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3.3

Switching on

Switch on the DC power supply. The yellow LED at the fre-
quency converter lights up.
Switch on the turbomolecular pump at the frequency con-
verter

■

via pins 7 and 8 of the socket REMOTE (X1) (For exam-
ple via a remote control or with the aid of the plug with
integrated ON/OFF switch: see Section 1.5
Accessories). 

■

by a start command via the interface.

The turbomolecular pump accelerates. The green LED
flashes. When the pump reaches normal operation the
green LED lights up permanently.
After a mains power failure the pump can run up automati-
cally once more.

Operation

40

17200492_002_A5 - 04/2011 - © Oerlikon Leybold Vacuum

Содержание 800073V0002

Страница 1: ...Drive X3 HEAT SINK DC 24 V X4 HEAT SINK Part Numbers 800073V0002 800073V0003 800073V0004 800073V0008 TURBO DRIVE 400 Frequency Converter for Turbomolecular Pumps Operating Instructions 17200492_002_A5...

Страница 2: ...VICE X5 26 3 2 2 RS 485 interface 27 3 2 3 Profibus DP 29 3 2 4 USB interface X106 30 3 2 5 Parameter list 31 3 2 6 Specific parameter data for the pumps 36 3 2 7 Warning codes for parameter 227 38 3...

Страница 3: ...all safety precautions described in this section and throughout the Operating Instructions The TURBO DRIVE must only be operated in the proper condi tion and under the conditions described in the Ope...

Страница 4: ...al regu lations PELV During operation the frequency converter may attain temperatures up to 75 C We recommend that the unit be installed so that it can not be touched inadvertently Inside the unit the...

Страница 5: ...standstill 3 Hz flashes slowly 1 s Start command is present about 10 s after start flashes fast 3 s Running up or running down on Normal operation Yellow LED PWR off No supply voltage flashes Supply...

Страница 6: ...r setting the Profibus address in the hexadeci mal format Fig 1 2 Rear side of TURBO DRIVE 400 with additional Profibus interface RS 485 X104 TURBO D RI VE TD 400 Fig 1 3 Front side of TURBO DRIVE 400...

Страница 7: ...pump by means of a connecting cable The TURBO DRIVE 400 requires a supply voltage of 24 V DC It is equipped with interfaces for programmable con trols REMOTE and an optional interface for serial commu...

Страница 8: ...ax power consumption 140 W Max peak current input side 6 A DC Required power output from the power supply 150 W Max length of the DC cable shielded at 3 x 1 5 mm2 5 m at 3 x 2 5 mm2 20 m Relay output...

Страница 9: ...on Leybold Vacuum TURBO DRIVE TD 400 DRI VE X3 HEAT SINK HEAT SINK 24V DC X4 73 3 100 18 2 63 8 15 9 41 0 79 0 100 50 27 6 18 5 32 Profibus Version 20 Fig 1 5 Dimensional drawing for the frequency con...

Страница 10: ...long 864 50 1 5 Accessories OEM power supply with screw terminals SITOP 24 V 10 A 120 230 VAC 50 60 Hz 152 50 supplies the TURBO DRIVE 400 with 24 V DC other power supplies on request 24 V DC cable TU...

Страница 11: ...300 800100V0001 supplies the TURBO DRIVE 400 with 24 V DC plug play cables desktop unit or rack mountable with power switch with start stop switch for the turbomolecular pump remote control status LE...

Страница 12: ...Download Software PC software Turbo Drive Server for Windows 95 and higher CD ROM Display change save and compare parameter lists Integration of customer s software Record parameter data 800110V0102...

Страница 13: ...W 300 TW 300 H TURBOVAC SL 80 SL 300 Other pumps may only be operated after approval from Oerlikon Leybold Vacuum or if the operation of such pumps is expressly permitted in the Operating Instructions...

Страница 14: ...ction levels are 15 mT max radioactive radiation spec is 105 rad 103 Gy The frequency converter must only be used in rooms within buildings It must not be operated in explosive gas atmo spheres The fr...

Страница 15: ...and discharge of cooling air For special requirements please contact us Installation 15 17200492_002_A5 04 2011 Oerlikon Leybold Vacuum 1 2 3 4 5 A 60 50 40 30 20 10 0 C 6 Fig 2 1 Cooling requirement...

Страница 16: ...ncy converter must only be connected to power supplies which meet the requirements for func tional extra low voltage with positive isolation in accor dance with IEC 364 VDE 0100 Part 410 or local regu...

