Lauda Semistat POU 3300 Скачать руководство пользователя

Страница: 2 / 30

Models S 1200, S 2400, S 4400, POU 3300, POU 3500

This manual and the information contained herein is the proprietary property of LAUDA-Noah,

LP.

No part of this manual may be reproduced or copied without the express written permission of

LAUDA-Noah, LP. Any unauthorized use of this manual or its contents is strictly prohibited.

DISCLAIMER AND LIMITATION OF LIABILITY

The information contained in this manual is subject to change by LAUDA-Noah, LP, without prior

notice. LAUDA-Noah, LP, makes no warranty of any kind whatsoever, either expressed or

implied, with respect to the information contained herein. LAUDA-Noah, LP, shall not be held

liable for damages, of whatever kind, as a result of the reliance on or use of the information

contained herein.

INTENDED USE

The intended use for this product is for semiconductor temperature control applications. Desired

temperature is achieved by heating/cooling a recirculating perfluorinated fluid, and rejecting

heat to the facility’s water loop. Each module is intended for installation with a LAUDA-Noah

Power Supply Controller (PSC)

PRODUCT USAGE STATEMENT

DANGER:

Read this entire manual and all other publications pertaining to the work to be

performed before installing, operating, or maintaining this equipment. Practice all

plant and product safety instructions and precautions. Failure to follow

instructions can cause personal injury and/or property damage. If the equipment

is used in a manner not specified by the manufacturer, the protection provided by

the equipment may be impaired. All personnel who work with or who are exposed

to this equipment must take precautions to protect themselves against serious or

possibly fatal bodily injury. LAUDA-Noah, LP, provides information on its products

and associated hazards, but it assumes no responsibility for the after-sale

operation of the equipment or the safety practices of the owner or user. This

equipment produces or uses potentially lethal high-voltage, high-current,

electrical power.

NEVER DEFEAT INTERLOCKS OR GROUNDS.

Содержание Semistat POU 3300

Страница 1: ...Rev D 2 19 19 Temperature Control System MODELS Semistat S 1200 S 2400 S 4400 POU 3300 POU 3500 OPERATION MANUAL LAUDA Noah LP 2501 SE Columbia Way Ste 140 Vancouver WA 98661 USA ...

Страница 2: ...ieved by heating cooling a recirculating perfluorinated fluid and rejecting heat to the facility s water loop Each module is intended for installation with a LAUDA Noah Power Supply Controller PSC PRODUCT USAGE STATEMENT DANGER Read this entire manual and all other publications pertaining to the work to be performed before installing operating or maintaining this equipment Practice all plant and p...

Страница 3: ...ons_______________________________________________________ 15 3 Startup ________________________________________________________________ 17 3 1 Fill Procedure _____________________________________________________________ 17 3 2 System Startup ____________________________________________________________ 18 4 Operation ______________________________________________________________ 19 4 1 PSC Panel__...

Страница 4: ...ns Pin and signal names appear in capitalized italics DUTY CYCLE A Technical terms appear in italicized text when first introduced Unit labels switches indicators etc generally appear in boldface letters as they are labeled on the unit MODIFY Commands 162 and command names setpoint appear in boldface lowercase letters Icons Symbols This symbol represents important notes concerning potential harm t...

Страница 5: ...city are within specifications before turning on the power supplies Use proper electrostatic discharge ESD precautions Do not attempt to operate product outside of its specified electrical range 1 3 Risk of Burns Avoid areas of the unit marked with the heat hazard label to reduce the risk of burns Additionally use insulation on process hose tubing and fittings to reduce the exposure of potentially...

Страница 6: ...U 3500 5 Certification Certain options of this product are pending certification by CE certification EMC measurements SEMI S2 For more information refer to the letter of conformance US or declaration of conformity EU accompanying the product ...

Страница 7: ... stated directives and standards the following conditions of use must be met Operate the point of use module only within a system configuration that contains accessory components authorized and provided by LAUDA Noah LP or one of its authorized agents Install and operate this device in an over voltage category II installation only Install and operate this device only in a pollution degree 2 or bet...

