LEYBOLD 215130, Руководство пользователя

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DISMOUNTING AND STORAGE
270727EI.DOCX 17200295_002_C0/2016 - © Leybold 29/40
8 Dismounting and Storage
WARNING
Unqualified personnel
Inappropriate handling may cause serious injury or property damage.
Only qualified personnel are allowed to carry out the described work.
CAUTION
Hot surfaces
Risk of burning when touching hot surfaces.
Touch hot surfaces only if the valve has cooled down.
NOTICE
Contamination
Product may get contaminated.
Always wear cleanroom gloves when handling the product.
8.1 Dismounting
1. Vent the vacuum system and wait until the valve has cooled down to <55°C.
2. Disconnect compressed air.
3. Disconnect power supply.
4. Dismount valve from system, attach the protective lids.
8.2 Storage
NOTICE
Wrong storage
Inappropriate temperatures and humidity may cause damage to the product.
Valve must be stored at:
– relative humidity between 10% and 70%
– temperature between 10 °C and +50 °C
– non-condensing environment
1. Clean / decontaminate valve.
2. Cover all valve openings with protective covers or foils.