Страница 17: ...ig 2 2 Pin assignment of the DC connector X4 Model Hirose HS16P 3 Fig 2 3 Connecting the pump and the power supply REMOTE 93 132 187 264 V AC 50 60 Hz 24 V DC L N DRIVE X3 HEAT SINK HEAT SINK 24V DC X...

Страница 18: ...REMOTE FRONT MAINS ON 100 240 V 24 V POWER OUT REMOTE OUT T5 A 250 V 1 0 1 0 OFF T5 A 250 V REMOTE 100 240 V 50 60 Hz 2 4 V D C C o n t r o l c a b l e In the case of an integrated TURBO DRIVE 400 the...

Страница 19: ...TURBO POWER 300 T 5 A 250 V T 5 A 250 V 100 240 V AC 100 240 V AC 50 60 Hz DRIVE X3 HEAT SINK HEAT SINK 24 V DC X4 In the case of an integrated TURBO DRIVE 400 the connecting cable is omitted Fig 2 5...

Страница 20: ...ol input Low Level 7 5 0 5 V High Level 10 0 5 V Start Stop operation Example 1 Operation via a PLC Contact open STOP Contact closed START Example 2 Operation via contacts TURBO DRIVE S 5 3 4 n c n o...

Страница 21: ...Just after stop pump was in the normal operating mode before that Start no no no on passive passive off off Just after start Start yes no no on passive passive flashes off Pump is accelerating Start...

Страница 22: ...ll three LEDs will flash rapidly during acceleration the green LED flash more slowly The run can be cancelled by revoking the start command Pausing is not possible After a completed run in the pump st...

Страница 23: ...o the parameter list Pxxx denotes parame ter value xxx The PC software TURBO DRIVE Server allows convenient access by the user to the parameters of the frequency con verter It can be downloaded from w...

Страница 24: ...emories P171 P174 and P176 error code speed operating hours for error Slow pressure control by Dispensing with a flow controller Changing the rotor frequency changing the pumping speed through paramet...

Страница 25: ...3 2 Providing a RS 232 connection Shield 9 pin IBM PC RS 232 interface SERVICE X5 1 4 and 6 9 are internally connected and must not be used 8 7 6 5 4 3 2 1 9 Fig 3 1 Pin assignment for the socket at...

Страница 26: ...ctor 9 way Sub D type socket on the instrument female thread UNC4 40 Note If on the controlling side an RS 232 interface in accordance with the PC standard with a 9 pin Sub D male connector is present...

Страница 27: ...pair cable Differential voltage levels logic 0 see also Standards transmitter 1 5 5 V receiver 0 3 V logic 1 transmitter 1 5 5 V receiver 0 3 V Interface connector 9 way Sub D type socket on the inst...

Страница 28: ...V 390 150 390 X 5 8 7 TURBO DRIVE X5 7 X5 8 X5 7 X5 8 120 Master X 5 6 9 TxD RxD TxD RxD 150 TURBO DRIVE TURBO DRIVE Fig 3 4 Connection of the RS 485 bus For longer cable runs Links for activation of...

Страница 29: ...9 For more information on the Profibus system The New Rapid Way to Profibus DP Manfred Popp Profibus Nutzerorganisation e V Haid und Neu Str 7 76131 Karlsruhe Germany P N 4 072 www profibus com Upon r...

Страница 30: ...ms default parameter 180 Address range non addressable Maximum cable length 5 m Interface connector USB B Notice the USB interface has been electrically separated from the converter and is supplied f...

Страница 31: ...rite command with any value saves temporary data into nonvolatile memory 11 Actual converter 10 150 0 C r i16 Actual heat sink temperature temperature of the converter 16 Motor temperature 0 150 C r i...

Страница 32: ...an error is present 2 Fieldbus controlled 3 Venting function 32 Max run up time 30 2000 720 s r w u16 Max permissible time during which the pump must attain the normal operation threshold P24 P25 with...

Страница 33: ...the pump to be switched off 132 Bearing temperature 10 150 C r i16 Exceeding the bearing temperature error threshold error threshold causes the pump to be switched off 133 Motor temperature 10 150 C...

Страница 34: ...re run provided bit 10 in the control word USS protocol for bus adapter is cancelled or if there are interruptions in the communication between converter and bus adapter Here bit 10 is of special sign...

Страница 35: ...1200 300 Hz r w u16 Frequency at which the venting valve shall be switched on in the event of a mains power failure Power failure venting can be enabled through P240 248 Vent off frequency 0 1200 5 H...

Страница 36: ...58 5 SL 80 1200 910 340 5 0 55 53 6 SL 300 1000 890 375 5 0 56 54 No Designation Min Max Default Unit r w Format Description 312 Catalog number 0 127 CHAR r u16 Catalogue number of the converter of c...

