3.4
Shutting down
Switch off the pump at the frequency converter.
■
via contacts 7 and 8 of the socket REMOTE (X1).
■
apply a stop command via the interface.
■
for the power supply units offered or recommended by
Oerlikon Leybold Vacuum switch off the DC voltage.
After switching off, the green status LED will flash until the
rotor of the turbomolecular pump is at standstill. This may
take several minutes. With the DC power supply off, the
turbomolecular pump will act as a generator supplying the
frequency converter with energy as indicated by the yellow
power LED.
If a failure occurs the turbomolecular pump will be shut
down automatically. The red LED at the frequency conver-
ter lights up.
To shut down the frequency converter, switch the pump off
and wait until the rotor of the turbomolecular pump has
arrived at standstill (green status LED off).
Then switch the mains power off and wait until the yellow
power LED is off. Then only disconnect any cable connec-
tions.
3.5
Emergency shut down
The emergency shutdown facility of a system controller
must be capable of shutting the pump down as detailed in
Chapter 3.3. The rotor of the turbomolecular pump may be
stopped faster by venting the pump; for this refer to the
Operating Instructions for the pump.
Operation
41
17200492_002_A5 - 04/2011 - © Oerlikon Leybold Vacuum