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Kurt J. Lesker 100014434, Руководство по эксплуатации и обслуживанию

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Series 902 Piezo

31

Pressure to Voltage Table

Pressure Linear10

Log10

Linear5

Log5

(Torr)

(Volts)

(Volts)

(Volts)

(Volts)

Power Off

0.0000

0.0000

0.0000

0.0000

0.0

0.0000

2.0000

0.0000

1.0000

0.1

0.0010

2.0000

0.0005

1.0000

0.2

0.0020

2.6021

0.0010

1.3010

0.3

0.0030

2.9542

0.0015

1.4771

0.4

0.0040

3.2041

0.0020

1.6021

0.5

0.0050

3.3979

0.0025

1.6990

0.6

0.0060

3.5563

0.0030

1.7782

0.7

0.0070

3.6902

0.0035

1.8451

0.8

0.0080

3.8062

0.0040

1.9031

0.9

0.0090

3.9085

0.0045

1.9542

1.0

0.0100

4.0000

0.0050

2.0000

2.0

0.0200

4.6021

0.0100

2.3010

3.0

0.0300

4.9542

0.0150

2.4771

4.0

0.0400

5.2041

0.0200

2.6021

5.0

0.0500

5.3979

0.0250

2.6990

6.0

0.0600

5.5563

0.0300

2.7782

7.0

0.0700

5.6902

0.0350

2.8451

8.0

0.0800

5.8062

0.0400

2.9031

9.0

0.0900

5.9085

0.0450

2.9542

10.0

0.1000

6.0000

0.0500

3.0000

20.0

0.2000

6.6021

0.1000

3.3010

30.0

0.3000

6.9542

0.1500

3.4771

40.0

0.4000

7.2041

0.2000

3.6021

50.0

0.5000

7.3979

0.2500

3.6990

60.0

0.6000

7.5563

0.3000

3.7782

70.0

0.7000

7.6902

0.3500

3.8451

80.0

0.8000

7.8062

0.4000

3.9031

90.0

0.9000

7.9085

0.4500

3.9542

100.0

1.0000

8.0000

0.5000

4.0000

200.0

2.0000

8.6021

1.0000

4.3010

300.0

3.0000

8.9542

1.5000

4.4771

400.0

4.0000

9.2041

2.0000

4.6021

500.0

5.0000

9.3979

2.5000

4.6990

600.0

6.0000

9.5563

3.0000

4.7782

700.0

7.0000

9.6902

3.5000

4.8451

800.0

8.0000

9.8062

4.0000

4.9031

900.0

9.0000

9.9085

4.5000

4.9542

1000.0

10.0000

10.0000

5.0000

5.0000

Содержание 100014434

Страница 1: ...Operation and Maintenance Manual Series 902 Piezo Transducer...

Страница 2: ......

Страница 3: ...Series 902 Piezo Part 100014434 Series 902 Piezo Transducer...

Страница 4: ...ditional information The part number can be found on your packing slip Both the part number and serial number are located on the bottom side of the housing For more information or literature contact K...

Страница 5: ...Connection 14 Electrical Connection 15 Input Output Wiring 15 902 Piezo Electrical Connections Table 16 Relay Inductive Loads and Arc Suppression 16 Piezo Display Module Connection 17 Operation 18 902...

Страница 6: ...Status SS1 25 Calibration Commands 25 User Zero Calibration ZER 25 User Span Calibration SPN 25 Analog Output 26 Linear versus Logarithmic Analog Output 26 Linear Analog Output 26 Logarithmic Analog O...

Страница 7: ...ing shipment If anything has been damaged notify the carrier immediately Keep all shipping materials and packaging for claim verification If any items are missing from the package call Kurt J Lesker C...

Страница 8: ...CAUTION Refer to the manual Failure to heed the message could result in personal injury serious damage to the equipment or both Calls attention to important procedures practices or conditions Symbols...

Страница 9: ...transducer should be connected to earth ground both through the vacuum flange and the back shell of the electrical connector Allow only qualified technicians to service the 902 Piezo transducer Users...

Страница 10: ...ective 89 336 EEC NW16 KF 4 VCR F 8 VCR F 1 5 x 1 5 x 2 25 38 1 x 38 1 x 57 2 mm 3 4 oz 97 g Measuring range Set point range Analog out Maximum pressure Accuracy Repeatability Temperature effect on sp...

Страница 11: ...hows the top view of the 902 Optional Piezo Display Module The 902 has an optional Piezo Display Module PDM to display pressure The display reads the analog output voltage from the 902 and translates...

Страница 12: ...and when the desired pressure is reached trigger the next event in the system process This manual describes the installation and configuration tasks necessary to set up the 902 Piezo After the device...

Страница 13: ...fore and roughing pressures generated by mechanical vacuum pumps Alarms to warn of abnormal pressures Start or stop system processes with a relay set point Monitor backfill and venting of gases Contr...

