Troubleshooting
52
17200492_002_A5 - 04/2011 - © Oerlikon Leybold Vacuum
Error
code
Designation
Meaning
Possible Cause Remedy
Shut-
down
84
Motor over-
temperature
warning
no
101
overload
warning
The pump
speed has
dropped under
the normal
operation
threshold
Forevacuum
pressure too
high.
Gas flow too
high
Check the ultimate
pressure of the
backing pump and
install a bigger
backing pump if req.
Seal leak, check pro-
cess
no
103
Supply
voltage
warning
Intermediate
circuit voltage
too low or
maximum time
for generator
operation was
exceeded.
DC supply vol-
tage below 24V
Mains voltage
has failed
Check the voltage at
the power supply
and if required set up
correctly
Remedy the cause
for the mains power
failure
no
106
overload error The pump
speed has
dropped under
the minimum
speed
Forevacuum
pressure too
high.
Gas flow too
high
Check the ultimate
pressure of the
backing pump and
install a bigger
backing pump if req.
Seal leak, check pro-
cess
yes
111
Motor under-
temperature
error
The minimum
permissible
motor tempe-
rature is not
attained.
Ambient tempe-
rature too low
Pump cooling
too high
Ensure min. ambient
temperature of 0°C
Reduce water cooing
yes