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WARNING

While the Multi-channel Flow Rate Sensor Controller is in
operation, do not apply an external magnetic field to the
controller and sensor head. This could cause unintentional
operation leading to damage to equipment or to personal
injury.

When wiring, be careful to ensure that the wiring polarity is
correct.
A wrong polarity could result in damage to the Multi-channel
Flow Rate Sensor controller.

CAUTION

Always use the specified sensor head with this product.
Use of an unspecified item could result in erratic operation.

When handling the Multi-channel Flow Rate Sensor Controller
and sensor head, avoid hitting, dropping, or bumping with
excessive force (490 m/s

2

[50 G] or more). Even if not

apparently damaged, the internal parts could be damaged,
leading to erratic operation.

Do not short the load.
Switching on sensor output with a shorted load could cause
damage to the Multi-channel Flow Rate Sensor Controller due
to overcurrent. 
Example of load shorting: Connecting the output lead wires for
sensor output directly to the power supply.

When mounting the fitting to the sensor head, the tightening
torque should not exceed 2.5 N

m [1.84 ft

lbf]. In addition,

when securing the sensor head, use an M3 screw and the
tightening torque should not exceed 0.6 N

m [0.44 ft

lbf].

Excessive tightening could damage the sensor head, etc.
Always switch off the power before connecting the sensor
head and controller. Attempting to connect the sensor head
with the power on could cause erratic operation in the
controller due to surge voltage, etc.

DANGER

While the product is in operation, do not attempt to adjust the
attached mechanisms (connecting and disconnecting the
wiring connector, or attach or position the sensor head, etc.).
Abnormal operations could result in injury.

General precautions

1.

If power is supplied from a commercial switching regulator,
ensure that the frame ground (F.G.) terminal of the power supply
is connected to an actual ground.

2.

In the case of noise generating equipment (switching regulator,
inverter motor, etc.) being used in the vicinity of sensor mounting
portion, connect the frame ground (F.G.) terminal of the
equipment to an actual ground.

3.

When wiring is completed, check that there is no error in the
wiring connections.

Wiring

1.

Sensor head is designed for use with non-corrosive gas. It cannot
be used for liquid or corrosive gas.

2.

Use within the rated voltage range for power supply.

3.

Do not use during the initial transient time (0.5 sec.) after the
power supply is switched on.

4.

Do not operate the keys with pointed or sharp objects.

5.

When using window comparator mode 2 in operations that
capture repeated utilization of the reference flow rate, the
guaranteed number of times may be exceeded in a short period of
time. In such cases, use window comparator mode 3.

6.

If using with window comparator mode 3, use FSU-S-D.

Others

Handling Instructions and Precautions

MULTI-CHANNEL FLOW RATE SENSOR CONTROLLERS

Safety Precautions (Multi-channel Flow Rate Sensor Controllers)

Содержание Flow FSU

Страница 1: ...um valve ON Workpiece lifted by vacuum Vacuum break L R min L2 L1 ΔL Reference flow rate capture ON t Switch output Hysteresis Discharge to atmospheric pressure Vacuum valve ON Workpiece lifted by vacuum Vacuum break L R min L1 L2 ON t Switch output Hysteresis Hysteresis Discharge to atmospheric pressure Vacuum valve ON Workpiece lifted by vacuum Vacuum break Window comparator mode 2 When L1 has b...

Страница 2: ... and controller Attempting to connect the sensor head with the power on could cause erratic operation in the controller due to surge voltage etc DANGER While the product is in operation do not attempt to adjust the attached mechanisms connecting and disconnecting the wiring connector or attach or position the sensor head etc Abnormal operations could result in injury General precautions 1 If power...

Страница 3: ... be careful to avoid applying excessive force on the lead wires 4 3 2 1 1ch PSUW FS 2ch 3ch 4ch The connector for 4 sensor head Connector for power supply switch and communication cable Power supply switch and communication cable Sensor head Lock lever Lock lever Cover Sensor head side connector Attaching and removing of the sensor head and the power supply switch and communication cable Attaching...

Страница 4: ...g preparation Connect the connectors to the sensor heads See p 801 for the connection procedure for the sensor head connectors Connect the sensor heads one to four pcs and the power supply switch and communication cable to the controller See p 801 for attaching and removing of the sensor head and the power supply switch and communication cable Setting procedure Window comparator mode 1 CO1 Window ...

Страница 5: ...m hold Flow rate display deleted Output mode check Sensor head type check ON ΔL OFF point check Reference flow rate ΔL OFF point check Switch output condition display Version display Reference flow rate capture method using general purpose I O input 24V SW PIN 1 0 5V or less 10 ms or longer Captured at startup 1 2 3 4 PIN SW PIN 1 1 2 3 4 PIN 1 c h 4 c h Flow rate sensor head Multi channel flow ra...

Страница 6: ...rocedure to switch off the flow rate display Flow rate display switch off Procedure 1 2 3 4 5 Device operation 7 seg display Remark 7 seg LED off 7 seg LED re lighted Use the following procedure to switch the flow rate display to autoscan mode Since autoscan mode is combined with the key lock function no key operation other than cancellation of autoscan can be performed Note Autoscan mode is cance...