Страница 8: ...arrier Utilize the handles on the top of the unit for transport and use a 2 person lift for the POU 3500 and S 4400 2 3 Site and Climate The unit must be installed vertically according to the markings on the side of the unit We recommend that the unit be located no more than 3 8m 12 5 ft away from the temperature control target The electrical protection degree of the unit is IP2X indicating the un...

Страница 9: ...le denotes the climatic specifications of the unit Temperature Relative Humidity Air Pressure Operating 0 C to 50 C 32 F to 122 F 10 to 90 1 2 g m3 to 25g m3 1 Atm Storage and Transportation 20 C to 60 C 4 F to 140 F 10 to 90 1 2 g m3 to 25g m3 1 Atm 1 Noncondensing ...

Страница 10: ...Models S 1200 S 2400 S 4400 POU 3300 POU 3500 9 2 4 Identification of Ports and Connections The following illustration depicts the unit s external fittings and connectors ...

Страница 11: ...onnector that can be adapted to either a barb fitting or a Swagelok compression tube adapter WARNING For applications where the temperature set point of the unit is less than the dew point of the environment CDA Clean Dry Air must be used to protect the unit from condensation Be sure to supply this port with the recommended CDA flow rate CDA specifications are listed in a label on the unit POU 330...

Страница 12: ...S 4400 POU 3300 POU 3500 11 POU 3500 When connecting the process supply and return lines follow the following diagram Recall that the unit must be installed no more than 3 8m 12 5 ft away from the temperature control target ...

Страница 13: ...ldup of moisture due to condensation Caution Working with Perfluorinated Fluids Contain any spills and absorb with available inorganic material Perfluorinated fluids are not considered hazardous but do have high global warming potential Care should be taken to minimize emissions Check with the manufacturer s MSDS for the specific process loop cooling fluid used for more information ...

Страница 14: ...rectionality of the water flow for optimal performance Using a flow meter verify that the unit is receiving the recommended flow rate for that particular module Be sure that shutoff valves for the incoming facility water are located close to the location of install for ease of access These valves must be lockable in the OFF position for proper energy isolation POU 3300 S 2400 ...

Страница 15: ...Models S 1200 S 2400 S 4400 POU 3300 POU 3500 14 POU 3500 ...

Страница 16: ...circular connector female end connecting with the module and a 25 pin D subminiature connector connecting to the PSC This is labeled Signal to Module Connect the PSC s AC power cable to either tool or facility power via a receptacle fed from a circuit breaker Note A hardwired power connection is NOT recommended The power cable is supplied with a plug and the minimum service requirements can be fou...

Страница 17: ...secondary containment devices should not interfere with access to the PCW or drain fittings on the bottom of the unit and be designed for easy removal of the collected fluids Module Minimum volume of Secondary Containment L S1200 1 10 S 2400 1 50 S 4400 2 75 POU 3300 1 50 POU 3500 2 75 As a final precaution these secondary storage containers must have fluid detection and alarm capabilities in orde...

Страница 18: ... not including external plumbing as well as a pressurized fill canister CAUTION Use only approved process fluids Do not use water or a mixture of water and ethylene glycol 3 1 Fill Procedure Fill the canister with process fluid to the 2 0 liter mark Do not top off Leave room for air Connect the quick disconnect fitting on the fill canister s tube to the mating quick disconnect fill port on the top...

Страница 19: ...procedure is needed to purge the entire process loop of air Check that the EMO button located on the right side of the controller front panel is protruding If pressed in twist clockwise to reset The EMO Disable key is used during servicing only Turn on the PSC and verify that the PSC is displaying the temperature of fluid in the module Press the START STOP button to start the system noting that th...

Страница 20: ...REMOTE LOCAL Switches the system s operation mode from tool controlled REMOTE to front panel controlled LOCAL CHANGE SETPOINT Press this button to initiate a change in the process setpoint while in local mode ALARM SILENCE Press this button to mute any audible alarm as well as clear an alarm once its condition has been rectified YES NO BACK ENTER In addition to confirming or denying inquiries from...

Страница 21: ...emove the unit the unit must be detached from the facility connections water electricity and CDA 1 Identify the connections to CDA Facility water and electrical connectors to the PSCX a CDA is connected to the port on the top of the unit Follow this tube to the valve monitoring the CDA pressure b Facility water connections are on the bottom of the unit Trace these tubes back to their flow meter an...

