* Values for maximum pumping speed are obtained at standard ambient
temperature and pressure. At higher temperatures or different ambient
pressures pump performance may be compromised and the rotational
speed may drop below nominal.
† At high inlet pressures pump rotational speed may reduce to sustain
continuous operation.
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300902516_002 - 10/2020 - © Leybold
Technical data
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