Страница 37: ...equence bearing run in function Type of Pump Run in Run in Run in Run in Run in Run in pump designation speed 1 time 1 speed 2 time 2 speed 3 time 3 P23 Hz s Hz s Hz s 0 TW 220 150 TW 220 150 15 100 3...

Страница 38: ...t stage or within the frequency converter Ambient temperature too high Poor cooling Ensure max ambient temperature of 45 C Improve cooling 2 Bearing over temperature warning The permissi ble warning t...

Страница 39: ...o high Gas flow too high Check the ultimate pres sure of the backing pump and install a bigger backing pump if req Seal leak check process 12 13 not used 14 Power supply voltage warning Supply voltage...

Страница 40: ...le via a remote control or with the aid of the plug with integrated ON OFF switch see Section 1 5 Accessories by a start command via the interface The turbomolecular pump accelerates The green LED fla...

Страница 41: ...LED If a failure occurs the turbomolecular pump will be shut down automatically The red LED at the frequency conver ter lights up To shut down the frequency converter switch the pump off and wait unti...

Страница 42: ...parameter 24 when switching the pump off the parameter value needs to be saved permanently For this enter any value for example 1 for parameter 8 Thereafter changed parameters will be saved permanentl...

Страница 43: ...this proceed as follows With the aid of a Windows PC and the PC software TURBO DRIVE Server change the setting for the parame ter 139 Current reduction factor The possible values for parameter 139 ca...

Страница 44: ...ceed as follows With the aid of a Windows PC and the PC software TURBO DRIVE Server change the setting for the parame ter 25 Frequency dependent normal operation level The possible values for paramete...

Страница 45: ...s As a rule no value below 720 seconds should be entered as this would give rise to unnecessary error messages If a signifi cantly higher value than 720 seconds is required this may indicate that the...

Страница 46: ...et up the start delay time proceed as follows With the aid of a Windows PC and the PC software TURBO DRIVE Server change the setting for the parame ter 36 Start delay time The possible values for para...

Страница 47: ...d Rotor frequency at the point of time when the error event in parameter 174 occurred The corresponding number of operating hours in para meter 176 Access to each of the 40 groups of values is accompl...

Страница 48: ...h a dry cloth When removing a defective frequency converter from an installation please note the information given in Chapter 3 4 During all work on the pump which is being driven by the frequency con...

Страница 49: ...r having removed the cause for the error reset the error message at the TURBO DRIVE In case of error code 8 by switching the mains power off In case of the other errors by applying a STOP signal via t...

Страница 50: ...r backing pump if req Seal leak check pro cess Check if the rotor turns freely Contact Oerlikon Leybold Vacuum Service if the rotor is damaged or blocked yes 3 Bearing temperature error The maximum pe...

Страница 51: ...Forevacuum pressure too high Gas flow too high Fan defective Water cooling switched off Check the ultimate pressure of the backing pump and install a bigger backing pump if req Seal leak check pro ce...

Страница 52: ...oo low or maximum time for generator operation was exceeded DC supply vol tage below 24V Mains voltage has failed Check the voltage at the power supply and if required set up correctly Remedy the caus...

Страница 53: ...p and install a bigger backing pump if req Seal leak check pro cess yes 117 Motor current error Motor current less than nominal cur rent Cable fault Faulty connector Contact Oerlikon Leybold Vacuum Se...

Страница 54: ...onver ter The following may damage the freq conver ter Disconnection of the DC cable while the pump was still rotating Non compliance with the note related to connecting several pump to a single power...

Страница 55: ...ication via the serial interface REMOTE connector X1 connected wrongly REMOTE and SERVICE connectors mixed up Wrong Profibus address set Use USS protocol Connect bus as shown in Section 3 2 Connect as...

Страница 56: ...sufficient pumping speed or ultimate pressure which is too high Frequency parameters programmed wrongly Inspect the measurement sensor Clean or replace the sensors Check for leaks Clean the pump Check...

Страница 57: ...fore beginning with any work first find out whether any parts are contaminated Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts Separate clean com...

Страница 58: ...Notes 58 17200492_002_A5 04 2011 Oerlikon Leybold Vacuum...

Страница 59: ...59 17200492_002_A5 04 2011 Oerlikon Leybold Vacuum...

Страница 60: ...Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 0 221 347 0 Fax 49 0 221 347 1250 info vacuum oerlikon com LV_11139_2011 04 11 w w w o e r l i k o n c o m...

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