11
300544660_002_C1
11/2016
- © Leybold
3.1 Conforming utilization
The transmitter is intended for measuring pressure.
The transmitters are intended for use in relatively clean environments.
The transmitter can only be used by persons who have suitable technical training and the necessary
experience or who have been instructed by the end-user of the product.
Always ensure that all vacuum sealing items and surfaces are clean, without damage and free of particles.
Use a cable with strain relief to ensure proper electrical connection and to reduce stress on the
connectors.
To comply with EN61326-1 immunity requirements, use a braided, shielded cable.
3.2 Non-conforming utilization
The transmitter cannot be used for measurements other than described in this manual.
The transmitters are not intended for use in dirty and corrosive environments.
Do not use the transmitter in presence of flammable gases or other explosive environments.
Only install original parts. Do not perform any unauthorized modification to the instrument.
The transmitter is not intended for use above maximum
allowed pressure (refer Technical Data in Chapter
2).
3.3 Process Compatibility
The transmitter is intended for use in non-condensing process environments. The transmitter can be used in
corrosive environments (example: semiconductor processes) where aggressive gases like chlorine and fluorine are
used but users should expect drift and frequent zeroing in such applications. If the transmitter is located close to a
gas source connection like a flow controller or leak valve, the transmitter pressure measurement can be higher
than the actual chamber pressure. Conversely, location close to a pumping system connection can cause a lower
pressure measurement than actual chamber pressure.
Do not use or install the transmitter where the following conditions occur:
- Temperatures lower than 0 °C or higher than 50 °C.
- Explosive ambient environment around the transmitter.
- Direct sunlight or other heat sources, including heating, ventilation, and air conditioning outlets.
- Corrosive or condensable process gases or reaction products are likely to be present.
-
Liquid condensation and/or liquid draining onto the transmitter’s housing.
- Dust contamination.