Страница 22: ...procedure Press the Start Stop key to enter idle mode then toggle the power switch off Depressurize the fill canister by unscrewing the trigger assembly from the top of the canister Leave the bottom hose of the trigger assembly in the canister but do not screw back in place Connect the fill canister hose to the quick disconnect fitting on the bottom of the module labeled Drain Open the Fill and Se...

Страница 23: ...mally FAN FLOW FAULT Internal fan is not functioning properly Contact LAUDA for service when able Hard Alarm Display Description Solution SEMISTAT POWER SUPPLY INTERRUPTION Power supply for thermoelectrics fails self diagnostics Unit must be serviced Verify if the alarm is caused by the module or PSC and contact your service provider for Lauda Noah products PROCESS SENSOR FAULT RTD Open RTD sensor...

Страница 24: ...below this value the power supply outputs pump thermoelectrics heater are turned off Verify that the process value limits on the PSC are set to values within the range of the application TE OVERTEMP Open thermoelectric snap switch Confirm that the temperature setpoint is in the acceptable operating range of the unit and that facility water flow is meeting the required spec for the unit PUMP FAULT ...

Страница 25: ...the EMO OUT input is not used it must be jumpered Connector is a 9 pin D subminiature connector labeled EMO OUT on the back of the controller Connector is supplied with the unit Process temperature fluctuates 1 PID parameters are not properly tuned for the process 2 Controller software needs to be reset 1 Adjust the heating and cooling PID parameters 2 Perform this step only when tool is not proce...

Страница 26: ...y leaks If leakage problems persist try using two continuous hoses between the module and the process equipment Controller does not communicate with host equipment 1 Controller is not in Remote mode 2 Communication connector is not attached securely 3 Communication protocol is not correct 4 Controller address set incorrectly 1 Press the Remote Local key on the controller 2 Check communication conn...

Страница 27: ... 1400 1500 2600 Cooling capacity at 10 C W 900 950 1925 2000 3500 Cooling capacity at 20 C W 1200 1200 2450 2400 4400 Heater Heating capacity W 3000 3000 6000 6000 12000 Temperature Working temperature range C 20 90 20 90 20 90 20 90 20 90 Absolute measurement accuracy K 1 0 additive calibratable 1 0 additive calibratable 1 0 additive calibratable 1 0 additive calibratable 1 0 additive calibratabl...

Страница 28: ... 33 1 25 66 2 50 66 2 50 Interfaces Barb Process Barb Process Barb Process Barb Process Barb Process Swagelok Compression PCW Swagelok Compression PCW Swagelok Compression PCW Swagelok Compression PCW 2X Swagelok Compression PCW Heat transfer liquids Perfluorinated Fluid 3M FC 3283 Galden HT135 Perfluorinated Fluid 3M FC 3283 Galden HT135 Perfluorinated Fluid 3M FC 3283 Galden HT135 Perfluorinated...

Страница 29: ...0 120 2 3 Dewpoint C 30 or lower 30 or lower 30 or lower 30 or lower 30 or lower User Interface Display N A N A N A N A N A Value input PSC Keypad PSC Keypad PSC Keypad PSC Keypad PSC Keypad Safety Concept Safety Class I NFL non flammable liquids I NFL non flammable liquids I NFL non flammable liquids I NFL non flammable liquids I NFL non flammable liquids Electronic interface RTDs Fill Sensor Ove...

Страница 30: ...40 5 to 40 5 to 40 Relative humidity maximal 80 at 31 C maximal 80 at 31 C maximal 80 at 31 C maximal 80 at 31 C maximal 80 at 31 C Operational area for internal use altitude up to 2000 m for internal use altitude up to 2000 m for internal use altitude up to 2000 m for internal use altitude up to 2000 m for internal use altitude up to 2000 m Overvoltage category Category II Category II Category II...

Результаты поиска

Содержание Semistat POU 3300

Отзывы:

Похожие инструкции для Semistat POU 3300

Бренды по названию

Популярные бренды

Lauda Semistat POU 3300, Руководство по эксплуатации

Результаты поиска

Содержание Semistat POU 3300

Отзывы:

Похожие инструкции для Semistat POU 3300

Бренды по названию

Популярные бренды