Страница 14: ...the vapor could contaminate the sensor elements and cause the calibration to shift Whenever possible install the 902 with the vacuum port facing down to keep particulates or liquids from entering the...

Страница 15: ...log output voltages are pins 5 and 8 Connect them to a differential input voltmeter or an analog to digital A D converter with a differential input in a system controller Do not connect the negative s...

Страница 16: ...x 107 R E Ia where C is in farads R is in ohms I is DC or Acpeak load current in amperes E is DC or Acpeak source voltage in volts a 1 50 E Note that Rmin 0 5 and Cmin 1 0 x 10 9 F PIN 1 PIN 5 PIN 6 P...

Страница 17: ...he rest of the system The following figure shows how to connect the PDM to the 902 Use the two slide lock posts supplied with the PDM kit NALOG 0IEZO 3ERIES 4RANSDUCER 4RANSDUCER 2EMOVE X EX SCREWS AN...

Страница 18: ...85 allows communication with multiple transducers whereas RS 232 allows communication with only a single transducer The remainder of this manual refers to RS 485 only 902 Piezo Factory Defaults Table...

Страница 19: ...le devices attached to the same system For example use 255 to change the analog output format for all devices Query and Command Syntax Queries return current parameter settings commands change the par...

Страница 20: ...K NAK code FF Examples ACK response 253ACK9600 FF baud rate changed to 9600 NAK response 253NAK160 FF command had an error possibly a typo The following list provides descriptions of the NAK codes tha...

Страница 21: ...mmand returns or sets the format of the analog output from the Digital to Analog Converter See the Analog Output section for information on the different linear and logarithmic analog outputs Values L...

Страница 22: ...or sets the pressure unit to Torr mBar or Pascal The units affect all pressure measurements including set point values Values TORR MBAR PASCAL default TORR Query 001U FF Query Response 001ACKTORR FF C...

Страница 23: ...1 command returns the measured pressure Query 001PR1 FF Query Response 001ACK760 3 FF Serial Number SN The SN command returns the 902 serial number Query 001SN FF Query Response 001ACK000012345 FF Tim...

Страница 24: ...either 1 or 1 Torr whichever is greater below or above the set point value see Set Point Direction SD1 below and Set Point Value SP1 above If the hysteresis and set point are the same value or nearly...

Страница 25: ...ducer Perform zero calibration only when the pressure is below 10 mTorr Perform span calibration only with a very accurate pressure reference like the MKS 390A which has reading errors of less than 0...

Страница 26: ...0 Linear Analog Output The advantage of the default 10 VDC linear analog output is that it is easy to interpret since the pressure reading Torr is equal to 100 times the voltage reading e g 7 600 volt...

Страница 27: ...mic analog output The Pressure to VoltageTable following the analog output graphs shows the relationship of linear and logarithmic analog output to pressure Linear 10 The graph below shows the correla...

Страница 28: ...the output the user will see if the Analog Output Format DAC value is LINEAR5 To receive analog output for LINEAR5 the converter must have a 5 volt scale The linear output is 5 mV Torr or P Torr V x 2...

Страница 29: ...to 10 volt scale This is the output the user will see if the Analog Output Format DAC value is LOG10 To receive analog output for LOG10 the converter must have a 10 volt scale The logarithmic output i...

Страница 30: ...a 1 to 5 volt scale This is the output the user will see if the Analog Output Format DAC value is LOG5 To receive analog output for LOG5 the converter must have a 5 volt scale The logarithmic output i...

Страница 31: ...0 0 0500 5 3979 0 0250 2 6990 6 0 0 0600 5 5563 0 0300 2 7782 7 0 0 0700 5 6902 0 0350 2 8451 8 0 0 0800 5 8062 0 0400 2 9031 9 0 0 0900 5 9085 0 0450 2 9542 10 0 0 1000 6 0000 0 0500 3 0000 20 0 0 20...

Страница 32: ...a c o r e z t s u j d A o r e Z r e s U R E Z n o i t a r b i l a C e h t s s e r p r o d n a m m o c O R E Z r e c u d s n a r t e h t f o p o t n o n o t t u b e r u s s e r p c i r e h p s o m t A...

Страница 33: ...nd Part Replacement Description Part Number 902 display module 1000 Torr red LED K902001 Cable 9 pin D sub 10 feet K31706S Cable 9 pin D sub 25 feet K31707S Cable 9 pin D sub 50 feet K31708S Operation...

Страница 34: ...is desired if the product is contaminated with potentially corrosive reactive harmful or radioactive materials gases or chemicals When products are used with toxic chemicals or in an atmosphere that...

Страница 35: ...istive sensors are very high sensitivity very good linearity and virtually no creep or hysteresis A disadvantage with piezo sensors can be their nonlinearity with temperature The 902 has electronic ci...

Страница 36: ...36 Series 902 Piezo...

Страница 37: ...Series 902 Piezo...

Страница 38: ...Series 902 Piezo...

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