Страница 7: ...and bottom hold cannot be implemented at the same time Peak hold and bottom hold Procedure 1 2 3 4 5 6 7 Peak hold 7 seg display Remark Hold start Hold cancel Bottom hold 7 seg display Error Display Error display n is the targeted channel n is the targeted channel Error cancel In the case of a wire break shut off the power and replace the sensor head Correct the error and then press the mode key f...

Страница 8: ...eresis width setting for Channel 4 HYS1 1 1 1CH 2 2CH 3 3CH 4 4CH Always input 1 Signal name DC24V 0V OUT1 OUT2 OUT3 OUT4 0V RXD TXD RTS CTS Controller side Personal computer side D sub 25 pin configuration Pin No 1 2 3 4 5 6 7 8 9 10 11 Signal name D G TXD RXD RTS CTS DSR DCD DTR Pin No 7 2 3 4 5 6 8 20 Serial communication cable Power and switch output cable D sub 9 pin configuration Signal name...

Страница 9: ... Enabled for window comparator mode 4 only Function Sets switch output reversed not reversed Send example INV1 0c rl f Response example OK c rl f Response example NG c rl f 21 illegal type I N V 1 0 1 1CH 2 2CH 3 3CH 4 4CH 0 Not reversed 1 Reversed P1 1 1CH 2 2CH 3 3CH 4 4CH C Function Displays the L1 ΔL and L2 points for each channel Send example C1 c rl f Response example 1 00 c rl f L1 ΔL 0 50 ...

Страница 10: ...LED Send example DIS 1 c rl f Response example OK c rl f Response example NG c rl f 21 illegal type DIS 1 1 Not lighted 0 Lighted AS Function Sets ON OFF for autoscan function Send example AS 1 c rl f Response example OK c rl f Response example NG c rl f 21 illegal type AS 1 1 ON 0 OFF PHL Function Sets ON OFF for peak hold function Send example PHL 1 c rl f Response example OK c rl f Response exa...

Страница 11: ... Sensor Sensor Sensor Sensor Main circuit Main circuit Main circuit Main circuit Reference flow rate capture Reference flow rate capture Sensor head 3ch Sensor head 4ch Brown V Blue 0V Black analog voltage output Brown V Blue 0V Black analog voltage output Main circuit Multi channel flow rate sensor controller Power supply and switch output cable Brown SW4 Black 0V Yellow SW3 Green SW2 White Red V...

Страница 12: ...w comparator mode 3 Window comparator mode 4 Compatible with window comparator mode 4 only Variable Can be freely set at 2 digits or more 7 segment LED 3 digit display Red LED lights up when ON Flow rate display channel green LED lights up UP DOWN MODE Conforms with RS232C 10 50 C 14 122 F storage 20 80 C 4 176 F no condensation and freezing IEC61000 4 4 Power supply line 1KV level 2 Sensor input ...

Страница 13: ...o come within 1 FS of final attained voltage flow rate Within 10 sec 12 mA MAX Between all external connector terminals and body AC500V for 1 min or AC600V for 1 sec Between all external connector terminals and body 50 MΩ at DC500V megger M5 female thread brass insertion tightening torque at 2 5 N m 1 84 ft lbf or less Gas contact part PPS plastic flow path body ceramic substrate brass connections...

Страница 14: ... Flow rate sensor head PM100 KB100 Mini clamp wire mount plug PSU M Power supply switch and communication cable Sensor head connecting cable Flow rate sensor head FS PSUK PSUW Communication cable Blank No communication cableNote 1 D With communication functionNote 2 Cable length 3L 3000 mm 118 in 5L 5000 mm 197 in Cable length 3L 3000 mm 118 in 5L 5000 mm 197 in Power supply switch and communicati...

Страница 15: ... clamp wire mounting socket PSUK Dimensions mm in Model PSUK 3L PSUK 5L L 3000 118 5000 197 7 8 0 307 30 1 181 5 0 197 2 65 0 1043 2 M2 6 0 45 Depth 6 0 236 27 6 1 087 32 1 260 5 3 0 209 40 1 575 40 1 575 4 digit LED flow rate indicator Mode button LED red A S OUT SW OUT ch 1 2 3 4 FSU LED green DOWN button UP button 4 switch output indicators 4 autoscan channel indicators Mounting thread The conn...

Страница 16: ...al communication cable Note 3 leads 7 0 276 PSUW 2 φ4 5 0 177 9 0 354 11 0 433 4 5 0 177 16 0 630 11 0 433 2 φ2 9 0 114 9 6 0 378 7 0 276 24 0 945 7 0 276 30 1 181 4 0 157 38 1 496 12 6 0 496 1 6 0 063 PSU BR Model PSUW 3L PSUW 5L L 3000 118 5000 197 Note Only PSUW D is available Hex socket head screw M2 6 0 45 length 5 0 197 2 screws provided MULTI CHANNEL FLOW RATE SENSOR CONTROLLERS Notes 1 The...

Страница 17: ...for vacuum breaking flow Flow rate sensor head Vacuum Valve Unit with flow rate sensor CRCB 0064W V P R V Vacuum port R Exhaust port P Pressure port Adjusting needle for vacuum breaking flow Flow rate sensor head Micro ejector with flow rate sensor CRCB 0065W Note For detailed specification and dimension consult us ...

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