Kurt J. Lesker 100014434, Руководство по эксплуатации и обслуживанию

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12 Series 902 Piezo
The 902 Piezo measures chamber pressures directly as a force or pressure is
applied to the 902 Piezo’s diaphragm. Once integrated into the vacuum
system, the 902 Piezo’s functions are computer-controlled, requiring little
manual intervention by the user. This enables the system to monitor pressure
as a procedure invisible to the user, and when the desired pressure is
reached, trigger the next event in the system process.
This manual describes the installation and configuration tasks necessary to
set up the 902 Piezo. After the device is set up, a software engineer at the
user’s installation would use the communications protocol described in this
manual to create a software program (in, for example, Visual Basic, C, or
C++) that will automatically control 902 Piezo operation.
For additional information on how the 902 Piezo works, see the appendix How
the 902 Piezo Works .
About the 902 Piezo